JPH035803Y2 - - Google Patents
Info
- Publication number
- JPH035803Y2 JPH035803Y2 JP1984088369U JP8836984U JPH035803Y2 JP H035803 Y2 JPH035803 Y2 JP H035803Y2 JP 1984088369 U JP1984088369 U JP 1984088369U JP 8836984 U JP8836984 U JP 8836984U JP H035803 Y2 JPH035803 Y2 JP H035803Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- filter
- air outlet
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 6
- 238000009423 ventilation Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8836984U JPS613345U (ja) | 1984-06-14 | 1984-06-14 | 空気清浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8836984U JPS613345U (ja) | 1984-06-14 | 1984-06-14 | 空気清浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS613345U JPS613345U (ja) | 1986-01-10 |
JPH035803Y2 true JPH035803Y2 (ko) | 1991-02-14 |
Family
ID=30641436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8836984U Granted JPS613345U (ja) | 1984-06-14 | 1984-06-14 | 空気清浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS613345U (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07225Y2 (ja) * | 1988-07-18 | 1995-01-11 | ローム株式会社 | クリーンユニット |
JP2014217783A (ja) * | 2014-08-13 | 2014-11-20 | 高園テクノロジー株式会社 | 水剤供給装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5047443A (ko) * | 1972-11-24 | 1975-04-26 |
-
1984
- 1984-06-14 JP JP8836984U patent/JPS613345U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5047443A (ko) * | 1972-11-24 | 1975-04-26 |
Also Published As
Publication number | Publication date |
---|---|
JPS613345U (ja) | 1986-01-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH035803Y2 (ko) | ||
SE0303221D0 (sv) | Vacuum cleaner filtration system | |
KR101765226B1 (ko) | 실내 유입공기 정화장치 | |
JPS6055979A (ja) | パチンコ店における空気清浄方法 | |
JPH0457930B2 (ko) | ||
JPH04330954A (ja) | メンテナンスフリー空気浄化装置 | |
JPH0515718A (ja) | 外気導入型空気清浄機 | |
JPH0510893Y2 (ko) | ||
JPS6149948A (ja) | 空気清浄装置 | |
JPH01236955A (ja) | 酸素富化膜付き空気清浄機 | |
JPH0212512Y2 (ko) | ||
JPH0354342Y2 (ko) | ||
JPH0470118U (ko) | ||
JPH0732538Y2 (ja) | クリ−ンル−ム用エレベ−タ | |
JPS6011038A (ja) | エア−シヤワ−装置 | |
JPH07144112A (ja) | 空気清浄機、及びアタッチメント | |
JPH0312210A (ja) | 乾式集塵装置の逆洗方法 | |
JPS60173837U (ja) | 簡易式空気清浄装置 | |
JPH05168835A (ja) | 空気清浄機 | |
JP2002323241A (ja) | パーテション形空気清浄装置 | |
JPS6034279Y2 (ja) | 無塵室装置 | |
JPS6235609Y2 (ko) | ||
JPH0256932B2 (ko) | ||
GB643971A (en) | Improvements in filters for air or other gases | |
JPH029324Y2 (ko) |