JPH0360906A - Processing method making work upper face as reference and device therefor - Google Patents

Processing method making work upper face as reference and device therefor

Info

Publication number
JPH0360906A
JPH0360906A JP19688689A JP19688689A JPH0360906A JP H0360906 A JPH0360906 A JP H0360906A JP 19688689 A JP19688689 A JP 19688689A JP 19688689 A JP19688689 A JP 19688689A JP H0360906 A JPH0360906 A JP H0360906A
Authority
JP
Japan
Prior art keywords
main shaft
touch sensor
tool
workpiece
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19688689A
Other languages
Japanese (ja)
Other versions
JPH0749166B2 (en
Inventor
Shin Maeno
前野 伸
Nobutaka Takenaka
竹中 信孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takeuchi Manufacturing Co Ltd
Original Assignee
Takeuchi Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takeuchi Manufacturing Co Ltd filed Critical Takeuchi Manufacturing Co Ltd
Priority to JP1196886A priority Critical patent/JPH0749166B2/en
Publication of JPH0360906A publication Critical patent/JPH0360906A/en
Publication of JPH0749166B2 publication Critical patent/JPH0749166B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To make a blind hole in a constant depth irrespective of the gap with a table and the thickness error of a work by pressing the upper face of a work by a pressure foot and piercing in a specific depth with the upper face of the work as the reference. CONSTITUTION:A master bar having the reference length of a tool 6 is fitted to a main shaft 4, the distance frm the lower end of the master bar at the reference position up to the upper face of a table 1 is measured and stored, a pressure foot 7 is descended with the main shaft 4, slightly descended after its contact with the table 1 and the difference C from the moving amount of the time when a magnetic sensor 10 is turned ON in relation to the relative position of the main shaft 4 and pressure foot 7 is stored. The main shaft 4 fitted with the tool 6 at the working time is descended and after the magnetic sensor 10 being turned ON it is descended by C+E(working depth)= D. A touch sensor is also provided on a subtable, the main shaft 4 fitted with the master bar is descended form the reference position, brought into contact with the touch sensor and the difference in the moving amount until its turning ON and the moving amount of the tool 6 being descended with its fitting is taken as the correction amount of the length of the tool 6.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、プリント基板に対する所定の深さの穴あけま
たは座ぐり加工を正確に施こすための加工方法およびそ
の装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a processing method and apparatus for accurately drilling or counterboring a printed circuit board to a predetermined depth.

(従来の技術) 第6図は多層プリント基板の内部構造の一例を示すもの
で、図中aは積層した絶縁層、bは銅箔等による導電層
で、Cはこれら各層を貫通するスルーホール、dは上面
より所定の深さまで穿孔したブラインドホールである。
(Prior art) Figure 6 shows an example of the internal structure of a multilayer printed circuit board, in which a is a laminated insulating layer, b is a conductive layer made of copper foil, etc., and C is a through hole penetrating each of these layers. , d is a blind hole drilled to a predetermined depth from the upper surface.

しかして従来、ブラインドホールdのような所定の深さ
の盲穴を穴あけ加工するには、穴あけ機のワークテーブ
ル上にワークを載置すると共に、ワークの下面をテーブ
ル上面にできるだけ密着させるようにして、その状態で
テーブル上面を基準にしてブラインドホールdを加工し
ていた。
Conventionally, in order to drill a blind hole of a predetermined depth, such as blind hole d, a workpiece is placed on the work table of a drilling machine, and the bottom surface of the workpiece is brought into close contact with the top surface of the table as much as possible. In this state, the blind hole d was machined using the top surface of the table as a reference.

(発明が解決しようとする課題) しかしながら上述したような従来の加工方法は、ワーク
テーブルの上面を基準にしてブラインドホールの穴あけ
加工を行っていたため、ワーク下面とテーブル上面との
間にワークの浮き上がりによって空隙が生じたり、ある
いはワークの厚さに誤差がある場合には、ブラインドホ
ールのワーク上面からの深さが一定せず、加工精度にば
らつきが生じるという問題点があった。
(Problem to be Solved by the Invention) However, in the conventional processing method as described above, blind holes were drilled based on the top surface of the work table, so the workpiece was raised between the bottom surface of the workpiece and the top surface of the table. If a gap is created due to this, or if there is an error in the thickness of the workpiece, the depth of the blind hole from the top surface of the workpiece will not be constant, resulting in variations in machining accuracy.

(課題を解決するための手段) 上述の問題点を解決するため本発明においては、工具の
基準長を有するマスターバーを数値制御方式のプリント
基板用穴あけ機の主軸に装着し、この主軸の基準位置に
おける前記マスターバーの下端からテーブル上面までの
距MAを記憶させ、つぎにその主軸と共にプレッシャー
フードを下降させて、そのプレッシャーフードをテーブ
ルに接触させた後、さらに主軸をわずかに下降させて主
軸とプレッシャーフードとの相対位置に関連して精密磁
気センサがONになった時の移動量Bを記憶させ、さら
にA−B=Cを記憶させ、目標とする加工深さをEとし
た時、加工時において工具を装着した主軸を下降させて
、前記精密磁気センサがONになってから、さらにC+
E=Dだけ下降させるようにする。
(Means for Solving the Problems) In order to solve the above-mentioned problems, in the present invention, a master bar having a reference length of the tool is attached to the main shaft of a numerically controlled printed circuit board drilling machine, and the reference length of this main shaft is The distance MA from the lower end of the master bar to the top surface of the table at that position is memorized, and then the pressure hood is lowered together with the main shaft so that the pressure hood comes into contact with the table, and then the main shaft is further lowered slightly to lower the main shaft. In relation to the relative position between the machine and the pressure hood, the amount of movement B when the precision magnetic sensor is turned on is memorized, A-B=C is memorized, and the target machining depth is E. During machining, after the spindle with the tool attached is lowered and the precision magnetic sensor is turned on, C+
Make it lower by E=D.

さらに、前記ワーク上面を基準とする加工方法において
、サブテーブルに精密タッチセンサを垂直に設けると共
に、この精密タッチセンサの上面にプランジャーを設け
、前記マスターバーを装着した主軸を基準位置から下降
させてプランジャーを介して精密タッチセンサに接触さ
せて、この精密タッチセンサがONになるまでの移動量
Iを記憶させ、ついで使用しようとする工具を主軸に装
着して基準位置から下降させて、プランジャーを介して
精密タッチセンサがONになるまでの移動量Jを記憶さ
せ、1−J=Kを理論工具長に対する補正値とする。
Furthermore, in the processing method using the top surface of the workpiece as a reference, a precision touch sensor is provided vertically on the sub-table, a plunger is provided on the top surface of the precision touch sensor, and the main shaft with the master bar attached thereto is lowered from the reference position. The tool is brought into contact with the precision touch sensor via the plunger, the amount of movement I until the precision touch sensor turns on is memorized, and then the tool to be used is attached to the spindle and lowered from the reference position. The amount of movement J until the precision touch sensor turns ON via the plunger is stored, and 1-J=K is used as a correction value for the theoretical tool length.

また、数値制御方式のプリン!・基板用穴あけ機におい
て、主軸とそれに付属するプレ・ンシャーフートのいず
れか一方に精密磁気センサを設けると共に、他方に前記
センサと対応するマグネ・ノドドグを設けてワーク上面
を基準とする加工装置を構成する。
In addition, numerically controlled pudding!・In a substrate drilling machine, a precision magnetic sensor is installed on either the main shaft or the pre-shaft foot attached to it, and a magnetic nose dog corresponding to the sensor is installed on the other side to form a processing device that uses the top surface of the workpiece as a reference. do.

また、前記装置において、サブテーブルに精密タッチセ
ンサを垂直に設けると共に、この夕・ソチセンサの上面
に接してプランジャーを設け、このプランジャーを介し
て前記主軸に装着したマスターバーおよび工具の下端を
接触させて前記精密タッチセンサを作動させるようにす
れば、これによって工具長の補正値を求めることができ
る。
In addition, in the above device, a precision touch sensor is provided vertically on the sub-table, and a plunger is provided in contact with the top surface of the Sochi sensor, and the lower end of the master bar and the tool attached to the main shaft are connected via the plunger. By making contact and activating the precision touch sensor, it is possible to obtain a tool length correction value.

(作 用) 上述のように構成した本発明装置を使用して行う本発明
の加工方法は、ワークの上面をプレッシャーフードによ
って一定の力で押圧し、この状態のワーク上面を基準と
して所定の深さのブラインドホールを穴あけするように
したから、ワーク下面とテーブル上面との間の隙間の有
無や、ワークの厚さの誤差等に関係なく、常に一定温さ
のブラインドホールを加工することができる。
(Function) In the processing method of the present invention using the apparatus of the present invention configured as described above, the upper surface of the workpiece is pressed with a constant force by a pressure hood, and the upper surface of the workpiece in this state is used as a reference to reach a predetermined depth. Since the blind hole is drilled at a constant temperature, it is possible to machine a blind hole at a constant temperature regardless of the presence or absence of a gap between the bottom surface of the workpiece and the top surface of the table, or errors in the thickness of the workpiece. .

また上述したように、理論工具長に対する補正値を求め
て、前記加工方法にこの補正値を加えれば、前記ブライ
ンドホールの深さの精度をさらに向上することができる
Furthermore, as described above, by determining a correction value for the theoretical tool length and adding this correction value to the processing method, the accuracy of the depth of the blind hole can be further improved.

(実施例) 以下、図面について本発明装置の実施例および本発明の
加工方法を説明する。
(Example) Hereinafter, an example of the apparatus of the present invention and a processing method of the present invention will be described with reference to the drawings.

図中1は数値制御方式のプリント基板用穴あけ機のワー
クを載置するテーブル、2はプリント基板用のワーク、
3はそのワーク2の上面から穴あけしたブラインドホー
ル、4は主軸、5は使用しようとする工具(ドリル)6
(第2.5図参照)の基準長を有するマスターバー 7
は主軸4の下端部を外包するように設けたプレッシャー
フード、8(第4,5図参照)は穴あけ機のフレーム、
9はこのフレーム8に固定したサブテーブルである。
In the figure, 1 is the table on which the workpiece of the numerically controlled printed circuit board drilling machine is placed, 2 is the workpiece for the printed circuit board,
3 is a blind hole drilled from the top surface of the workpiece 2, 4 is the main shaft, and 5 is the tool (drill) 6 to be used.
Master bar with reference length (see Figure 2.5) 7
is a pressure hood provided to enclose the lower end of the main shaft 4; 8 (see Figures 4 and 5) is the frame of the drilling machine;
9 is a sub-table fixed to this frame 8.

本実施例においては、第1.2図に示すようにプレンシ
ャーフート7の上部に精密磁気センサ10を設けると共
に、このセンサ10と対向する主軸4の側面にマグネッ
トドグ11を設ける。
In this embodiment, as shown in FIG. 1.2, a precision magnetic sensor 10 is provided on the upper part of the pressure foot 7, and a magnet dog 11 is provided on the side surface of the main shaft 4 facing the sensor 10.

また第4.5図に示すように、サブテーブル9に117
密クンチセンサ12を垂直に設けると共に、このタッチ
センサ12の上面に接してプランジャー13を設け、こ
のプランジャー13を介して前記主軸4に装着したマス
ターバー5および工具6の下端を接触させて前記精密タ
ッチセンサ12を作動させるようにする。なお■4は精
密タッチセンサ12およびプランジャー13を包囲する
リングでサブテーブル9上に設けたものである。
Also, as shown in Figure 4.5, 117
A fine-kunchi sensor 12 is provided vertically, and a plunger 13 is provided in contact with the upper surface of the touch sensor 12, and the lower ends of the master bar 5 and the tool 6 attached to the main shaft 4 are brought into contact via the plunger 13. The precision touch sensor 12 is activated. Note that 4 is a ring that surrounds the precision touch sensor 12 and the plunger 13 and is provided on the sub-table 9.

また本発明の加工方法は、第1図および第2図に示すよ
うに、工具6の基準長を有するマスターバー5を数値制
御方式のプリント基板用穴あけ機の主軸4に装着し、こ
の主軸4の基準位置(第1図の実線図の位置)における
前記マスターバー5の下端からテーブル1の上面までの
距離Aを測定して記憶させ、つぎにその主軸4と共にプ
レッシャーフード7を下降させて、そのプレッシャーフ
ード7をテーブル1に接触させた後、さらに第1図の二
点鎖線図で示すように、主軸4をわずかに下降させて主
軸4とプレッシャーフード7との相対位置に関連して精
密磁気センサ10がONになった時の移動IBを図示し
ていないNC装置より取り込んで記憶させ、さらにA−
B=Cを記憶させ、目標とする加工深さを第2,3図に
示すようにEとした時、加工時において工具6を装着し
た主軸4を下降させて、前記精密磁気センサ10がON
になってから、さらにC+E=Dだけ下降させるように
する。
Further, as shown in FIGS. 1 and 2, the processing method of the present invention involves mounting a master bar 5 having a standard length of a tool 6 on the main shaft 4 of a numerically controlled printed circuit board drilling machine, and Measure and store the distance A from the lower end of the master bar 5 to the top surface of the table 1 at the reference position (the position shown by the solid line in FIG. 1), and then lower the pressure hood 7 together with the main shaft 4, After the pressure hood 7 is brought into contact with the table 1, the main shaft 4 is lowered slightly as shown by the chain double-dashed line in FIG. The movement IB when the magnetic sensor 10 is turned ON is captured from an NC device (not shown) and stored, and further A-
When B=C is memorized and the target machining depth is set to E as shown in FIGS. 2 and 3, the spindle 4 with the tool 6 mounted thereon is lowered during machining, and the precision magnetic sensor 10 is turned on.
After that, it is further lowered by C+E=D.

また上記の加工方法において、使用工具6の長さの補正
を行うには、第4図に示すように、サブテーブル9に精
密タッチセンサ12を垂直に設けると共に、この精密タ
ッチセンサ12の上面にプランジャー13を設け、前記
マスターバー5を装着した主軸4を基準位置(第4図の
0レヘルを示す直線Z)から下降させてプランジャー1
3を介して精密タッチセンサ12に接触させて、この精
密タッチセンサ12がONになるまでの移動量IをNC
装置より取り込んで記憶させ、ついで第5図に示すよう
に、使用しようとする工具6を主軸4に装着して、が1
紀直線Zで示す基準位置から下降させて、プランジャー
13を介して精密タッチセンサ12がONになるまでの
移動量jをNC装置より取り込んで記1.0させ、1−
J=Kを理論工具長に対する補正値とする。
In addition, in the above processing method, in order to correct the length of the tool 6 used, as shown in FIG. A plunger 13 is provided, and the main shaft 4 equipped with the master bar 5 is lowered from the reference position (straight line Z indicating 0 level in FIG. 4), and the plunger 1
3 to the precision touch sensor 12, and the amount of movement I until the precision touch sensor 12 turns on is NC.
The tool 6 to be used is loaded onto the spindle 4, and the tool 6 is loaded into the main shaft 4 as shown in FIG.
1-
Let J=K be the correction value for the theoretical tool length.

なお第4図中のFは、主軸4の下端より下方に突出する
マスターバー5の下端面までの長さを示すもので、これ
が工具6の基準長である。
Note that F in FIG. 4 indicates the length from the lower end of the main shaft 4 to the lower end surface of the master bar 5 that projects downward, and this is the reference length of the tool 6.

また第5図中のGは、主軸4の下端部に装着した作意の
使用工具6の、主軸4の下端面より工具6の下端までの
長さを示すものである。すなわち、G−F=に=l−J
である。
Further, G in FIG. 5 indicates the length of the intended tool 6 attached to the lower end of the main shaft 4 from the lower end surface of the main shaft 4 to the lower end of the tool 6. That is, G-F=to=l-J
It is.

(発明の効果) 上述のように構成した本発明装置を使用して行う本発明
の加工方法は、上述のようにiソーク2の上面をプレッ
シャーフ−1−7によって一定の力で卯圧し、この状態
のワーク2の上面を基準として所定の深さEのブライン
ドホール3を穴あけするようにしたから、本発明によれ
ば、ワーク2の下面とテーブル1の上面との間の隙間の
有無や、ワーク2の厚さの誤差等に関係なく、常に一定
温さのブラインドホール3を加工することができるとい
う効果が得られる。
(Effects of the Invention) The processing method of the present invention using the apparatus of the present invention configured as described above includes pressing the top surface of the i-soak 2 with a constant force by the pressure foot 1-7 as described above; Since the blind hole 3 of a predetermined depth E is drilled using the upper surface of the work 2 in this state as a reference, according to the present invention, it is possible to determine the presence or absence of a gap between the lower surface of the work 2 and the upper surface of the table 1. , the effect that the blind hole 3 can be machined at a constant temperature regardless of the thickness error of the workpiece 2 can be obtained.

また上述したように、理論工具長Fに対する補正値Kを
求めて、前記加工方法にこの補正値Kを加えれば、前記
ブラインドホール3の深さの精度をさらに向上すること
ができる。
Further, as described above, by determining the correction value K for the theoretical tool length F and adding this correction value K to the processing method, the accuracy of the depth of the blind hole 3 can be further improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図は本発明装置による本発明加工方法
の説明用の立断面図、 第3図はワークの部分拡大断面図、 第4図および第5図は工具長の補正方法を示す立断面図
、 第6図はプリント基板の部分拡大断面図である。 1・・・テーブル      2・・・ワーク3・・・
ブラインドホール  4・・・主軸5・・・マスターバ
ー    6・・・工具(ドリル)7・・・プレッシャ
ーフード 8・・・フレーム9・・・サブテーブル 11・・・マグネットドグ 13・・・プランジャー 10・・・精密磁気センサ 12・・・精密タッチセンサ 14・・・リング
Figures 1 and 2 are vertical sectional views for explaining the processing method of the present invention using the apparatus of the present invention, Figure 3 is a partially enlarged sectional view of a workpiece, and Figures 4 and 5 show a tool length correction method. FIG. 6 is a partially enlarged sectional view of the printed circuit board. 1...Table 2...Work 3...
Blind hole 4...Main shaft 5...Master bar 6...Tool (drill) 7...Pressure hood 8...Frame 9...Sub table 11...Magnetic dog 13...Plunger 10... Precision magnetic sensor 12... Precision touch sensor 14... Ring

Claims (1)

【特許請求の範囲】 1、工具の基準長を有するマスターバーを数値制御方式
のプリント基板用穴あけ機の主軸に装着し、この主軸の
基準位置における前記マスターバーの下端からテーブル
上面までの距離Aを記憶させ、つぎにその主軸と共にプ
レッシャーフードを下降させて、そのプレッシャーフー
ドをテーブルに接触させた後、さらに主軸をわずかに下
降させて主軸とプレッシャーフードとの相対位置に関連
して精密磁気センサがONになった時の移動量Bを記憶
させ、さらにA−B=Cを記憶させ、目標とする加工深
さをEとした時、加工時において工具を装着した主軸を
下降させて、前記精密磁気センサがONになってから、
さらにC+E=Dだけ下降させるようにしたことを特徴
とするワーク上面を基準とする加工方法。 2、サブテーブルに精密タッチセンサを垂直に設けると
共に、この精密タッチセンサの上面にプランジャーを設
け、前記マスターバーを装着した主軸を基準位置から下
降させてプランジャーを介して精密タッチセンサに接触
させて、この精密タッチセンサがONになるまでの移動
量Iを記憶させ、ついで使用しようとする工具を主軸に
装着して基準位置から下降させて、プランジャーを介し
て精密タッチセンサがONになるまでの移動量Jを記憶
させ、I−J=Kを理論工具長に対する補正値とするこ
とを特徴とする請求項1記載のワーク上面を基準とする
加工方法。 3、数値制御方式のプリント基板用穴あけ機において、
主軸とそれに付属するプレッシャーフードのいずれか一
方に精密磁気センサを設けると共に、他方に前記センサ
と対応するマグネットドグを設けたことを特徴とするワ
ーク上面を基準とする加工装置。 4、請求項3に記載した装置において、サブテーブルに
精密タッチセンサを垂直に設けると共に、このタッチセ
ンサの上面に接してプランジャーを設け、このプランジ
ャーを介して前記主軸に装着したマスターバーおよび工
具の下端を接触させて前記精密タッチセンサを作動させ
るようにしたことを特徴とするワーク上面を基準とする
加工装置。
[Claims] 1. A master bar having a standard tool length is attached to the main shaft of a numerically controlled printed circuit board drilling machine, and the distance A from the lower end of the master bar to the top surface of the table at the reference position of the main shaft is determined. The pressure hood is then lowered together with the spindle to make contact with the table, and then the spindle is further lowered slightly to detect the precision magnetic sensor in relation to the relative position between the spindle and the pressure hood. The amount of movement B when is turned on is memorized, A-B=C is memorized, and when the target machining depth is E, the spindle with the tool attached during machining is lowered and the After the precision magnetic sensor is turned on,
A machining method based on the upper surface of the workpiece, characterized in that the workpiece is further lowered by C+E=D. 2. A precision touch sensor is installed vertically on the sub-table, and a plunger is provided on the top surface of this precision touch sensor, and the main shaft with the master bar attached thereto is lowered from the reference position and comes into contact with the precision touch sensor via the plunger. Then, the amount of movement I until this precision touch sensor turns ON is memorized, and then the tool to be used is attached to the spindle and lowered from the reference position, and the precision touch sensor is turned ON via the plunger. 2. The method of machining based on the upper surface of the workpiece according to claim 1, wherein the amount of movement J until the length of the workpiece is determined is stored, and I-J=K is used as a correction value for the theoretical tool length. 3. In a numerically controlled printed circuit board drilling machine,
A processing device based on the top surface of a workpiece, characterized in that a precision magnetic sensor is provided on one of a main shaft and a pressure hood attached thereto, and a magnetic dog corresponding to the sensor is provided on the other. 4. In the device according to claim 3, a precision touch sensor is provided vertically on the sub-table, a plunger is provided in contact with the top surface of the touch sensor, and the master bar and the master bar are attached to the main shaft via the plunger. A processing device that uses the upper surface of a workpiece as a reference, characterized in that the precision touch sensor is activated by bringing the lower end of a tool into contact with it.
JP1196886A 1989-07-31 1989-07-31 Machining method and device using the work surface as a reference Expired - Fee Related JPH0749166B2 (en)

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JP1196886A JPH0749166B2 (en) 1989-07-31 1989-07-31 Machining method and device using the work surface as a reference

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JPH0360906A true JPH0360906A (en) 1991-03-15
JPH0749166B2 JPH0749166B2 (en) 1995-05-31

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04128107U (en) * 1991-05-13 1992-11-24 トーヨーエイテツク株式会社 Boring tool cutting edge position correction device
US5256010A (en) * 1991-06-01 1993-10-26 Chiron-Werke Gmbh & Co. Kg Machine tool
JP2001129709A (en) * 1999-11-02 2001-05-15 Hitachi Via Mechanics Ltd Machining method and machining device using pressure foot
WO2013118311A1 (en) * 2012-02-10 2013-08-15 三菱重工業株式会社 Drill
JP2014113662A (en) * 2012-12-10 2014-06-26 Via Mechanics Ltd Apparatus and method for drilling substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325149A (en) * 1976-08-19 1978-03-08 Tokyo Juki Industrial Co Ltd Cloth feeding mechanism for sewing machine
JPS6386910U (en) * 1986-11-28 1988-06-06
JPH01188207A (en) * 1988-01-20 1989-07-27 Hitachi Seiko Ltd Processing method for printed circuit board and device thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5325149A (en) * 1976-08-19 1978-03-08 Tokyo Juki Industrial Co Ltd Cloth feeding mechanism for sewing machine
JPS6386910U (en) * 1986-11-28 1988-06-06
JPH01188207A (en) * 1988-01-20 1989-07-27 Hitachi Seiko Ltd Processing method for printed circuit board and device thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04128107U (en) * 1991-05-13 1992-11-24 トーヨーエイテツク株式会社 Boring tool cutting edge position correction device
US5256010A (en) * 1991-06-01 1993-10-26 Chiron-Werke Gmbh & Co. Kg Machine tool
JP2001129709A (en) * 1999-11-02 2001-05-15 Hitachi Via Mechanics Ltd Machining method and machining device using pressure foot
WO2013118311A1 (en) * 2012-02-10 2013-08-15 三菱重工業株式会社 Drill
JP2013163240A (en) * 2012-02-10 2013-08-22 Mitsubishi Heavy Ind Ltd Drilling machine
US9486859B2 (en) 2012-02-10 2016-11-08 Mitsubishi Heavy Industries, Ltd. Drill
JP2014113662A (en) * 2012-12-10 2014-06-26 Via Mechanics Ltd Apparatus and method for drilling substrate

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