JPH0352563B2 - - Google Patents
Info
- Publication number
- JPH0352563B2 JPH0352563B2 JP57168978A JP16897882A JPH0352563B2 JP H0352563 B2 JPH0352563 B2 JP H0352563B2 JP 57168978 A JP57168978 A JP 57168978A JP 16897882 A JP16897882 A JP 16897882A JP H0352563 B2 JPH0352563 B2 JP H0352563B2
- Authority
- JP
- Japan
- Prior art keywords
- displacement sensor
- displacement
- sensor
- value
- compensation value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16897882A JPS5957110A (ja) | 1982-09-27 | 1982-09-27 | 変位センサーの補償値出力装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16897882A JPS5957110A (ja) | 1982-09-27 | 1982-09-27 | 変位センサーの補償値出力装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25271890A Division JPH03233312A (ja) | 1990-09-20 | 1990-09-20 | 変位センサーの補償値表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5957110A JPS5957110A (ja) | 1984-04-02 |
| JPH0352563B2 true JPH0352563B2 (enExample) | 1991-08-12 |
Family
ID=15878083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16897882A Granted JPS5957110A (ja) | 1982-09-27 | 1982-09-27 | 変位センサーの補償値出力装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5957110A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7472576B1 (en) * | 2004-11-17 | 2009-01-06 | State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University | Nanometrology device standards for scanning probe microscopes and processes for their fabrication and use |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57139610A (en) * | 1981-02-25 | 1982-08-28 | Kazukado Ose | Calipers |
-
1982
- 1982-09-27 JP JP16897882A patent/JPS5957110A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5957110A (ja) | 1984-04-02 |
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