JPH0357621B2 - - Google Patents
Info
- Publication number
- JPH0357621B2 JPH0357621B2 JP14387683A JP14387683A JPH0357621B2 JP H0357621 B2 JPH0357621 B2 JP H0357621B2 JP 14387683 A JP14387683 A JP 14387683A JP 14387683 A JP14387683 A JP 14387683A JP H0357621 B2 JPH0357621 B2 JP H0357621B2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- positioning
- inclined surface
- jig
- link bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 description 36
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14387683A JPS6035530A (ja) | 1983-08-08 | 1983-08-08 | ボンディング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14387683A JPS6035530A (ja) | 1983-08-08 | 1983-08-08 | ボンディング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6035530A JPS6035530A (ja) | 1985-02-23 |
JPH0357621B2 true JPH0357621B2 (de) | 1991-09-02 |
Family
ID=15349058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14387683A Granted JPS6035530A (ja) | 1983-08-08 | 1983-08-08 | ボンディング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6035530A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59146531U (ja) * | 1983-12-28 | 1984-09-29 | ダイキン工業株式会社 | 過給機付エンジンの吸入空気冷却装置 |
JPH021427U (de) * | 1988-06-13 | 1990-01-08 |
-
1983
- 1983-08-08 JP JP14387683A patent/JPS6035530A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6035530A (ja) | 1985-02-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4631816A (en) | Automatic apparatus for mounting electronic parts | |
US4035723A (en) | Probe arm | |
JP2550130B2 (ja) | 半導体ウエハーを移送する装置 | |
US6625870B1 (en) | Method for aligning head suspension structures | |
JPH0357621B2 (de) | ||
JP2506958B2 (ja) | ワイヤボンディング装置 | |
US7984545B2 (en) | Approaches for manufacturing a head gimbal assembly | |
JPH03248768A (ja) | 改良型ホットバー懸架装置 | |
JPS6259460B2 (de) | ||
JPS6231822B2 (de) | ||
JPH035399Y2 (de) | ||
JPH0522384B2 (de) | ||
JPS5997861A (ja) | リンク式ロボツト | |
JP4010186B2 (ja) | ボンディング装置 | |
JPS6071185A (ja) | 産業用ロボット装置 | |
JPS60209968A (ja) | 磁気ヘツド支持装置 | |
JPS6315016Y2 (de) | ||
JPS6233321Y2 (de) | ||
JPS6031028Y2 (ja) | スポツト溶接ガンの姿勢制御装置 | |
JPS6333182A (ja) | 自動スポツト溶接装置 | |
JPH0629342A (ja) | 同じ平面上にないボンド面に対するボンディング機構 | |
JPS5968936A (ja) | ペレツトボンデイング方法 | |
JP2934288B2 (ja) | ヘッドローディング機構 | |
JPS5849192Y2 (ja) | 溶接ガン駆動装置 | |
JP2998195B2 (ja) | バンプボンディング装置およびバンプボンディング方法 |