JPH0359380B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample surface tilt detection device for an ultrasonic microscope, and more particularly to a sample surface tilt detection device that automatically detects the tilt of a sample surface scanned in an ultrasonic microscope.

As is well known, an ultrasound microscope scans a specimen surface while applying a narrowly focused ultrasound beam, and detects reflection, scattering, transmission, etc. of ultrasound waves caused by differences in the acoustic properties of each part of the specimen. The change is converted into an electrical signal, and an image corresponding to the acoustic characteristics of the sample is formed based on this electrical signal to observe the microscopic structure of the sample.

FIG. 1 shows an example of a conventional ultrasound microscope. This ultrasonic microscope is equipped with a piezoelectric transducer 1 for transmitting and receiving ultrasonic waves, and this piezoelectric transducer 1 is formed of, for example, an ultrasonic piezoelectric vibrator based on zirconate titanate (PZT). ing. Then, the piezoelectric transducer 1 is
Acoustic lens 2 made of saphire (Al ₂ O ₃ )
It is pasted on the upper end surface, which is the ultrasonic incident end surface. The acoustic lens 2 is a cylindrical body whose lower end protrudes into a conical shape, and a concave spherical wavefront conversion lens surface is formed at the top of the cone. The acoustic lens 2 is connected to the X-axis scanning mechanism 3
It is attached to the free end of a support arm (not shown) extending from the support arm (see FIG. 2) so that it hangs down with the lens surface facing downward. This direction is referred to as the X-axis direction.) Together with the support arm, the sample 6, which will be described later, is scanned in the X-axis direction.

On the other hand, the lens surface of the acoustic lens 2 faces a sample 6 placed on a sample holder 7 via an ultrasonic transmission medium 5 made of water (H ₂ O) or the like. The sample holding table 7 is attached to a goniometer 8, and the goniometer 8 can be adjusted so that its top surface can be aligned in the above-mentioned X-axis direction and the following Y-axis direction by adjusting operation knobs 8a and 8b provided on the front and right sides. It is designed so that it can be tilted in relation to the direction,
It serves to keep the sample 6 horizontal with respect to the acoustic lens 2. Further, the sample holding table 7 and the goniometer 8 are moved in a direction perpendicular to the plane of the paper indicated by the arrowhead and fletching signal Y (hereinafter, this direction is referred to as the Y-axis direction).
The sample 6 is moved in the Y-axis direction by the Y-axis operating mechanism 9 and scanned in the same direction.

The piezoelectric transducer 1 has a lead wire 10
It is connected to the circulator 11 in the electric circuit of the ultrasonic microscope shown in FIG. In addition, the X-axis scanning mechanism 3 and the Y-axis scanning mechanism 9
are connected to a control circuit 12, and are each driven by the output of the circuit 12. The control circuit 12 is also connected to a high-frequency pulse generator 13 that generates high-frequency pulses for driving the piezoelectric transducer 1, and the high-frequency pulses output from the generator 13 are passed through the circulator 11 to the piezoelectric transducer. The voltage is applied to the ducer 1 at appropriate times. Also,
The control circuit 12 is also connected to a gate circuit 14 and a blanking circuit 20, which will be described later, and inputs a control signal to these circuits 14 and 20 to instruct their operation timing. Further, the drive signal for the X-axis scanning mechanism 3 output from the control circuit 12 is transmitted to the X-axis deflection signal generation circuit 2.
4, and an X-axis deflection signal is generated in synchronization with this signal. Further, the Y-axis scanning mechanism 9 outputs a signal indicating the scanning position in the Y-axis direction, and this signal is input to the Y-axis deflection signal generation circuit 25. The Y-axis deflection signal generation circuit 25 generates a Y-axis deflection signal in combination with this input signal.

The gate circuit 14 is connected to the piezoelectric transducer 1 via the circulator 11 at appropriate times, and extracts an electrical signal based only on the ultrasonic waves reflected by the sample 6 from the output signal of the transducer 1. play a role. The operation timing of the circuit 14 is determined by the control circuit 12 as described above.
It is designed to be controlled by control signals from. The output end of the gate circuit 14 is connected to the input end of the next stage high frequency amplification circuit 15, and this high frequency amplification circuit 15 once receives the weak high frequency signal output from the piezoelectric transducer 1.
It serves to amplify the signal to a larger size. The high frequency amplifier circuit 15 is connected to the mixing circuit 16,
The mixing circuit 16 serves to mix the output of the local oscillation circuit 17 connected thereto and the output of the high frequency amplifier circuit 15, thereby converting the high frequency signal into an intermediate frequency signal. That is, the local oscillation circuit 17 is adapted to oscillate at a frequency lower than the oscillation frequency of the high-frequency pulse generator 13, and the mixing circuit 1
6 outputs an intermediate frequency signal having a difference frequency |f−f ₀ | between the frequency f of the high frequency signal and the oscillation frequency f ₀ of the local oscillation circuit 17 . The purpose of lowering the signal frequency in this way is to facilitate amplification, and to prevent signal noise from increasing due to amplification at a high frequency. The intermediate frequency signal output from the mixing circuit 16 is amplified by an intermediate frequency amplification circuit 18 and then input to a detection circuit 19. This detection circuit 19 includes a piezoelectric transducer 1
Since the output signal is a burst wave, this circuit is used to convert this into an envelope signal. The output from the detection circuit 19 is input to a blanking circuit 20. This blanking circuit 20 is a circuit for extracting an electrical signal based only on the ultrasonic wave reflected by the sample 6 and cutting out other signals, since there is a possibility that noise may still remain in other signal parts. , this circuit 20 is provided. A peak detection circuit 21 is provided downstream of the blanking circuit 20, and this circuit 21 serves to shape the electrical signal based only on the ultrasonic waves reflected by the sample 6 into a clean mountain-shaped signal. The detection output signal of the peak detection circuit 21 is sent to the scan converter 2.
2 is input. This scan converter 22
temporarily stores and holds the detection output signal, receives the X-axis deflection signal and Y-axis deflection signal output from the X-axis deflection signal generation circuit 24 and the Y-axis deflection signal generation circuit 25, and stores and holds the above-mentioned detection output signal. The X-axis deflection signal and the Y-axis deflection signal are added to the signal read out at the television scanning period from the detected detection output signal, thereby converting it into a composite television signal.
The scan converter 22 is connected to a television image monitor 23 made of a cathode ray tube (CRT), and the monitor 23 has the role of projecting an ultrasonic microscope image of the sample 6 on a screen based on the composite television signal. do.

In order to microscopically observe the sample 6 placed on the sample holder 7 using the conventional ultrasonic microscope configured as described above, first, the X-axis scanning mechanism 3 and the Y-axis scanning mechanism 9 are controlled through the control circuit 12. , as well as the high frequency pulse generator 13. Then, in a certain rotation phase of the circulator 11, a high frequency pulse output from the high frequency pulse generator 13 is applied to the piezoelectric transducer 1, and an ultrasonic wave is generated in the piezoelectric transducer 1. This ultrasonic wave is propagated in the acoustic lens 2 as a plane wave, converted into a spherical wave at the lower end lens surface, and is incident on a local part of the sample 6 through the transmission medium 5 in the form of a spot beam. This ultrasonic wave is reflected according to the acoustic characteristics of the sample 6 and reaches the lens surface of the acoustic lens 2 through the transmission medium 5 again, where it is converted from a spherical wave to a plane wave and propagates within the acoustic lens 2. .
Then, it reaches the piezoelectric transducer 1, which has already stopped the application of high frequency and pulses and has stopped its vibrating operation, and is converted into an electrical signal according to the acoustic characteristics of the sample 6 by the transducer 1. This electrical signal is passed through the circulator 11 to the gate circuit 1.
4, and in the gate circuit 14, the control circuit 12
Based on the control signal from the sample 6, the gate opens at a timing such that only the electrical signal based on the reflected sound wave from the sample 6 passes through, and only the electrical signal corresponding to the acoustic characteristics of the sample 6 is extracted. The electrical signal thus obtained is amplified by the high frequency amplifier circuit 15 and then input to the mixing circuit 16, where it is mixed with the oscillation output of the local oscillation circuit 17 and converted into an intermediate frequency signal. After being amplified again by the intermediate frequency amplification circuit 18, it is detected by the detection circuit 19, and only the electric signal based on the reflected sound wave from the vicinity of the sample 6 is extracted by the blanking circuit 20.
Unnecessary signals are cut out. This electrical signal is waveform-shaped by the peak detection circuit 21 and input to the scan converter 22, where it is temporarily stored and held.

When the sample 6 is sequentially scanned by the operation of the X-axis scanning mechanism 3 and the Y-axis scanning mechanism 9, electrical signals corresponding to the acoustic characteristics of each part of the sample 6 are sequentially stored and held in the scan converter 22. become.
The scan converter 22 reads out the stored signal at the television scanning period, and adds an X-axis deflection signal and a Y-axis deflection signal supplied from the X-axis deflection signal generation circuit 24 and the Y-axis deflection signal generation circuit 25. This is then input to the image monitor 23 as a composite television signal. Image monitor 23
is sample 6 based on this composite television signal.
The ultrasound microscope image of the image is displayed on the screen.

By the way, in an ultrasonic microscope, the sample surface is scanned in the X-axis and Y-axis directions, so the sample surface is
It must be held parallel to the plane including the axial and Y-axis directions, that is, horizontally. If scanning is performed when the sample surface is not kept horizontal, the ultrasonic beam will not focus on the sample surface during scanning, and the sample surface, which should be uniform, may
There was a problem in which unnecessary contrast was added to ultrasonic microscope images, significantly reducing the image quality of the microscope images.

In order to prevent such problems, the conventional ultrasonic microscope described above is equipped with a goniometer 8 as a means to keep the sample surface horizontal. had the disadvantage of requiring an extremely high level of skill. That is, when adjusting the sample surface horizontally, turn the operation knob 8 of the goniometer 8 while watching the image displayed on the television image monitor 23.
A, 8b must be rotated, and this rotation operation must also be performed in both the X-axis direction and the Y-axis direction, which is time-consuming and not an operation that anyone can perform easily.

In view of the above-mentioned points, an object of the present invention is to arrange a plurality of wave receiving piezoelectric transducers symmetrically with the wave transmitting/receiving piezoelectric transducer sandwiched between the ultrasonic wave incident end face of an acoustic lens. An object of the present invention is to provide a sample surface inclination detection device for an ultrasonic microscope, which detects the intensity distribution of reflected sound waves from the output of a wave receiving piezoelectric transducer to detect the inclination of a sample with respect to an acoustic lens.

Hereinafter, the present invention will be explained based on an illustrated embodiment.

FIG. 3 shows a main part of a sample surface tilt detection device for an ultrasonic microscope showing one embodiment of the present invention. In the sample surface inclination detection device of this embodiment, the acoustic lens 2 is tightly attached to a thick, short cylindrical lens holder 32 provided at the tip of a support arm 31 extending from the X-axis scanning mechanism 3. They are arranged to be fitted together. In this disposed state, the acoustic lens 2 has its lower conical portion protruding from the lower surface of the lens holder 32, as shown in FIG. On the other hand, as shown in FIG. 5, a common electrode 33 made of a thin film-like gold electrode is formed on the upper end surface of the acoustic lens 2, which is the ultrasonic incident end surface. The piezoelectric layer 34 made of zinc oxide (ZnO) or the like is sputtered or CVD
(Chemical Vaper Deposition) method. Furthermore, as shown in FIG.
5 and four wave receiving electrodes 36a to 36d are formed, respectively. The wave transmitting/receiving electrode 35 is formed in a large disk shape in the center, and among the wave receiving electrodes 36a to 36d, a pair of electrodes 36a, 3
6b is formed in a small disk shape at symmetrical positions in the X-axis direction with the wave transmitting/receiving electrode 35 sandwiched therebetween. In addition, another pair of wave receiving electrodes 36c and 36d
are formed in a small disk shape at symmetrical positions in the Y-axis direction with the wave transmitting/receiving electrodes 35 sandwiched therebetween. The common electrode 33, the wave transmitting/receiving electrode 35,
The piezoelectric layer 34 interposed between the electrodes 33 and 35 forms a wave transmitting/receiving piezoelectric transducer _T1 , and the common electrode 33 and the wave receiving electrode 36a
36d and the piezoelectric layer 34 interposed between the electrodes 33 and 36a to 36d form receiving piezoelectric transducers T ₂ a to T ₂ d, respectively. One end of a common lead wire 37 is connected to the common electrode 33, and one end of lead wires 38 and 39a to 39d are connected to the wave transmitting/receiving electrode 35 and the wave receiving electrodes 36a to 36d, respectively. There is.

The other end of the lead wire 38 whose one end is connected to the wave transmitting/receiving electrode 35 is connected to the circulator 11 as shown in FIG.
Lead wires 39a~ with one end connected to a~36d
The other ends of 39d are connected to the signal processing circuit 41, respectively. Note that the other end of the common lead wire 37, one end of which is connected to the common electrode 33, is connected to a predetermined circuit, although not particularly shown. As shown in FIG. 8, the signal processing circuit 41 mainly consists of two
It is configured with two comparators 41a and 41b, and
Comparator 41a 2 for detecting axial tilt
The other ends of the lead wires 39a and 39b are connected to a comparator 41 for detecting the tilt in the Y-axis direction.
Lead wires 39c and 39d are connected to the two input ends of b.
The other ends of each are connected. The output end of the comparator 41a is connected to the X-axis direction angle adjustment display 4.
2, the output ends of the comparators 41b are respectively connected to the Y-axis direction angle adjustment display 43. Above X
As shown in FIG. 3, the axial angle adjustment display 42 is located in front of the goniometer 8 (as seen from the Y-axis direction).
It is formed by a pair of arrow lighting display devices 42a and 42b provided near both sides of the lower end of the electrode 3.
When the output from the electrode 6a is larger than the output from the electrode 36b, the right arrow lighting display device 42b that prompts the counterclockwise rotation of the operating knob 8a lights up; An arrow lighting display device 42a on the left side that prompts clockwise rotation is lit. In addition, if both outputs are approximately equal, which arrow lighting display device 42
A and 42b are also not lit. On the other hand, the Y-axis direction angle adjustment display 43 is formed by a pair of arrow lighting display devices 43a and 43b provided near both sides of the lower end of the right side of the goniometer 8, and the direction of the output from the electrode 36c is is the electrode 36
If the output is larger than the output from d, the operation knob 8b
Arrow lighting display device 43 that prompts clockwise rotation
When a is lit and small, an arrow lighting display device 43b prompts the operation knob 8b to rotate counterclockwise.
is starting to light up. In addition, if both outputs are approximately equal, which arrow lighting display device 4
3a and 43b are also not lit. However, as shown in FIG. 7, the same control signal as that applied from the control circuit 12 to the gate circuit 14 etc. is input to the signal processing circuit 41, and the signal processing circuit 41 receives the same control signal as that applied from the control circuit 12 to the gate circuit 14, etc. The comparison of the outputs is performed only when a correct electrical signal based on the reflected sound wave from the sample 6 is obtained.

Note that other members, circuits, etc. not specifically mentioned are constructed in the same way as the corresponding members, circuits, etc. in the conventional ultrasound microscope shown in Figs. Element,
Circuits and the like are given the same reference numerals and detailed explanations thereof will be omitted.

As described above, the sample surface tilt detection device for an ultrasonic microscope according to the present invention is configured.

Next, the operation of this sample surface tilt detection device will be explained.

First, the X-axis operating mechanism 3 and the Y-axis scanning mechanism 9 are operated through the control circuit 12. Then, the acoustic lens 2 attached to the lens holder 32
The sample surface vibrates in the axial direction to start scanning the sample surface in the X-axis direction, and the goniometer 8 and sample holding table 7 gradually move in the Y-axis direction to start scanning the sample surface in the Y-axis direction. Moreover, at the same time, the high frequency pulse generator 13 is activated. Then, in a certain rotation phase of the circulator 11, a high-frequency pulse output from the high-frequency pulse generator 13 is applied as a drive signal to the piezoelectric transducer _T1 for transmitting and receiving waves, and the transducer _T1 piezoelectrically vibrates to generate ultrasonic waves. occurs. This ultrasonic wave enters the sample 6 in the form of a spot beam through the acoustic lens 2 as an incident sound wave, and depending on the acoustic characteristics of the sample 6, the reflected sound wave is received again by the transducer _T1 and converted into an electrical signal. This is the same as in the case of conventional ultrasound microscopes. Further, this electric signal is subjected to amplification, detection, etc. by the circuits 14 to 21 below the gate circuit 14, and is temporarily stored and held in the scan converter 22, and this stored signal is transmitted at the television scanning period. Similarly, the ultrasonic microscope image of the sample 6 is displayed on the screen of the image monitor 23 as a composite television signal by adding the X-axis deflection signal and the Y-axis deflection signal.

On the other hand, a part of the sound waves emitted from the wave transmitting/receiving piezoelectric transducer T ₁ and reflected by the sample 6 are also received by the wave receiving piezoelectric transducers T _2a to _{T 2d} . This piezoelectric transducer for wave reception
Some of the reflected sound waves received by T _2a ~ T _2d are
It is not the main rope part of the reflected sound wave received by the piezoelectric transducer _T1 for wave transmission and reception, but the first-order sublobe part generated on both sides of the main rope (see FIG. 9B and FIG. 10B), The arrangement positions, sizes, etc. of the receiving piezoelectric transducers T _2a to _{T 2d} are set so as to receive such reflected sound waves. Therefore, the receiving piezoelectric transducers T _2a to _{T 2d} vibrate upon receiving the first-order sub-rope portion of the reflected sound wave, and generate an electric signal according to the intensity thereof. This electrical signal is transmitted from the lead wires 39a to
The signals are led to the signal processing circuit 41 through the signal processing circuit 39d, and the comparators 41a and 41b of the circuit 41 compare the magnitudes of the corresponding signals.

Now, as shown in FIG. 9A, if the sample surface is perpendicular to the central axis of the acoustic lens 2, that is, horizontal, the intensity distribution of the reflected sound waves will be symmetrical, as shown in FIG. 9B. Wave piezoelectric transducer
There is no difference in the magnitude of the electrical signals between T _2a , T _2b and T _2c , T _2d . Therefore, the arrow lighting display device 42 of the X-axis and Y-axis direction angle adjustment indicators 42 and 43
a, 42b and 43a, 43b are not lit. Therefore, it is sufficient to continue scanning the sample 6 using the ultrasonic microscope.

On the other hand, as shown in FIG. 10A, when the sample surface is tilted from a position perpendicular to the central axis of the acoustic lens 2, that is, tilted from the horizontal position in one or both of the X-axis and Y-axis directions. In this case, the intensity distribution of the reflected sound waves becomes asymmetrical, as shown in FIG. 10B. In other words, when the sample surface is tilted from the horizontal position, the intensity distribution of the reflected sound waves is such that the intensity of the part reflected from the surface closer to the sound source is high and dense.
The intensity of the portion reflected from a surface farther from the sound source is small and sparse. Therefore, a difference in magnitude occurs in the electrical signals between the receiving piezoelectric transducers T _2a and T _2b or T _2c and T _2d . For example, if the sample surface is tilted from the horizontal position in the X-axis direction, the receiving piezoelectric transducers T _2a and T _2b
The comparator 41a determines this and sends a signal to the X-axis direction angle adjustment display 42. For this reason, the arrow lighting display devices 42a, 4
2b is illuminated to prompt rotation of the operating knob 8a in the direction of leveling the sample surface. If the operation knob 8a is rotated according to the instructions on the arrow lighting display device 42a or 42b and the sample surface is leveled, the arrow lighting display device 42a or 42b that was lit
a or 42b is turned off. Also, if the sample surface is tilted from the horizontal position in the Y-axis direction,
A difference in magnitude occurs in the electrical signals between the receiving piezoelectric transducers T _{2c and} T _2d , and the comparator 41b determines this, and one of the arrow lighting display devices 43a and 43b is lit. Therefore, if the operating knob 8b is rotated according to the instructions of this arrow lighting display device 43a or 43b and the sample surface is leveled, the arrow lighting display device 43a or 43b that was lit will be turned off.
goes out. Therefore, the arrow lighting display device 42a,
The scanning of the sample 6 by the ultrasonic microscope may be continued with all of the lights 42b, 43a, and 43b turned off.

In the above embodiment, the piezoelectric transducer for wave reception receives the first-order sidelobe portion of the reflected sound wave, but the arrangement position, size, etc. of the voltage transducer for wave reception are explained as follows. The same operation and effect can be obtained by appropriately setting , and receiving the peripheral portion of the main lobe of the reflected sound wave.

In addition, the inclination of the sample surface is displayed using an arrow lighting display device, but in addition to simply displaying the inclination of the sample surface, the goniometer is equipped with an electric drive mechanism that operates based on the output of the signal processing circuit. ,
It is also possible to automatically keep the sample surface horizontal.

As described above, according to the present invention, the inclination of the sample surface is automatically detected based on the output of the piezoelectric transducer for wave reception disposed in the acoustic lens, so that it can be easily used on a television image monitor. The tilt of the sample surface can be adjusted very easily without looking at the projected image.

In addition, the same ultrasonic waves used to obtain image signals were used to detect the inclination of the sample surface, so
The wave receiving piezoelectric transducer as a detection element can be formed integrally with the acoustic lens, and the inclination of the sample surface can be detected in a non-contact manner with an extremely simple configuration. Then, it becomes possible to integrally form the wave transmitting/receiving piezoelectric transducer and the wave receiving piezoelectric transducer.
Furthermore, the configuration can be simplified.

Therefore, it is possible to provide a sample surface tilt detection device for an ultrasonic microscope that is extremely convenient to use and eliminates the conventional drawbacks mentioned in the specification.

[Brief explanation of drawings]

FIG. 1 shows an example of a conventional ultrasound microscope.
A partially cutaway front view, FIG. 2 is an electric circuit diagram of the ultrasonic microscope shown in FIG. 1 above, and FIG. 3 is a
FIG. 4 is a perspective view of essential parts of an ultrasonic microscope equipped with a sample surface tilt detection device according to an embodiment of the present invention, and is a lens holder showing the arrangement state of the acoustic lens shown in FIG. 3 above. 5 is an enlarged cross-sectional view of the main part showing the state of formation of the piezoelectric transducer in the sample surface inclination detection device shown in FIG. 3, and FIG. FIG. 5 is an enlarged plan view of the piezoelectric transducer shown in FIG. 5, FIG. 7 is an electric circuit diagram of the ultrasound microscope shown in FIG. 3 above, and FIG. 8 is the signal processing circuit shown in FIG. 7 above. The electrical circuit diagrams shown in FIGS. 9A and 9B, which show the connection mode of the same circuit in more detail, are shown when the sample surface is horizontal.
A schematic diagram showing the positional relationship between the acoustic lens and the sample and a diagram showing the intensity distribution of reflected sound waves, Figures 10A and 10B show the relationship between the acoustic lens and the sample when the sample surface is inclined. A schematic diagram showing the positional relationship, and
FIG. 3 is a diagram showing the intensity distribution of reflected sound waves. 2... Acoustic lens, 6... Sample, 33... Common electrode, 34... Piezoelectric layer, 35... Electrode for transmitting and receiving waves, 36a to 36d... Electrode for receiving waves, 41... Signal processing circuit, 42 ...X-axis direction angle adjustment indicator,
43...Y-axis direction angle adjustment display, _T1 ...Piezoelectric transducer for wave transmission and reception, _T2a to _T2d ...Piezoelectric transducer for wave reception.

Claims (1)

[Scope of Claims] 1. A piezoelectric transducer for transmitting and receiving waves that generates a sound wave incident on a sample and also receives a sound wave reflected from the sample and converts it into an electric signal; an acoustic lens disposed on an ultrasonic incidence end face opposite to the lens surface; and an acoustic lens disposed symmetrically across the ultrasonic incidence end face of the acoustic lens with the wave transmitting/receiving piezoelectric transducer sandwiched therebetween; at least two receiving piezoelectric transducers that receive a portion of the reflected sound waves and converting them into electrical signals; and detecting the intensity distribution of the reflected sound waves from the outputs of these receiving piezoelectric transducers. 1. A sample surface inclination detection device for an ultrasonic microscope, comprising: a signal processing circuit that detects the inclination of the sample with respect to the acoustic lens. 2 The above piezoelectric transducers for wave reception are connected to each other.
There are four arranged in 90° rotationally symmetrical positions,
The signal processing circuit detects the output difference of each pair of wave receiving piezoelectric transducers facing each other with the wave transmitting/receiving piezoelectric transducer in between, and the inclination of the sample surface in two directions orthogonal to each other is detected. A sample surface inclination detection device for an ultrasonic microscope according to claim 1, which detects simultaneously. 3. The ultrasonic microscope according to claim 1, wherein the signal processing circuit is connected to a sample surface tilt display means, and the sample surface tilt direction is displayed on the tilt display means. Sample surface tilt detection device. 4. A common electrode formed on the ultrasonic incident end surface of the acoustic lens for the wave transmitting/receiving piezoelectric transducer and the wave receiving piezoelectric transducer;
The ultrasonic wave according to claim 1, which is integrally constituted by a piezoelectric layer formed on this common electrode, and a wave transmitting/receiving electrode and a wave receiving electrode formed on this piezoelectric layer. Microscope specimen surface tilt detection device.