JPH0356155B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a laser processing device used for drilling a large number of holes, such as perforations, in a workpiece such as paper using a laser beam. It is something.

[Summary of the Invention] A laser processing device according to the present invention divides a laser beam into two by a two-split mirror, and overlaps the divided two-split laser beams at the same position on a multi-split mirror with the same projection shape direction. By using a mirror device to guide the laser beams so that they are projected together, and by using a multi-split mirror to divide the superimposed two-split laser beams into multiple parts and projecting them onto the workpiece, the laser beam on one side, which was conventionally discarded, can be removed. It is also designed to increase the efficiency of energy use.

[Prior Art] A conventional laser processing device of this type directly projects a laser beam so that its optical axis is located at the apex of a polygonal pyramid-shaped multi-segmented mirror, and divides the laser beam into a plurality of multi-segmented laser beams. Each multi-divided laser beam is focused by a respective condenser lens and projected onto a workpiece to perform hole drilling.

[Problems to be Solved by the Invention] However, in such a structure, the multi-divided laser beam is emitted in the entire circumferential direction of the multi-divided mirror, but this device is not suitable for manufacturing lines of workpieces, etc. For this reason, the workpiece is rarely located along the entire circumference of the multi-segment mirror, and only the multi-segment laser beam that is projected on one side of the multi-segment mirror in the circumferential direction is used. The multi-segmented laser beam was dangerous as it crossed paths for workers, so it was absorbed by an absorber.
Half of the laser output was discarded, which caused the problem of poor energy utilization.

An object of the present invention is to provide a laser processing device that can increase the efficiency of laser energy use.

[Means for solving the problems] The structure of the present invention for achieving the above object is as follows:
The present invention will be explained with reference to FIGS. 1 to 6, which correspond to embodiments. a multi-segment mirror 5 which divides the two beams into multiple parts and projects them onto the workpiece 10 when the two beams are superimposed in the same direction;
It is provided on at least one of the optical paths of the two-divided laser beams 1A and 1B from the split mirror 2 to the multi-divided mirror 5, so that both the two-split laser beams 1A and 1B have a projection shape at the same position on the multi-divided mirror 5. The present invention is characterized by comprising a mirror device that guides at least one of the two divided laser beams so that they are projected in the same direction and superimposed.

[Operation of the Invention] As described above, the present invention provides a 2-split laser beam 1 which is divided into two in order to emit the multi-split laser beam 1a only from one side of the multi-split mirror 5.
Since the laser beams A and 1B are superimposed and projected onto the same position of the multi-divided mirror 5 with the same projection shape direction by the action of the mirror device, one of the two divided laser beams 1A and 1B is not thrown away. ,
It will be divided by the same energy as the beginning,
Energy usage efficiency is improved compared to conventional methods.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a first embodiment of the present invention. A laser beam 1 projected with a circular cross section is a two-split mirror 2 in the form of a right isosceles triangle having right-angled mirror surfaces 2A and 2B, and a first and second two-split laser beam 1A, each having a semicircular cross section with the same left and right sides. 1B
It is divided into two parts. The first and second two-split laser beams 1A and 1B are projected from the apex side of a common polygonal pyramidal multi-segment mirror 5 to the same position on one half thereof through mirror devices 3 and 4. . One mirror device 3 includes a first mirror from the two-split mirror 2.
It is composed of a single flat mirror 6 that reflects the two-divided laser beam 1A in the same direction and projects it semicircularly from the apex side of the multi-divided mirror 5 to one half of the multi-divided mirror 5. The other mirror device 4 has a flat plate shape that reflects the second two-split laser beam 1B from the two-split mirror 2 toward the flat mirror 6 side by changing the direction of the projection shape so that the direction of the projection shape is reversed by setting the mirror angle. Mirror 7 and the two-split laser beam 1B reflected by this flat mirror 7 are directed from the apex side of the multi-split mirror 5 to the same position where the first two-split laser beam 1A is projected. It is composed of a flat mirror 7 that projects images in the same manner and overlaps each other. The first and second two-split laser beams 1 are projected onto the same position on the multi-split mirror 5 by superimposing the projection shapes in the same direction.
The superimposed beams A and 1B are multi-divided in the radial direction by each reflective surface 5A of the multi-divided mirror 5, and each of the obtained multi-divided laser beams 1a is condensed by a condensing lens 9 and is applied to a cigarette filter paper. Workpiece 1 like
0, and drilling is performed at regular intervals. The laser beam 1 is applied in a pulsed manner, and only during that time the multi-divided laser beam 1a is projected onto the workpiece 10. During the pause period of the laser beam 1, the workpiece 10 is fed and the next section is brought to the projection position. It's starting to become easier.

In this embodiment, the two-segment mirror 2 and the multi-segment mirror 5 are directed in the direction of incidence of the laser beam 1,
First and second two-split laser beam 1A from one side,
1B is projected onto the multi-divided mirror 5 by the flat mirrors 6 and 7, so that the multi-divided mirror 5 has its apex tilted by an angle θ with respect to the optical axis of the laser beam 1.

FIG. 2 shows a second embodiment of the invention. In this example, two
The split mirror 2 is placed on the optical path of the laser beam 1 so that one mirror surface 2B orthogonal to the split mirror 2 is on the optical axis of the laser beam 1, and the bottom mirror surface 2C is obliquely opposed to the laser beam 1. The laser beam 1 is divided into two parts: a first two-part laser beam 1A that directly passes through the laser beam 1, and a second two-part laser beam 1B that is reflected by a two-part mirror 2;
The divided laser beam 1A is directly projected onto the multi-divided mirror 5. Other points are 1st
This is similar to the example.

Even with such a structure, effects similar to those of the first embodiment can be obtained.

3 to 5 show a third embodiment of the present invention. In this embodiment, mirror devices 3 and 4 each consisting of one flat mirror 6 and 7 are provided on the respective optical paths of the two-split laser beams 1A and 1B.
These flat mirrors 6 and 7 are each directed diagonally toward the multi-segment mirror 5, and each of the two-split laser beams is projected onto the same position on the multi-segment mirror 5 with their projection shapes directed in the same direction. It was designed so that

Even in this case, the same effects as in the first embodiment can be obtained. Particularly in the case of this embodiment, the structure of the device is symmetrical, and the laser beam is divided into two parts.
The optical path lengths of A and 2B become equal.

[Effects of the Invention] As explained above, in the laser processing apparatus according to the present invention, in order to emit a multi-divided laser beam only from one side of the multi-divided mirror, two
The split laser beams are projected onto the same position of the multi-split mirror by the action of the mirror device, superimposing the projection shapes in the same direction, so that one of the two split laser beams is not thrown away.
It will be divided by the same energy as the beginning,
The energy usage effect can be improved compared to the conventional method.

[Brief explanation of drawings]

FIG. 1 and FIG. 2 are side views showing the schematic configuration of the first and second embodiments of the laser processing apparatus according to the present invention;
3 and 4 are a perspective view and a plan view of a third embodiment of the laser processing apparatus according to the present invention, and FIG.
6 is a view taken along the line AA in the figure, and FIG. 6 is a view taken along the line BB in FIG. 4. 1... Laser beam, 1A, 1B... 2-divided laser beam, 1a... Multi-divided laser beam, 2...
...Two-split mirror, 2A-2C...Reflection surface, 3,4
...Mirror device, 5...Multi-divided mirror, 6,7,
8... Flat mirror, 9... Condensing lens, 10...
...Workpiece.

Claims (1)

[Claims] 1. A two-split mirror that splits the laser beam into two,
A multi-segment mirror that splits the divided two-split laser beams into multiple parts and projects them onto the workpiece when the two-split laser beams are superimposed on each other with the same projection shape direction; At least one of the two laser beams is provided on at least one of the optical paths of the two-split laser beams leading to the mirror so that both the two-split laser beams are projected onto the same position of the multi-split mirror in a superimposed manner with the same direction of projection shape. A laser processing apparatus comprising: a mirror device that guides the two-split laser beam.