JPS59120858A - 超音波顕微鏡の試料面傾斜検出装置 - Google Patents

超音波顕微鏡の試料面傾斜検出装置

Info

Publication number
JPS59120858A
JPS59120858A JP57229880A JP22988082A JPS59120858A JP S59120858 A JPS59120858 A JP S59120858A JP 57229880 A JP57229880 A JP 57229880A JP 22988082 A JP22988082 A JP 22988082A JP S59120858 A JPS59120858 A JP S59120858A
Authority
JP
Japan
Prior art keywords
wave
sample surface
sample
receiving
inclination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57229880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0359380B2 (enrdf_load_stackoverflow
Inventor
Fumio Uchino
内野 文雄
Akihiro Nanba
昭宏 南波
Koji Taguchi
耕司 田口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP57229880A priority Critical patent/JPS59120858A/ja
Publication of JPS59120858A publication Critical patent/JPS59120858A/ja
Publication of JPH0359380B2 publication Critical patent/JPH0359380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP57229880A 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置 Granted JPS59120858A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57229880A JPS59120858A (ja) 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57229880A JPS59120858A (ja) 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置

Publications (2)

Publication Number Publication Date
JPS59120858A true JPS59120858A (ja) 1984-07-12
JPH0359380B2 JPH0359380B2 (enrdf_load_stackoverflow) 1991-09-10

Family

ID=16899149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57229880A Granted JPS59120858A (ja) 1982-12-27 1982-12-27 超音波顕微鏡の試料面傾斜検出装置

Country Status (1)

Country Link
JP (1) JPS59120858A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61259170A (ja) * 1985-05-14 1986-11-17 Olympus Optical Co Ltd 超音波顕微鏡における試料の傾き調整装置
US7596425B2 (en) 2003-06-13 2009-09-29 Dainippon Screen Mfg. Co., Ltd. Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61259170A (ja) * 1985-05-14 1986-11-17 Olympus Optical Co Ltd 超音波顕微鏡における試料の傾き調整装置
US7596425B2 (en) 2003-06-13 2009-09-29 Dainippon Screen Mfg. Co., Ltd. Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method

Also Published As

Publication number Publication date
JPH0359380B2 (enrdf_load_stackoverflow) 1991-09-10

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