JPH0345947Y2 - - Google Patents

Info

Publication number
JPH0345947Y2
JPH0345947Y2 JP12648386U JP12648386U JPH0345947Y2 JP H0345947 Y2 JPH0345947 Y2 JP H0345947Y2 JP 12648386 U JP12648386 U JP 12648386U JP 12648386 U JP12648386 U JP 12648386U JP H0345947 Y2 JPH0345947 Y2 JP H0345947Y2
Authority
JP
Japan
Prior art keywords
planetary
annular frame
shaft
metal film
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12648386U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6334163U (instruction
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12648386U priority Critical patent/JPH0345947Y2/ja
Publication of JPS6334163U publication Critical patent/JPS6334163U/ja
Application granted granted Critical
Publication of JPH0345947Y2 publication Critical patent/JPH0345947Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12648386U 1986-08-21 1986-08-21 Expired JPH0345947Y2 (instruction)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12648386U JPH0345947Y2 (instruction) 1986-08-21 1986-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12648386U JPH0345947Y2 (instruction) 1986-08-21 1986-08-21

Publications (2)

Publication Number Publication Date
JPS6334163U JPS6334163U (instruction) 1988-03-04
JPH0345947Y2 true JPH0345947Y2 (instruction) 1991-09-27

Family

ID=31020324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12648386U Expired JPH0345947Y2 (instruction) 1986-08-21 1986-08-21

Country Status (1)

Country Link
JP (1) JPH0345947Y2 (instruction)

Also Published As

Publication number Publication date
JPS6334163U (instruction) 1988-03-04

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