JPS6384786A - Laser marking device - Google Patents

Abstract

PURPOSE:To expand a marking area without increasing the energy density of laser light by providing a compound lens having plural optical axes to parallel the laser light to project on a mask with a prescribed pattern using plural optical fibers. CONSTITUTION:The laser light L reflected by an reflection mirror 2 is condensed by condenser lens 7a-7d at the incident side arranged in opposition to the incident end side of the plural optical fibers 6a-6d respectively and made incident on the fibers 6a-6d. Since the incident end of each fiber is arranged along the optical axial direction of the laser light L, when the reflection mirror 2 is driven and positioned in the optical axial direction by a linear motor 5, the laser light L is condensed by the lens 7a-7d and made incident on each fiber in opposition at the position. Furthermore, the laser light L is made to a parallel beam of light through the compound lens 8 combining collimator lens 9a-9d having the optical axes O in opposition to projecting ends of the fibers 6a-6d. The laser light L is condensed by a condenser lens 13 at the projecting side through the pattern 12 of the mask 11 and afterward, projected on a work 14 to perform the marking.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a laser marking device for marking a workpiece with a laser beam.

(Prior Art) For example, in electrical parts such as semiconductor devices as workpieces, after manufacturing, the production line, product name, etc. of the electrical parts are marked.

Conventionally, such marking was done using a stamp, but recently it has become more common to use a laser beam. The advantage of using laser light is that it can be done quickly and reliably without blurring as occurs with printing.

By the way, when marking with a laser beam, there are two methods: one is to scan the laser beam so as to draw a predetermined mark on the workpiece, and the other is to place a mask on the workpiece and transmit the laser beam through the pattern of this mask. There is a method of marking a mark by irradiating the workpiece, and the latter method is often used because it has the advantage of simplifying the structure of the apparatus.

In a laser marking device using a mask, in order to increase the marking area, the laser energy per pulse must be increased. however,
This requires a high-power laser oscillator, so
Not only is the cost high, but it also becomes difficult to transmit laser light through optical fibers.

Conventionally, in order to increase the marking area, a marking optical system provided on the output end side of an optical fiber that transmits laser light has been driven by, for example, an X-Y table. However, if the marking optical system is driven by an X-Y table,
The disadvantage is that the structure on the output end side of the optical fiber is large and complicated. Since marking of the above-mentioned electrical components is performed on the production line, if the output end of the optical fiber becomes large, it may become difficult to arrange the output end on the production line.

(Problems to be solved by the invention) This invention was made based on the above circumstances, and its purpose is to increase the output of laser light and to increase the size of the output end of an optical fiber. To provide a laser marking 8-position device capable of enlarging the marking area without causing problems.

[Structure of the invention] (Means and effects for solving the problem) This invention has the following features:
A laser oscillator, an optical means for respectively inputting the laser beam outputted from the laser oscillator into a plurality of optical fibers, and an optical means disposed facing the output end side of each of the optical fibers to respectively input the laser beam outputted from these optical fibers. It includes a lens group having a plurality of optical axes that are made substantially parallel, and a mask that irradiates a workpiece with laser light made parallel by the lens group in a predetermined pattern.

Then, the marking area is expanded by using a plurality of optical fibers.

(Embodiment) An embodiment of this invention will be described below with reference to FIGS. 1 and 2. The laser marking device shown in FIG. 1 includes a laser oscillator 1. The laser marking device shown in FIG. The direction of laser light output from this laser oscillator 1 is changed by a reflecting mirror 2 constituting an optical means. This reflecting mirror 2 is attached to the rotating shaft 4 of the control motor 3 so that the angle of the laser beam outputted from the laser oscillator 1 with respect to the optical axis can be set to rA. The control motor 3 is a linear motor 5
The laser beam is driven along the optical axis direction of the laser beam.

Reflection above! A plurality of laser beams are reflected by the laser beams 2, in this embodiment, the first to fourth incident-side condensing lenses 78 to 78 disposed opposite to the incident end sides of the first to fourth optical fibers 6a to 6d, respectively. 7d and enters the first to fourth optical fibers 6a to 6d. Each optical fiber 68~6d
The incident end of the laser beam is arranged along the optical axis direction of the laser beam.

Therefore, when the reflecting mirror 2 is driven in the optical axis direction by the linear motor 5 and positioned, the laser light is focused by the incident side condensing lenses 7a to 7d and enters the opposing optical fibers 6a to 6d at that position. It is supposed to be done.

A lens group 8 is provided on the output end side of each of the optical fibers 6a to 6d.
is located. This lens group 8 consists of optical fibers 6a~
A composite lens is formed by combining fan-shaped first to fourth collimator lenses 9a to 9d corresponding to the number 6d. In other words, the lens group 8 has four optical axes 0, and each optical axis 0
The output ends of each of the optical fibers 6a to 6d are opposed to each other. Therefore, the laser light emitted from each of the optical fibers 68 to 6d and incident on the lens group 8 becomes a parallel light beam by each of the collimator lenses 9a to 6d.

A mask 11 is arranged facing the lens group 8. The part of this mask 11 that is irradiated by the laser beam that has passed through the lens group 8 is, for example, A%B1C.
Patterns 12 such as... are formed. The laser beam transmitted through the lens group 8 passes through the pattern 12 of the mask 11 and is focused by the output condenser lens 1.3, and then irradiates a workpiece 14 such as an electrical component. Therefore, the pattern 1 of the mask 11 is applied to this workpiece 14.
2 is now marked.

Next, the case where the pattern 12 of the mask 11 is marked on the workpiece 14 using the above-mentioned apparatus will be explained.

First, the linear motor 5 is operated to make the reflecting mirror 2 face the first incident-side condensing lens 7 closest to the laser oscillator 1, and then the laser oscillator 1 oscillates laser light. Then, the laser beam is reflected by the reflecting mirror 2 and focused by the first incident side condensing lens 7a, and then
The light enters the first optical fiber 6a whose input end faces the input measuring optical lens 7a. Laser light transmitted by the first optical fiber 6a and emitted from its output end is transmitted through the first optical fiber 6a constituting the lens group 8 disposed opposite to the output end.
is incident on the collimator lens 9a. And this first
The collimator lens 9a converts the light into parallel light beams, and irradiates about a quarter of the total area of the pattern 12 on the mask 11.

The laser beam that has passed through this pattern 12 is focused by the output-side condensing lens 13 and irradiates the workpiece 14 . Therefore, one quarter of the pattern 12 of the mask 11 is marked on this workpiece 14.

Once a quarter of the pattern 12 has been marked in this way, the linear motor 5 is operated again and the reflecting mirror 2 is marked.
is opposed to the second incident side condensing lens 7b. and,
A laser beam is emitted from the laser oscillator 1, and the laser beam is made to enter a second optical fiber 6a whose input end faces the second input-side condensing lens. Then, the laser light transmitted through the optical fiber 6b is transmitted through the compound lens 8.
The light passes through the second collimator lens 9b and passes through a different part of the pattern 12 of the mask 11 from the previous one, and is focused by the output condenser lens 13 to illuminate the workpiece 14, marking the pattern 12 thereon. .

In this way, by sequentially moving the anti-01 mirror 2, the entire area of the pattern 12 of the mask 11 will be irradiated with laser light via the first to fourth optical fibers 6a to 6d. 12 will be marked on the workpiece 14. That is, by marking the plurality of optical fibers 6 to 6d by sequentially entering the laser beam, it is possible to increase the marking area on the workpiece 14.

Note that the present invention is not limited to the above practical example. For example, if the mask 11 is elongated as shown in FIG. 3, the lens group 8 may be shaped to correspond to the mask 11 as shown in FIG. good. That is, the first collimator lens 9a and the fourth collimator lens 9d are approximately semicircular, and the second,
The third collimator lens 9b19c has a band shape. Then, these lenses may be cemented in a horizontal row to form a compound lens. Further, instead of forming the lens group in the shape of a compound lens as described above, for example, a cross-shaped partition may be prepared, and one lens may be fitted into each section of the partition.

Further, as shown in FIG. 5, if a part of the pattern 12 formed on the mask 11 is very small, the collimator lens 9e corresponding to that part can be replaced with other collimator lenses 9f to 9f.
If the focal length is smaller than that of 9h, the energy density of the laser beam passing through the collimator lens 9e will be high, so that the small pattern 12 can be clearly marked. In addition, in a Si installation where sufficient laser energy per pulse can be secured, if a large number of half mirrors are used to branch into several optical fibers, it is possible to mark a large area with one pulse without damaging the optical fibers. It becomes possible.

[Effects of the Invention] As described above, the present invention allows laser beams output from a laser oscillator to enter each of a plurality of optical fibers,
The laser beams emitted from these optical fibers are made parallel by entering a lens group having multiple optical axes, and the laser beams made parallel by this compound lens are formed into a predetermined pattern by a mask and irradiated onto the workpiece. did. Therefore, the marking area can be expanded without increasing the energy density of the laser beam, which is more economical than increasing the marking area using a high-output laser oscillator. There is no need to make the side structure large and complicated as in the past.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of the overall configuration showing one embodiment of this invention, Fig. 2 is a plan view of a compound lens, and Fig. 3 is a plan view of a mask showing another example of this invention. Fig. 4 Similarly, FIG. 5 is a plan view of a compound lens, and FIG. 5 is a perspective view of the output end side of a light source fiber showing still another embodiment of the present invention. 1... Laser oscillator, 2... Reflector (optical means),
68-6d...Optical fiber, 8...Lens group, 11
...Mask, 14...Workpiece. Applicant's agent Patent attorney Takeshi Suzue Gutei Figure 1 b Figure 2

Claims (1)

[Claims] A laser oscillator, an optical means for respectively inputting the laser beam outputted from the laser oscillator into a plurality of optical fibers, and an optical means disposed facing the output end side of each of the optical fibers to respectively input the laser beam outputted from these optical fibers. A laser comprising a lens group having a plurality of optical axes made nearly parallel, and a mask for irradiating a workpiece with laser light made parallel by the lens group in a predetermined pattern. marking device.