JPH0356040Y2 - - Google Patents

Info

Publication number
JPH0356040Y2
JPH0356040Y2 JP1987011503U JP1150387U JPH0356040Y2 JP H0356040 Y2 JPH0356040 Y2 JP H0356040Y2 JP 1987011503 U JP1987011503 U JP 1987011503U JP 1150387 U JP1150387 U JP 1150387U JP H0356040 Y2 JPH0356040 Y2 JP H0356040Y2
Authority
JP
Japan
Prior art keywords
liquid
stop valve
pipe
valve
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987011503U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63121435U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987011503U priority Critical patent/JPH0356040Y2/ja
Publication of JPS63121435U publication Critical patent/JPS63121435U/ja
Application granted granted Critical
Publication of JPH0356040Y2 publication Critical patent/JPH0356040Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Weting (AREA)
JP1987011503U 1987-01-30 1987-01-30 Expired JPH0356040Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987011503U JPH0356040Y2 (OSRAM) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987011503U JPH0356040Y2 (OSRAM) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121435U JPS63121435U (OSRAM) 1988-08-05
JPH0356040Y2 true JPH0356040Y2 (OSRAM) 1991-12-16

Family

ID=30798779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987011503U Expired JPH0356040Y2 (OSRAM) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0356040Y2 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3443192B2 (ja) * 1994-11-04 2003-09-02 大日本スクリーン製造株式会社 基板処理装置用処理液供給装置
JP6468339B2 (ja) * 2017-11-24 2019-02-13 三菱ケミカル株式会社 半導体リソグラフィー用重合体の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60158734U (ja) * 1984-03-29 1985-10-22 大日本スクリ−ン製造株式会社 基板表面処理液供給装置
JPS61198723A (ja) * 1985-02-28 1986-09-03 Toshiba Corp レジスト塗布装置

Also Published As

Publication number Publication date
JPS63121435U (OSRAM) 1988-08-05

Similar Documents

Publication Publication Date Title
JP5036664B2 (ja) 液処理におけるノズル洗浄、処理液乾燥防止方法及びその装置
TW573237B (en) Film forming unit
TW306011B (OSRAM)
TWI244132B (en) Fluid supplying apparatus and substrate processing apparatus
CN102001044B (zh) 化学机械抛光的研磨液供给系统
TW425603B (en) A deaerating apparatus a process of deaerating a treatment apparatus
JPH0356040Y2 (OSRAM)
JP2724298B2 (ja) 流動性物質排出装置
TW483047B (en) Liquid spraying method capable of preventing residual liquid drops
CN1075209C (zh) 用于供给光致抗蚀剂的系统
JP4554236B2 (ja) 液供給機構および液供給方法
JPH11121422A (ja) 薬液供給装置
JP2004019544A (ja) 泡抜き機構付き薬液ポンプ
JP3442263B2 (ja) 液供給機構、液処理装置および液処理方法
KR100405868B1 (ko) 감광액 공급장치
JP3168606B2 (ja) 薬液塗布装置
JPS63121050A (ja) 感光材料処理装置
JP3127770U (ja) 液体移送装置
JP3832537B2 (ja) 処理液供給装置
CN209608958U (zh) 沉锡线
JPH0444218Y2 (OSRAM)
JP4776429B2 (ja) 処理液供給システム、処理液供給方法、処理液供給プログラム及びそのプログラムを記録したコンピュータ読み取り可能な記録媒体
KR100481556B1 (ko) 현상액 분사 장치
JPS6376327A (ja) レジスト吐出・吸引装置
TWI284349B (en) System and method for supplying photoresist