JPH0350509Y2 - - Google Patents

Info

Publication number
JPH0350509Y2
JPH0350509Y2 JP1987106376U JP10637687U JPH0350509Y2 JP H0350509 Y2 JPH0350509 Y2 JP H0350509Y2 JP 1987106376 U JP1987106376 U JP 1987106376U JP 10637687 U JP10637687 U JP 10637687U JP H0350509 Y2 JPH0350509 Y2 JP H0350509Y2
Authority
JP
Japan
Prior art keywords
intake
exhaust
tank
machine
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987106376U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6413048U (US07922777-20110412-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987106376U priority Critical patent/JPH0350509Y2/ja
Priority to US07/218,835 priority patent/US4857949A/en
Publication of JPS6413048U publication Critical patent/JPS6413048U/ja
Application granted granted Critical
Publication of JPH0350509Y2 publication Critical patent/JPH0350509Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D7/00—Gas processing apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D13/00—Processing apparatus or accessories therefor, not covered by groups G11B3/00 - G11B11/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photographic Processing Devices Using Wet Methods (AREA)
  • Photographic Developing Apparatuses (AREA)
JP1987106376U 1987-07-13 1987-07-13 Expired JPH0350509Y2 (US07922777-20110412-C00004.png)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1987106376U JPH0350509Y2 (US07922777-20110412-C00004.png) 1987-07-13 1987-07-13
US07/218,835 US4857949A (en) 1987-07-13 1988-07-13 Device for venting fumes given off by automatic developing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987106376U JPH0350509Y2 (US07922777-20110412-C00004.png) 1987-07-13 1987-07-13

Publications (2)

Publication Number Publication Date
JPS6413048U JPS6413048U (US07922777-20110412-C00004.png) 1989-01-24
JPH0350509Y2 true JPH0350509Y2 (US07922777-20110412-C00004.png) 1991-10-29

Family

ID=14431997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987106376U Expired JPH0350509Y2 (US07922777-20110412-C00004.png) 1987-07-13 1987-07-13

Country Status (2)

Country Link
US (1) US4857949A (US07922777-20110412-C00004.png)
JP (1) JPH0350509Y2 (US07922777-20110412-C00004.png)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9109565U1 (de) * 1991-08-02 1991-09-26 Agfa-Gevaert Ag, 5090 Leverkusen Vorrichtung zur Entwicklung von fotografischen Schichtträgern
US6672956B1 (en) 2002-04-22 2004-01-06 Integrated Engineering Services Apparatus for venting chemical vessels
US7396412B2 (en) 2004-12-22 2008-07-08 Sokudo Co., Ltd. Coat/develop module with shared dispense
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
US7819079B2 (en) 2004-12-22 2010-10-26 Applied Materials, Inc. Cartesian cluster tool configuration for lithography type processes
US7651306B2 (en) 2004-12-22 2010-01-26 Applied Materials, Inc. Cartesian robot cluster tool architecture
US7699021B2 (en) 2004-12-22 2010-04-20 Sokudo Co., Ltd. Cluster tool substrate throughput optimization
JP2007017740A (ja) * 2005-07-08 2007-01-25 Noritsu Koki Co Ltd 現像装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5926356A (ja) * 1982-08-04 1984-02-10 株式会社日立製作所 移動体の駐機装置
JPS61151652A (ja) * 1984-12-26 1986-07-10 Konishiroku Photo Ind Co Ltd 自動現像装置
JPH0142097Y2 (US07922777-20110412-C00004.png) * 1985-07-12 1989-12-11
US4695146A (en) * 1986-10-10 1987-09-22 Fuller Charles L Fume exhaust system for photo print processors
JP3109293B2 (ja) * 1992-11-09 2000-11-13 松下電器産業株式会社 厨芥処理機
JP3161117B2 (ja) * 1993-01-14 2001-04-25 松下電器産業株式会社 受信装置

Also Published As

Publication number Publication date
JPS6413048U (US07922777-20110412-C00004.png) 1989-01-24
US4857949A (en) 1989-08-15

Similar Documents

Publication Publication Date Title
JPH0350509Y2 (US07922777-20110412-C00004.png)
JP2013045877A (ja) 基板処理装置
KR100242530B1 (ko) 필터장치
TW400541B (en) Processing system
JP2013026490A (ja) 基板処理装置
KR100822937B1 (ko) 액처리장치
JP2581396B2 (ja) 基板乾燥装置
JP2001015578A (ja) 基板処理装置
JP4567178B2 (ja) スピン処理装置
EP0947885B1 (en) Photosensitive material processing apparatus and sealing structure for processing section of the apparatus
JPH07249559A (ja) 回転処理装置
JP2862888B2 (ja) 防滴形排気装置
JPS5926356Y2 (ja) 感光材料現像処理装置
JP3061339B2 (ja) 洗浄装置
US3982258A (en) Photographic plate developer apparatus
JP3299988B2 (ja) 基板を処理するための装置
JP3094055B2 (ja) フィルタ装置及びレジスト処理システム
WO2016153051A1 (ja) 検査装置
JP2003280166A (ja) 乾燥装置
JP3431419B2 (ja) 基板処理装置
JP3349622B2 (ja) 基板の表面処理装置
KR100471426B1 (ko) 디스플레이 패널의 측면 세정 장치 및 방법
GB2163370A (en) Apparatus for processing a photosensitive substrate
JPH04241417A (ja) 半導体ウェハの洗浄装置
JPH0348583Y2 (US07922777-20110412-C00004.png)