JPH0363568U - - Google Patents
Info
- Publication number
- JPH0363568U JPH0363568U JP12635889U JP12635889U JPH0363568U JP H0363568 U JPH0363568 U JP H0363568U JP 12635889 U JP12635889 U JP 12635889U JP 12635889 U JP12635889 U JP 12635889U JP H0363568 U JPH0363568 U JP H0363568U
- Authority
- JP
- Japan
- Prior art keywords
- target
- sputtering
- substrate
- inert atmosphere
- cooling device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000005672 electromagnetic field Effects 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 230000006837 decompression Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635889U JPH0363568U (enExample) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12635889U JPH0363568U (enExample) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363568U true JPH0363568U (enExample) | 1991-06-20 |
Family
ID=31674172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12635889U Pending JPH0363568U (enExample) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363568U (enExample) |
-
1989
- 1989-10-26 JP JP12635889U patent/JPH0363568U/ja active Pending
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