JPH0358180B2 - - Google Patents
Info
- Publication number
- JPH0358180B2 JPH0358180B2 JP57117969A JP11796982A JPH0358180B2 JP H0358180 B2 JPH0358180 B2 JP H0358180B2 JP 57117969 A JP57117969 A JP 57117969A JP 11796982 A JP11796982 A JP 11796982A JP H0358180 B2 JPH0358180 B2 JP H0358180B2
- Authority
- JP
- Japan
- Prior art keywords
- guard ring
- surface portion
- layer
- conductivity type
- ring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11796982A JPS598353A (ja) | 1982-07-07 | 1982-07-07 | 半導体集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11796982A JPS598353A (ja) | 1982-07-07 | 1982-07-07 | 半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS598353A JPS598353A (ja) | 1984-01-17 |
| JPH0358180B2 true JPH0358180B2 (enrdf_load_stackoverflow) | 1991-09-04 |
Family
ID=14724753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11796982A Granted JPS598353A (ja) | 1982-07-07 | 1982-07-07 | 半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS598353A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2016449C (en) * | 1989-07-28 | 1996-06-25 | Steven J. Hillenius | Planar isolation technique for integrated circuits |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5226182A (en) * | 1975-08-25 | 1977-02-26 | Hitachi Ltd | Manufacturing method of semi-conductor unit |
-
1982
- 1982-07-07 JP JP11796982A patent/JPS598353A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS598353A (ja) | 1984-01-17 |
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