JPH0357570B2 - - Google Patents

Info

Publication number
JPH0357570B2
JPH0357570B2 JP58086117A JP8611783A JPH0357570B2 JP H0357570 B2 JPH0357570 B2 JP H0357570B2 JP 58086117 A JP58086117 A JP 58086117A JP 8611783 A JP8611783 A JP 8611783A JP H0357570 B2 JPH0357570 B2 JP H0357570B2
Authority
JP
Japan
Prior art keywords
electrode
secondary electron
electron
deceleration
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58086117A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59211953A (ja
Inventor
Katsumi Ura
Hiroshi Fujioka
Koji Nakamae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka University NUC
Original Assignee
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka University NUC filed Critical Osaka University NUC
Priority to JP58086117A priority Critical patent/JPS59211953A/ja
Publication of JPS59211953A publication Critical patent/JPS59211953A/ja
Publication of JPH0357570B2 publication Critical patent/JPH0357570B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP58086117A 1983-05-17 1983-05-17 ２次電子分光装置 Granted JPS59211953A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58086117A JPS59211953A (ja) 1983-05-17 1983-05-17 ２次電子分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58086117A JPS59211953A (ja) 1983-05-17 1983-05-17 ２次電子分光装置

Publications (2)

Publication Number Publication Date
JPS59211953A JPS59211953A (ja) 1984-11-30
JPH0357570B2 true JPH0357570B2 (OSRAM) 1991-09-02

Family

ID=13877747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58086117A Granted JPS59211953A (ja) 1983-05-17 1983-05-17 ２次電子分光装置

Country Status (1)

Country Link
JP (1) JPS59211953A (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138901A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verbessertes gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik
DE3138929A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verbessertes sekundaerelektronen-spektrometer fuer die potentialmessung an einer probe mit einer elektronensonde

Also Published As

Publication number Publication date
JPS59211953A (ja) 1984-11-30

Similar Documents

Publication Publication Date Title
JPS6369135A (ja) 電子検出装置
Johnson et al. Inverse photoemission
JPS60310A (ja) 表面構造、特に、荒さの測定装置
JPH0643731Y2 (ja) Ｘ−線分析装置
US4514682A (en) Secondary electron spectrometer for measuring voltages on a sample utilizing an electron probe
JP2002189004A (ja) Ｘ線分析装置
JPH0357570B2 (OSRAM)
JP2764505B2 (ja) 電子分光方法とこれを用いた電子分光装置
JP2622575B2 (ja) 電子ビーム装置
SU141559A1 (ru) Способ изотопного и химического масс-спектрального анализа
SU506084A1 (ru) Растровый зеркальный электронный микроскоп
JPH0213463B2 (OSRAM)
JPH0269692A (ja) 荷電粒子ビームのエネルギーの球状ミラー分析器
Richards et al. Optical multichannel analyzer as a scanner for the ultracentrifuge: I. Single beam operation
JPH01118757A (ja) 表面分析装置のマスク
JPS58132671A (ja) 電子線を用いた電圧測定装置
JPH0474981A (ja) 電子ビーム試験装置
JPS61140811A (ja) 電子ビ−ム測長装置
JPH0145584B2 (OSRAM)
JPH04317350A (ja) 非接触型電位測定装置
SU1298539A1 (ru) Способ измерени толщины тонких слоев,нанесенных на подложку
CN115656647A (zh) 基于光偏振的电场强度和电场方向的校准方法及校准装置
JPH0355239Y2 (OSRAM)
JPH05281134A (ja) 紫外又は可視吸光度検出方法
JPS59119722A (ja) 寸法測長方法

Legal Events

Date Code Title Description
TRDD Decision of grant or rejection written
EXPY Cancellation because of completion of term