JPH0565821B2 - - Google Patents
Info
- Publication number
- JPH0565821B2 JPH0565821B2 JP59098288A JP9828884A JPH0565821B2 JP H0565821 B2 JPH0565821 B2 JP H0565821B2 JP 59098288 A JP59098288 A JP 59098288A JP 9828884 A JP9828884 A JP 9828884A JP H0565821 B2 JPH0565821 B2 JP H0565821B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- receiver
- sound source
- ultrasonic transceiver
- transceiver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 30
- 230000015572 biosynthetic process Effects 0.000 description 13
- 238000003786 synthesis reaction Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 10
- 238000002592 echocardiography Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/8997—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using synthetic aperture techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02854—Length, thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
- G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Remote Sensing (AREA)
- Radar, Positioning & Navigation (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Computer Networks & Wireless Communication (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は、超音波送受信器を走査し、この超
音波送受信器の指向角による開口を合成する超音
波検査装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an ultrasonic inspection apparatus that scans an ultrasonic transceiver and synthesizes an aperture based on the directivity angle of the ultrasonic transceiver.
従来この種の超音波検査装置としては、第１図
に示すものがあつた。第１図は従来の超音波検査
装置を示すブロツク構成図である。図において、
１は被検査材、２は超音波送受信器、３は超音波
送受信器２を被検査材１上に走査される走査機
構、４は超音波送受信器２をパルス的に駆動する
ためのパルサ、５は超音波送受信器２で検出した
信号を増幅するためのレシーバ、６は、走査機構
３で決められた超音波送受信器２の位置と、レシ
ーバ５の出力信号とから開口を合成して映像情報
とするための開口合成演算装置、７は開口合成演
算装置６で得られた映像情報を表示するための表
示装置である。
Conventionally, as this type of ultrasonic inspection apparatus, there was one shown in FIG. FIG. 1 is a block diagram showing a conventional ultrasonic inspection apparatus. In the figure,
1 is a material to be inspected; 2 is an ultrasonic transceiver; 3 is a scanning mechanism for scanning the ultrasonic transceiver 2 onto the material to be inspected 1; 4 is a pulser for driving the ultrasonic transceiver 2 in a pulsed manner; 5 is a receiver for amplifying the signal detected by the ultrasonic transceiver 2; 6 is a receiver that synthesizes the aperture from the position of the ultrasonic transceiver 2 determined by the scanning mechanism 3 and the output signal of the receiver 5, and generates an image. The aperture synthesis calculation device 7 is a display device for displaying the video information obtained by the aperture synthesis calculation device 6.
第２図は、第１図の超音波検査装置の動作を説
明するための図、第３図は、第１図の超音波検査
装置に用いられる超音波送受信器の一例を示す図
である。 FIG. 2 is a diagram for explaining the operation of the ultrasonic inspection apparatus of FIG. 1, and FIG. 3 is a diagram showing an example of an ultrasonic transmitter/receiver used in the ultrasonic inspection apparatus of FIG. 1.
次に、上記第１図に示す従来の超音波検査装置
の動作について説明する。被検査材１に音響的に
カツプリングされた超音波送受信器２は、走査機
構３により、第２図に示す様に走査される。超音
波送受信器２の各位置Ａ，Ｂ，Ｃ，Ｄ，Ｅにおい
て、パルサ４とレシーバ５とにより超音波が送受
信され、被検査材１の内部からのエコー、例えば
点０からのエコーが検出される。上記各位置Ａ〜
Ｅで得られるエコーは、超音波送受信器２の指向
角でカバーされる角度範囲内から生ずるエコーに
限られる。これら各位置Ａ〜Ｅでのエコーは、開
口合成演算装置６で記憶、演算が行われ、その結
果が表示装置７に表示される。開口合成演算装置
６の内容は、周知であるので詳細な説明は省略す
るが、その動作原理から、音源は点音源であるこ
とが必要であり、また、超音波送受信器２を走査
した範囲の開口が有効になるのは、上記各位置Ａ
〜Ｅでの超音波送受信器２がカバーする範囲の共
通な領域（第２図において、斜線で囲まれた領
域）である。したがつて、開口を大きくするため
には、超音波送受信器２には、指向角ができるだ
け広いものを用いる必要がある。このことは、超
音波送受信器２の径をごく小さくすることにより
実現できる。しかし、超音波送受信器２の径を小
さくすると、送信される超音波パワーが小さくな
ると共に、受信電圧も小さくなり、充分なＳ／Ｎ
比を持つた信号が得難い。この解決策のために、
第３図に示す様に、集束型の超音波送受信器２を
用い、その焦点を被検査材１の表面に置き、これ
を点音源とする方式が提案されている。この場
合、超音波送受信器２の焦点距離を短くすれば、
その指向角が広くすることができる。この方式で
は、超音波送受信器２を走査する時に、その焦点
が常に被検査材１の表面に来る様にしなければな
らない。さて、開口を大きくするためには、上記
した様に超音波送受信器２の指向角を広くした方
が良いのであるが、一方、検査対象範囲外、例え
ば第２図に示す点Ｐにエコーを発生するものであ
る場合には、開口合成演算装置６による開口合成
演算時に、そのエコーの信号も入つて来て、得ら
れる映像のＳ／Ｎ比が劣化する。 Next, the operation of the conventional ultrasonic inspection apparatus shown in FIG. 1 will be described. The ultrasonic transmitter/receiver 2 acoustically coupled to the material to be inspected 1 is scanned by a scanning mechanism 3 as shown in FIG. Ultrasonic waves are transmitted and received by the pulser 4 and the receiver 5 at each position A, B, C, D, and E of the ultrasonic transmitter/receiver 2, and an echo from inside the inspected material 1, for example, an echo from point 0, is detected. be done. Each of the above positions A~
The echoes obtained at E are limited to those generated within the angular range covered by the directivity angle of the ultrasonic transceiver 2. The echoes at each of these positions A to E are stored and calculated by the aperture synthesis calculation device 6, and the results are displayed on the display device 7. Since the contents of the aperture synthesis calculation device 6 are well known, a detailed explanation will be omitted. However, due to its operating principle, the sound source must be a point source, and the sound source must be a point source. The opening becomes effective at each position A above.
This is a common area covered by the ultrasonic transceiver 2 at ~E (the area surrounded by diagonal lines in FIG. 2). Therefore, in order to enlarge the aperture, it is necessary to use an ultrasonic transmitter/receiver 2 with a directivity angle as wide as possible. This can be achieved by making the diameter of the ultrasonic transceiver 2 extremely small. However, if the diameter of the ultrasonic transceiver 2 is made smaller, the transmitted ultrasonic power becomes smaller and the received voltage also becomes smaller, resulting in a sufficient S/N ratio.
It is difficult to obtain a signal with a ratio. For this solution,
As shown in FIG. 3, a method has been proposed in which a focused ultrasonic transmitter/receiver 2 is used, its focal point is placed on the surface of the inspected material 1, and this is used as a point sound source. In this case, if the focal length of the ultrasonic transceiver 2 is shortened,
Its directivity angle can be widened. In this method, when scanning the ultrasonic transmitter/receiver 2, the focus must always be on the surface of the material 1 to be inspected. Now, in order to enlarge the aperture, it is better to widen the directivity angle of the ultrasonic transmitter/receiver 2 as described above, but on the other hand, it is better to widen the directivity angle of the ultrasonic transmitter/receiver 2, but on the other hand, it is better to make the echo outside the inspection target area, for example, point P shown in Fig. 2. If the aperture synthesis calculation device 6 generates an aperture synthesis calculation, the echo signal also enters, and the S/N ratio of the obtained image deteriorates.
従来の超音波検査装置は以上の様に構成されて
いるので、被検査材１に対する検査感度が低かつ
たり、超音波送受信器２の走査機構３が繁雑であ
つたりし、また、検査対象範囲の周辺にある欠陥
や境界などのエコー源によりＳ／Ｎ比が劣化する
などの欠点があつた。 Since the conventional ultrasonic inspection apparatus is configured as described above, the inspection sensitivity for the inspected material 1 is low, the scanning mechanism 3 of the ultrasonic transmitter/receiver 2 is complicated, and the inspection target area is There were drawbacks such as deterioration of the S/N ratio due to echo sources such as defects and boundaries around the area.
この発明は、上記の様な従来のものの欠点を改
善する目的でなされたもので、超音波送受信器に
振動子アレイを用い、この振動子アレイをコント
ロールすることにより、見掛け上の点音源を作
り、検査対象範囲に応じて超音波の広がり方を制
御する様に構成し、検査感度が高く、また、検査
対象範囲外のエコーを取り込まない、Ｓ／Ｎ比の
高い超音波検査装置を提供するものである。
This invention was made with the aim of improving the drawbacks of the conventional ones as described above, and by using a transducer array in an ultrasonic transmitter/receiver and controlling this transducer array, an apparent point sound source is created. To provide an ultrasonic inspection device configured to control the spread of ultrasonic waves according to the inspection target range, has high inspection sensitivity, does not take in echoes outside the inspection target range, and has a high S/N ratio. It is something.
以下、この発明の実施例を図について説明す
る。第４図はこの発明の一実施例である超音波検
査装置を示すブロツク構成図、第５図ないし第７
図は、それぞれ第４図の超音波検査装置の動作を
説明するための図である。第４図において、１は
被検査材、２は振動子アレイにより構成される超
音波送受信器、３は超音波送受信器２を被検査材
１上に走査させる走査機構、４は超音波送受信器
２の各振動器子を所定の時刻に駆動するパルサ、
５は超音波送受信器２の各振動子の検出信号を
各々所定の時間だけ遅延させて加算、増幅するレ
シーバ、６は、走査機構３で決められた超音波送
受信器２の位置と、レシーバ５の出力信号とから
開口を合成して映像情報とするための開口合成演
算装置、７は開口合成演算装置６で得られた映像
情報を表示するための表示装置、８は、走査機構
３から出力される超音波送受信器２の位置情報に
より、パルサ４及びレシーバ５の時刻、時間の設
定を行うと共に、開口合成演算装置６へ作り出さ
れる点音源（後述する）の位置情報を送り出すコ
ントローラである。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 4 is a block diagram showing an ultrasonic inspection apparatus which is an embodiment of the present invention, and FIGS.
Each figure is a diagram for explaining the operation of the ultrasonic testing apparatus shown in FIG. 4. In Fig. 4, 1 is a material to be inspected, 2 is an ultrasonic transceiver constituted by a transducer array, 3 is a scanning mechanism that scans the ultrasonic transceiver 2 over the material to be inspected 1, and 4 is an ultrasonic transceiver. a pulsar that drives each vibrator element of No. 2 at a predetermined time;
5 is a receiver that adds and amplifies the detection signals of each vibrator of the ultrasonic transmitter/receiver 2 by delaying them by a predetermined time, and 6 indicates the position of the ultrasonic transmitter/receiver 2 determined by the scanning mechanism 3 and the receiver 5. 7 is a display device for displaying the video information obtained by the aperture synthesis calculation device 6; 8 is an output from the scanning mechanism 3; This controller sets the time and time of the pulser 4 and receiver 5 based on the position information of the ultrasonic transceiver 2, and also sends the position information of a point sound source (described later) to the aperture synthesis calculation device 6.
次に、上記第４図に示すこの発明の一実施例で
ある超音波検査装置の動作について説明する。ま
ず、超音波送受信器２とパルサ４とにより点音源
を作り出す方法について述べる。第５図に示す様
に、超音波送受信器２は、2n個の振動子２１１，
……，２ｉ１，……，２ｎ１，２１２，……，２
ｎ２のアレイにより構成される。今、これらの振
動子の左側に点音源Ｆがあると仮定すると、点音
源Ｆから各振動子までの距離liは、次式によつて
与えられる。 Next, the operation of the ultrasonic inspection apparatus shown in FIG. 4, which is an embodiment of the present invention, will be explained. First, a method of creating a point sound source using the ultrasonic transceiver 2 and the pulser 4 will be described. As shown in FIG. 5, the ultrasonic transceiver 2 includes 2n transducers 211,
..., 2i1, ..., 2n1, 212, ..., 2
It is composed of n2 arrays. Now, assuming that there is a point sound source F to the left of these vibrators, the distance li from the point sound source F to each vibrator is given by the following equation.
ここで、ｆは点音源Ｆから振動子までの距離、
ｄは各振動子間の間隔である。 Here, f is the distance from the point sound source F to the vibrator,
d is the interval between each vibrator.
被検査材１中での音速をＣとすると、距離liを
超音波が伝播する時間tiは、
である。したがつて、超音波送受信器２に送信指
令を与えてから、時間tiだけ経過した時刻に各振
動子２ｉ１，２ｉ２を駆動すれば、見掛け上の点
音源Ｆを音源とした様な音場が得られる。この場
合の各振動子全体の指向角は、理論的にはｆの値
を小さくすれば広くなる。実際には、各振動子２
１１，……２ｎ１，２１２，……２ｎ２の寸法に
よつて制約され、この寸法を小さくする程ｆを小
さく、すなわち、各振動子全体の指向角を大きく
することができる。この時の超音波エネルギー
は、各振動子全体で決まるので、各振動子の１つ
１つを小さくしても超音波エネルギーが大幅に減
少するという損失はなくなる。また、第６図に示
す様に、点音源Ｆを超音波送受信器２の中心軸上
からずれた位置に想定して考えて見る。各振動子
を駆動する時刻を、超音波送受信器２へ送信指令
が与えられてから次の時間tiだけ経過した時刻と
することにより、点音源Ｆを音源とみなせる音場
が得られる。 If the speed of sound in the inspected material 1 is C, the time t i for the ultrasonic wave to propagate over the distance li is: It is. Therefore, if each transducer 2i1, 2i2 is driven at a time t i after a transmission command is given to the ultrasonic transceiver 2, a sound field with the apparent point sound source F as the sound source can be created. is obtained. In this case, the directivity angle of each vibrator as a whole can theoretically be widened by decreasing the value of f. Actually, each vibrator 2
11, . . . 2n1, 212, . The ultrasonic energy at this time is determined by each transducer as a whole, so even if each transducer is made smaller one by one, there is no loss in the ultrasonic energy that is significantly reduced. Further, as shown in FIG. 6, the point sound source F is assumed to be located at a position offset from the central axis of the ultrasonic transceiver 2. By setting the time at which each vibrator is driven to the time when the next time t i has elapsed since the transmission command was given to the ultrasonic transceiver 2, a sound field in which the point sound source F can be regarded as the sound source can be obtained.
この時、角度θを変えると、超音波の広がる方
向が変化する。 At this time, changing the angle θ changes the direction in which the ultrasonic waves spread.
以上の説明は、各振動子による送信の場合の点
音源Ｆを作ること、及び指向性のコントロールに
ついて述べたが、受信の場合は、各振動子で検出
した信号を、送信の場合と同様に時間tiだけ各々
遅延させた後、加算、合成することによつて、送
信の場合と同様の指向特性を得ることができる。
上述した説明において、各振動子の駆動時刻をず
らせたり、検出信号を遅延、加算したりする方法
は、従来よりビーム走査形の超音波診断装置で実
用にされているのと同様の方法により実現でき
る。さて、以上の様な方法により、超音波の広が
り方をコントロールできる点音源Ｆを超音波送受
信器２として用いて走査し、開口合成用データを
得る方法を、第７図にしたがつて説明する。超音
波送受信器２は、走査機構３により各位値Ａ，
Ｂ，Ｃ，Ｄへ順次に移される。検査対象範囲をＬ
とした場合、各位置Ａ〜Ｄでの超音波の広がり方
を、第７図に示す様にコントロールすれば、すべ
ての各位置Ａ〜Ｄで検査対象範囲Ｌをカバーし、
かつこの検査対象範囲Ｌ外へ超音波が広がつてい
る程度は、上記第２図に示す従来例の場合と比べ
て非常に小さくなる。例えば、点Ｐに超音波を反
射するものがあつても、超音波は点Ｐへは及ばな
いために不要なエコーは発生せずに、このため、
検査対象範囲Ｌ内の映像へのノイズを抑えること
ができる。走査機構３により超音波送受信器２の
位置は、開口合成演算装置６と共にコントローラ
８へ送られる。コントローラ８では、あらかじめ
与えられた検査対象範囲Ｌとの関係を考慮し、
ｆ，θを決定し、パルサ４、レシーバ５へ与え
る。パルサ４、レシーバ５は、前述した様に、
ｆ，θに対応した時間tiの設定を行い、超音波送
受信器２をコントロールする。ｆ，θは、また、
開口合成演算装置６へ与えられる。開口合成演算
装置６では、超音波送受信器２の位置とｆ，θと
により、第７図に示す様な各点FA，FB，FC，FD
を算出し、この各点FA〜FDを送受信点とみなし
て開口の合成を行う。 The above explanation has been about creating a point sound source F in the case of transmission by each transducer and controlling the directivity, but in the case of reception, the signal detected by each transducer is By delaying each signal by a time t i and then adding and combining them, it is possible to obtain the same directivity characteristics as in the case of transmission.
In the above explanation, the methods of shifting the drive time of each transducer, delaying and adding the detection signals are the same as those used in conventional beam-scanning ultrasound diagnostic equipment. can. Now, with reference to FIG. 7, we will explain how to obtain aperture synthesis data by scanning the point sound source F, which can control the spread of ultrasonic waves, using the ultrasonic transmitter/receiver 2 using the method described above. . The ultrasonic transmitter/receiver 2 receives each position value A,
It is sequentially transferred to B, C, and D. Inspection range L
In this case, if the spread of the ultrasonic waves at each position A to D is controlled as shown in Fig. 7, the inspection range L can be covered at all positions A to D.
Moreover, the extent to which the ultrasonic waves spread outside the inspection target range L is much smaller than in the conventional example shown in FIG. 2 above. For example, even if there is something reflecting ultrasonic waves at point P, the ultrasonic waves do not reach point P, so no unnecessary echoes are generated.
Noise to the image within the inspection target range L can be suppressed. The scanning mechanism 3 sends the position of the ultrasonic transceiver 2 to the controller 8 together with the aperture synthesis calculation device 6 . The controller 8 considers the relationship with the inspection target range L given in advance,
Determine f and θ and give them to the pulser 4 and receiver 5. As mentioned above, the pulser 4 and receiver 5 are
The ultrasonic transceiver 2 is controlled by setting the time t i corresponding to f and θ. f, θ are also
It is given to the aperture synthesis calculation device 6. In the aperture synthesis calculation device 6, each point F A , F B , F C , F D as shown in FIG.
is calculated, and the apertures are synthesized by regarding each of these points F A to F D as transmitting/receiving points.
この発明は以上説明した様に、超音波検査装置
において、超音波送受信器に振動子アレイを用
い、この振動子アレイをコントロールすることに
より、見掛け上の点音源を作り、検査対象範囲に
応じて超音波の広がり方を制御する様に構成した
ので、検査感度が非常に高く、また、検査対象範
囲外のエコーを取り込まない様にして、Ｓ／Ｎ比
が高く、画質劣化の少ない超音波検査装置が得ら
れるという優れた効果を奏するものである。
As explained above, the present invention uses a transducer array as an ultrasonic transmitter/receiver in an ultrasonic inspection device, and controls this transducer array to create an apparent point sound source and generate sound sources according to the inspection target area. The structure is configured to control the way the ultrasound spreads, so the inspection sensitivity is extremely high.Also, echoes outside the inspection target area are not taken in, resulting in a high S/N ratio and ultrasonic inspection with little image quality deterioration. This has the excellent effect of providing a device.
第１図は従来の超音波検査装置を示すブロツク
構成図、第２図は、第１図の超音波検査装置の動
作を説明するための図、第３図は、第１図の超音
波検査装置に用いられる超音波送受信器の一例を
示す図、第４図はこの発明の一実施例である超音
波検査装置を示すブロツク構成図、第５図ないし
第７図は、それぞれ第４図の超音波検査装置の動
作を説明するための図である。
図において、１……被検査材、２……超音波送
受信器、３……走査機構、４……パルサ、５……
レシーバ、６……開口合成演算装置、７……表示
装置、２１１，……，２ｉ１，……，２ｎ１，２
１２，……，２ｎ２……振動子である。なお、各
図中、同一符号は同一、又は相当部分を示す。
Fig. 1 is a block configuration diagram showing a conventional ultrasonic testing device, Fig. 2 is a diagram for explaining the operation of the ultrasonic testing device shown in Fig. 1, and Fig. 3 is a block diagram showing the ultrasonic testing device shown in Fig. 1. A diagram showing an example of an ultrasonic transmitter/receiver used in the device, FIG. 4 is a block configuration diagram showing an ultrasonic inspection device which is an embodiment of the present invention, and FIGS. 5 to 7 are respectively similar to those in FIG. It is a figure for explaining operation of an ultrasonic inspection device. In the figure, 1... Material to be inspected, 2... Ultrasonic transceiver, 3... Scanning mechanism, 4... Pulser, 5...
Receiver, 6... Aperture synthesis calculation device, 7... Display device, 211,..., 2i1,..., 2n1, 2
12,...,2n2... vibrator. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
器の指向角による開口を合成する超音波検査装置
において、前記超音波送受信器に振動子アレイを
用い、この振動子アレイをコントロールすること
により、見掛け上の点音源を作り、この点音源に
より作られる音場が検査対象範囲内を限定的に覆
う様に、前記音場を前記超音波送受信器の走査に
合わせて制御する様にしたことを特徴とする超音
波検査装置。1. In an ultrasonic inspection device that scans an ultrasonic transceiver and synthesizes an aperture based on the directivity angle of the ultrasonic transceiver, using a transducer array in the ultrasonic transceiver and controlling this transducer array, An apparent point sound source is created, and the sound field is controlled in accordance with the scanning of the ultrasonic transceiver so that the sound field created by the point sound source covers a limited area within the inspection target area. Features of ultrasonic testing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59098288A JPS60242365A (en) | 1984-05-16 | 1984-05-16 | Ultrasonic inspecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59098288A JPS60242365A (en) | 1984-05-16 | 1984-05-16 | Ultrasonic inspecting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60242365A JPS60242365A (en) | 1985-12-02 |
| JPH0565821B2 true JPH0565821B2 (en) | 1993-09-20 |
Family
ID=14215736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59098288A Granted JPS60242365A (en) | 1984-05-16 | 1984-05-16 | Ultrasonic inspecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60242365A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5665040B2 (en) | 2009-09-10 | 2015-02-04 | 学校法人上智学院 | Displacement measuring method and apparatus, and ultrasonic diagnostic apparatus |
| CN106770664B (en) * | 2016-11-22 | 2019-05-07 | 中国计量大学 | A method of edge defect detection is improved based on total focus imaging algorithm |
| CN111289022B (en) * | 2020-02-26 | 2022-08-09 | 京东方科技集团股份有限公司 | Sensor and driving method and preparation method thereof |
-
1984
- 1984-05-16 JP JP59098288A patent/JPS60242365A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60242365A (en) | 1985-12-02 |
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| EXPY | Cancellation because of completion of term |