JPH0359380B2 - - Google Patents

Info

Publication number
JPH0359380B2
JPH0359380B2 JP57229880A JP22988082A JPH0359380B2 JP H0359380 B2 JPH0359380 B2 JP H0359380B2 JP 57229880 A JP57229880 A JP 57229880A JP 22988082 A JP22988082 A JP 22988082A JP H0359380 B2 JPH0359380 B2 JP H0359380B2
Authority
JP
Japan
Prior art keywords
wave
sample
receiving
ultrasonic
sample surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57229880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59120858A (ja
Inventor
Fumio Uchino
Akihiro Nanba
Koji Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP57229880A priority Critical patent/JPS59120858A/ja
Publication of JPS59120858A publication Critical patent/JPS59120858A/ja
Publication of JPH0359380B2 publication Critical patent/JPH0359380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP57229880A 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置 Granted JPS59120858A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57229880A JPS59120858A (ja) 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57229880A JPS59120858A (ja) 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置

Publications (2)

Publication Number Publication Date
JPS59120858A JPS59120858A (ja) 1984-07-12
JPH0359380B2 true JPH0359380B2 (enrdf_load_stackoverflow) 1991-09-10

Family

ID=16899149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57229880A Granted JPS59120858A (ja) 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置

Country Status (1)

Country Link
JP (1) JPS59120858A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61259170A (ja) * 1985-05-14 1986-11-17 Olympus Optical Co Ltd 超音波顕微鏡における試料の傾き調整装置
US7596425B2 (en) 2003-06-13 2009-09-29 Dainippon Screen Mfg. Co., Ltd. Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method

Also Published As

Publication number Publication date
JPS59120858A (ja) 1984-07-12

Similar Documents

Publication Publication Date Title
US4339952A (en) Cylindrical transducer ultrasonic scanner
US4510810A (en) Ultrasonic microscope
KR920010328A (ko) 초음파 스펙트럼 현미경
US4576048A (en) Method and apparatus for ultrasonic inspection of a solid workpiece
US4779241A (en) Acoustic lens arrangement
JPH0359380B2 (enrdf_load_stackoverflow)
JPH0324982B2 (enrdf_load_stackoverflow)
SU832449A1 (ru) Сканирующий акустический микроскоп
JPH10155793A (ja) 超音波撮像方法および装置
JPH0783889A (ja) 超音波顕微鏡装置
JPH0565821B2 (enrdf_load_stackoverflow)
JPS61170654A (ja) 超音波顕微鏡
JPH0419500Y2 (enrdf_load_stackoverflow)
JPH0158458B2 (enrdf_load_stackoverflow)
JPS58166258A (ja) 超音波顕微鏡レンズ
JPH0233984B2 (enrdf_load_stackoverflow)
JPS6216386B2 (enrdf_load_stackoverflow)
Agnani et al. Scanning laser Doppler vibrometry application to artworks: new acoustic and mechanical exciters for structural diagnostics
Titov et al. A small-size multichannel scanning acoustic microscope
JPS6098359A (ja) 超音波顕微鏡の自動焦点設定装置
JPH056144B2 (enrdf_load_stackoverflow)
JPS60166857A (ja) 音波顕微鏡
JPH0158456B2 (enrdf_load_stackoverflow)
JPS6098362A (ja) 超音波顕微鏡の保護装置
JPH0989853A (ja) アレイ型斜角探触子