JPH0352214A - Manufacture of laminated ceramic capacitor - Google Patents
Manufacture of laminated ceramic capacitorInfo
- Publication number
- JPH0352214A JPH0352214A JP18788189A JP18788189A JPH0352214A JP H0352214 A JPH0352214 A JP H0352214A JP 18788189 A JP18788189 A JP 18788189A JP 18788189 A JP18788189 A JP 18788189A JP H0352214 A JPH0352214 A JP H0352214A
- Authority
- JP
- Japan
- Prior art keywords
- internal electrode
- dielectric ceramic
- ceramic green
- green sheet
- electrode layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003985 ceramic capacitor Substances 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000919 ceramic Substances 0.000 claims abstract description 35
- 239000000843 powder Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 8
- 239000003960 organic solvent Substances 0.000 claims abstract description 8
- 239000007772 electrode material Substances 0.000 claims abstract description 5
- 238000001035 drying Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims description 3
- 230000032798 delamination Effects 0.000 abstract description 5
- 238000007650 screen-printing Methods 0.000 abstract description 3
- 230000006866 deterioration Effects 0.000 abstract description 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000010304 firing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 239000002003 electrode paste Substances 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は積層セラミックコンデンサの製造方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a multilayer ceramic capacitor.
従来の技術
一般に積層セラミックコンデンサの製造方法は、金属酸
化物等のセラミック粉末をブチラール樹脂等の有機バイ
ンダ，分散剤，有機溶媒を用いて分散混練したスラリー
を製造し、これをドクターブレード法等により数十μｍ
厚のシートに或形し、誘電体セラミックグリーンシート
を得る。Conventional technology In general, the manufacturing method for multilayer ceramic capacitors involves producing a slurry by dispersing and kneading ceramic powder such as metal oxides using an organic binder such as butyral resin, a dispersant, and an organic solvent, and then using a doctor blade method or the like to produce a slurry. Several tens of μm
It is shaped into a thick sheet to obtain a dielectric ceramic green sheet.
次に、この誘電体セラミックグリーンシート上に所定形
状の内部電極を、電極材ペーストをスクリーン印刷し、
直ちに電極ペースト中の有機溶媒を乾燥させることによ
り内部電極層を形戊する。Next, internal electrodes of a predetermined shape are screen printed with electrode material paste on this dielectric ceramic green sheet.
Immediately, the organic solvent in the electrode paste is dried to form the internal electrode layer.
この様に製造された誘電体セラミックグリーンシートを
複数積み重ねた後に加圧・圧着させ、所定の形状に切断
し、次に誘電体セラミックグリーンシートと内部電極層
を同時焼成し、内部電極露出端面に外部電極を形戊する
。After stacking multiple dielectric ceramic green sheets manufactured in this way, they are pressed and crimped and cut into a predetermined shape.Then, the dielectric ceramic green sheets and the internal electrode layer are co-fired, and the exposed end surface of the internal electrode is Shape the external electrode.
発明が解決しようとする課題
上記、従来の技術では誘電体セラミックグリーンシート
及び内部電極層中の有機物の脱脂過程，焼結過程が同時
焼戊により複雑な挙動を示す。Problems to be Solved by the Invention In the above-mentioned conventional technology, the degreasing process and sintering process of the organic matter in the dielectric ceramic green sheet and the internal electrode layer exhibit complicated behavior due to simultaneous firing.
従って、内部電極ペーストは焼威後に於いて、誘電体セ
ラミックグリーンシートとの化学反応を起こさない様に
考慮する必要がある。それゆえ、従来積層セラミックコ
ンデンサは焼戊後に誘電体セラミックグリーンシートと
内部電極層との間の密着性が悪く、シート層間での剥離
（以下、デラミネーションという）や、内部電極層上の
ボイド，電極切れ等による弊害をもたらすことがあった
。Therefore, it is necessary to take care to prevent the internal electrode paste from causing a chemical reaction with the dielectric ceramic green sheet after being burnt out. Therefore, in conventional multilayer ceramic capacitors, the adhesion between the dielectric ceramic green sheet and the internal electrode layer is poor after firing, resulting in peeling between the sheet layers (hereinafter referred to as delamination), voids on the internal electrode layer, etc. This may cause problems such as electrode breakage.
そこで、本発明は、上記に記述した課題を解消し得る積
層セラミックコンデンサの製造方法を提供するものであ
る。Therefore, the present invention provides a method for manufacturing a multilayer ceramic capacitor that can solve the problems described above.
課題を解決するための手段
上記課題を解決するために、本発明は誘電体セラミック
グリーンシート上に内部電極材ペーストをスクリーン印
刷して内部電極層を形威した後、未乾燥の上記内部電極
層上に誘電体セラミック原料微粉末を付着させ、その後
に内部電極層中の有機溶媒を乾燥させることにより、誘
電体セラミックグリーンシート上に内部電極層を形戊す
る。この様に得られたシートを複数枚積み重ね、加圧・
圧着後に所定形状に切断後、焼成して独立した積層セラ
ミックコンデンサを得るものである。Means for Solving the Problems In order to solve the above problems, the present invention forms an internal electrode layer by screen printing an internal electrode material paste on a dielectric ceramic green sheet, and then prints the undried internal electrode layer. An internal electrode layer is formed on the dielectric ceramic green sheet by depositing dielectric ceramic raw material fine powder thereon and then drying the organic solvent in the internal electrode layer. Multiple sheets obtained in this way are stacked, pressurized and
After crimping and cutting into a predetermined shape, the capacitor is fired to obtain an independent multilayer ceramic capacitor.
作用
上記方法によればグリーンチップに於いては、内部電極
上に誘電体セラミック原料微粉末が付着・コートされた
状態で、これを複数所定の数を積み重ね、加圧・圧着す
ることにより、内部電極上にコートされた誘電体セラミ
ック微粉末が加圧時に内部電極表面の一部及び下地誘電
体セラミックグリーンシートと強く密着し、内部電極層
に誘電体セラミック微粉末が食いこむ様になる。したが
って、こうして得られる誘電体セラミックグリーンシー
トと内部電極をトンネル焼成炉で同時焼成し、誘電体セ
ラミックグリーンシート及び内部電極中の有機バインダ
ーと有機溶媒を脱脂する際にも、セラミックと電極の密
着性が向上しているために剥離，ボイド，デラミネーシ
ョンが抑制できる。また、誘電体セラミック及び内部電
極の膨張，収縮過程に於いても同様の問題を抑制するこ
とができる。Operation According to the method described above, in a green chip, the internal electrodes are coated with dielectric ceramic raw material fine powder, and by stacking a predetermined number of these and pressurizing and crimping them, the internal electrodes are bonded. The dielectric ceramic fine powder coated on the electrode strongly adheres to a part of the internal electrode surface and the base dielectric ceramic green sheet when pressurized, and the dielectric ceramic fine powder bites into the internal electrode layer. Therefore, even when the dielectric ceramic green sheets and internal electrodes obtained in this way are fired simultaneously in a tunnel firing furnace and the organic binder and organic solvent in the dielectric ceramic green sheets and internal electrodes are degreased, the adhesion between the ceramic and the electrodes is maintained. Because of the improved properties, peeling, voids, and delamination can be suppressed. Furthermore, similar problems can be suppressed in the expansion and contraction processes of the dielectric ceramic and internal electrodes.
実施例 以下、本発明を具体的実施例により詳細に説明する。Example Hereinafter, the present invention will be explained in detail with reference to specific examples.
先ず、Ｂ ａ Ｃ ０３， Ｔ ｉ ０２を主成分とし
、他に微量金属酸化物を所定量秤量し、ボールミルに純
水とともに入れ、湿式混合後、脱水乾燥した。この乾燥
粉末を高アルミナ質のルツボに入れ、１１００℃で２時
間仮焼した。この仮焼粉末を仮整粒したのち、乾式粉砕
（ジェット・ミル）にて１μｍ程度の平均粒径となる様
に粉砕する。この粉末にポリビニルブチラールやポリア
クリレート及びフタル酸シブチル等の有機パインダー、
またメチルセロソルブ等の有機溶媒を加えて混練し、ス
ラリーを製造した後、ドクターブレード法等によりグリ
ーンシ一トを製造し、その後、所定の大きさに切り取り
、誘電体セラミックグリーンシートを得る。第１図に示
す様に、この誘電体セラミックグリーンシート１上にス
クリーン印刷法等で内部電極ペーストを印刷し、短冊状
の内部電極層２を形成する。この後、第４図のごとく粉
砕粉末がエアーにて循環しているゾーン４を通過させ、
内部電極層２表面に誘電体セラミック微粉末３を付着さ
せ、その後に、乾燥ゾーン５にて内部電極溶剤を乾燥さ
せる。こうすれば第１図に示す様な誘電体セラミックグ
リーンシート１上に内部電極層２が形成され、この内部
電極層２表面に誘電体セラミック粉末が付着・コートさ
せたものが得られる。こうして得られたものを、第２図
に示す様に所定数積み重ね、３００ｋｇ／ａＩｒの圧力
を加えて圧着し、次にそれを所定形状に切断して、第３
図の様な積層セラミックコンデンサグリーンチップを得
る。これをトンネル焼成中へジルコニア匣鉢中に入れ空
気中において１３００℃で焼成し、内部電極露出面に外
部電極銀を焼き付け、積層セラミックコンデンサを得た
。これらの試料の内部構造，電気特性は下記第１表に示
す通りである。First, a predetermined amount of B a C 03 and T i 02 as main components and a trace amount of metal oxide were weighed out, put into a ball mill together with pure water, mixed wet, and then dehydrated and dried. This dry powder was placed in a high alumina crucible and calcined at 1100°C for 2 hours. This calcined powder is pre-sized and then pulverized by dry pulverization (jet mill) to an average particle size of about 1 μm. Organic binders such as polyvinyl butyral, polyacrylate, and sibutyl phthalate are added to this powder.
Further, an organic solvent such as methyl cellosolve is added and kneaded to produce a slurry, and then a green sheet is produced by a doctor blade method or the like, and then cut into a predetermined size to obtain a dielectric ceramic green sheet. As shown in FIG. 1, an internal electrode paste is printed on the dielectric ceramic green sheet 1 by screen printing or the like to form a strip-shaped internal electrode layer 2. After that, as shown in Fig. 4, the pulverized powder is passed through zone 4 where it is circulated by air.
Dielectric ceramic fine powder 3 is adhered to the surface of internal electrode layer 2, and then the internal electrode solvent is dried in drying zone 5. In this way, the internal electrode layer 2 is formed on the dielectric ceramic green sheet 1 as shown in FIG. 1, and the surface of the internal electrode layer 2 is coated with dielectric ceramic powder. As shown in Fig. 2, a predetermined number of the thus obtained materials are stacked, crimped by applying a pressure of 300 kg/aIr, and then cut into a predetermined shape.
Obtain a multilayer ceramic capacitor green chip as shown in the figure. This was placed in a zirconia sagger during tunnel firing and fired at 1300° C. in air, and external electrode silver was baked on the exposed surface of the internal electrodes to obtain a multilayer ceramic capacitor. The internal structures and electrical properties of these samples are shown in Table 1 below.
尚、比較例として従来の技術にて得られた特性も付記し
ている。Note that characteristics obtained using conventional techniques are also shown as comparative examples.
（ 以 下 余 白 ）
第１表
（注；※は本発明の請求範囲外であり、比較
例として付記している）
発明の効果
以上のように本発明によれば、デラミネーシ３ンを抑制
し、内部電極切れ・引込みによるＥＳＲの劣化，容量低
下を防止することが可能である。(Margin below) Table 1 (Note: * is outside the scope of the claims of the present invention and is added as a comparative example) Effects of the Invention As described above, according to the present invention, delamination can be suppressed. It is possible to prevent ESR deterioration and capacity reduction due to internal electrode breakage and withdrawal.
また、内部電極層自体の強度も強くなるので、内部電極
層を薄層化する事が可能であり、材料費の低減を図るこ
ともできる。更に、単純な焼戊カーブにて量産が可能と
なり効果は大である。Furthermore, since the strength of the internal electrode layer itself is increased, it is possible to make the internal electrode layer thinner, and material costs can also be reduced. Furthermore, mass production is possible with a simple burnout curve, which is highly effective.
第１図は誘電体セラミックグリーンシート上の内部電極
層上に誘電体セラミック微粉末を付着させたものの平面
図、第２図は第１図に示されるものを３枚積み重ねる前
の正面図、第３図は第２図に示されるものを加圧・圧着
したものを示す断面図である。第４図は内部電極上に誘
電体セラミック粉末を付着及び内部電極中の有機溶媒を
乾燥させる装置の概略図である。
１・・・・・・誘電体セラミックグリーンシート、２・
・・・・・内部電極層、３・・・・・・誘電体セラミッ
ク微粉末。Figure 1 is a plan view of a dielectric ceramic green sheet with dielectric ceramic fine powder adhered to an internal electrode layer, Figure 2 is a front view of the material shown in Figure 1 before stacking three sheets, and FIG. 3 is a sectional view showing the material shown in FIG. 2 pressed and crimped. FIG. 4 is a schematic diagram of an apparatus for depositing dielectric ceramic powder on internal electrodes and drying organic solvent in the internal electrodes. 1...Dielectric ceramic green sheet, 2.
...Internal electrode layer, 3...Dielectric ceramic fine powder.
Claims (1)
トを所定の形状に印刷し、次に上記内部電極上に誘電体
セラミック原料粉末を付着させ、その後内部電極材ペー
スト中の有機溶媒を乾燥させることにより、誘電体セラ
ミックグリーンシート上に内部電極層を設け、次に前記
内部電極層を有する誘電体セラミックグリーンシートを
複数積み重ねることを特徴とする積層セラミックコンデ
ンサの製造方法。By printing an internal electrode material paste in a predetermined shape on a dielectric ceramic green sheet, then attaching a dielectric ceramic raw material powder onto the internal electrode, and then drying the organic solvent in the internal electrode material paste, A method for manufacturing a multilayer ceramic capacitor, comprising: providing an internal electrode layer on a dielectric ceramic green sheet; and then stacking a plurality of dielectric ceramic green sheets each having the internal electrode layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1187881A JP2969658B2 (en) | 1989-07-20 | 1989-07-20 | Manufacturing method of multilayer ceramic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1187881A JP2969658B2 (en) | 1989-07-20 | 1989-07-20 | Manufacturing method of multilayer ceramic capacitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0352214A true JPH0352214A (en) | 1991-03-06 |
| JP2969658B2 JP2969658B2 (en) | 1999-11-02 |
Family
ID=16213837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1187881A Expired - Fee Related JP2969658B2 (en) | 1989-07-20 | 1989-07-20 | Manufacturing method of multilayer ceramic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2969658B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002329634A (en) * | 2001-04-26 | 2002-11-15 | Kyocera Corp | Laminated electronic component and its manufacturing method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63260122A (en) * | 1987-04-17 | 1988-10-27 | 日本特殊陶業株式会社 | Manufacture of laminated ceramic element |
-
1989
- 1989-07-20 JP JP1187881A patent/JP2969658B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63260122A (en) * | 1987-04-17 | 1988-10-27 | 日本特殊陶業株式会社 | Manufacture of laminated ceramic element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002329634A (en) * | 2001-04-26 | 2002-11-15 | Kyocera Corp | Laminated electronic component and its manufacturing method |
| JP4671530B2 (en) * | 2001-04-26 | 2011-04-20 | 京セラ株式会社 | Multilayer electronic components |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2969658B2 (en) | 1999-11-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |