JPH035020B2 - - Google Patents

Info

Publication number
JPH035020B2
JPH035020B2 JP59125743A JP12574384A JPH035020B2 JP H035020 B2 JPH035020 B2 JP H035020B2 JP 59125743 A JP59125743 A JP 59125743A JP 12574384 A JP12574384 A JP 12574384A JP H035020 B2 JPH035020 B2 JP H035020B2
Authority
JP
Japan
Prior art keywords
electron beam
scanning
supplied
electron
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59125743A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614145A (ja
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP59125743A priority Critical patent/JPS614145A/ja
Publication of JPS614145A publication Critical patent/JPS614145A/ja
Publication of JPH035020B2 publication Critical patent/JPH035020B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295Electron or ion diffraction tubes
    • H01J37/2955Electron or ion diffraction tubes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59125743A 1984-06-19 1984-06-19 電子線装置 Granted JPS614145A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59125743A JPS614145A (ja) 1984-06-19 1984-06-19 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59125743A JPS614145A (ja) 1984-06-19 1984-06-19 電子線装置

Publications (2)

Publication Number Publication Date
JPS614145A JPS614145A (ja) 1986-01-10
JPH035020B2 true JPH035020B2 (enrdf_load_stackoverflow) 1991-01-24

Family

ID=14917693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59125743A Granted JPS614145A (ja) 1984-06-19 1984-06-19 電子線装置

Country Status (1)

Country Link
JP (1) JPS614145A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112236837B (zh) 2018-06-04 2024-03-15 株式会社日立高新技术 电子束装置

Also Published As

Publication number Publication date
JPS614145A (ja) 1986-01-10

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