JPH0353475B2 - - Google Patents

Info

Publication number
JPH0353475B2
JPH0353475B2 JP60143901A JP14390185A JPH0353475B2 JP H0353475 B2 JPH0353475 B2 JP H0353475B2 JP 60143901 A JP60143901 A JP 60143901A JP 14390185 A JP14390185 A JP 14390185A JP H0353475 B2 JPH0353475 B2 JP H0353475B2
Authority
JP
Japan
Prior art keywords
helium
filter
vacuum chamber
exhaust system
auxiliary exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60143901A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627985A (ja
Inventor
Junpei Yuyama
Hiroyuki Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP14390185A priority Critical patent/JPS627985A/ja
Publication of JPS627985A publication Critical patent/JPS627985A/ja
Publication of JPH0353475B2 publication Critical patent/JPH0353475B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP14390185A 1985-07-02 1985-07-02 ヘリウムを連続排気し得るクライオポンプ Granted JPS627985A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14390185A JPS627985A (ja) 1985-07-02 1985-07-02 ヘリウムを連続排気し得るクライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14390185A JPS627985A (ja) 1985-07-02 1985-07-02 ヘリウムを連続排気し得るクライオポンプ

Publications (2)

Publication Number Publication Date
JPS627985A JPS627985A (ja) 1987-01-14
JPH0353475B2 true JPH0353475B2 (ru) 1991-08-15

Family

ID=15349697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14390185A Granted JPS627985A (ja) 1985-07-02 1985-07-02 ヘリウムを連続排気し得るクライオポンプ

Country Status (1)

Country Link
JP (1) JPS627985A (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4598605B2 (ja) * 2005-06-01 2010-12-15 道久 蔦原 真空乾燥装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2278644B (en) * 1993-05-20 1996-01-03 Euratom Modified cryogenic diffusion pump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130519A (ja) * 1983-09-05 1984-07-27 Mitsutoshi Kashiwajima 多孔性物質を用いた気体の輸送圧縮装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130519A (ja) * 1983-09-05 1984-07-27 Mitsutoshi Kashiwajima 多孔性物質を用いた気体の輸送圧縮装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4598605B2 (ja) * 2005-06-01 2010-12-15 道久 蔦原 真空乾燥装置

Also Published As

Publication number Publication date
JPS627985A (ja) 1987-01-14

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