Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP11025285ApriorityCriticalpatent/JPS61269987A/ja
Publication of JPS61269987ApublicationCriticalpatent/JPS61269987A/ja
Publication of JPH0359791B2publicationCriticalpatent/JPH0359791B2/ja
증착필름 및 그 형상측정방법, 제조공정제어방법, 제조방법, 형상측정장치 및 제조공정제어장치(deposition film, method of measuring shape of deposition film, method of controlling manufacturing processes, manufacturing method, shape measuring apparatus and apparatus for controlling manufacturing processes)