JPH0344144B2 - - Google Patents
Info
- Publication number
- JPH0344144B2 JPH0344144B2 JP20601783A JP20601783A JPH0344144B2 JP H0344144 B2 JPH0344144 B2 JP H0344144B2 JP 20601783 A JP20601783 A JP 20601783A JP 20601783 A JP20601783 A JP 20601783A JP H0344144 B2 JPH0344144 B2 JP H0344144B2
- Authority
- JP
- Japan
- Prior art keywords
- zinc
- suction pipe
- pot
- lead
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 58
- 239000011701 zinc Substances 0.000 claims description 57
- 229910052725 zinc Inorganic materials 0.000 claims description 57
- 238000001704 evaporation Methods 0.000 claims description 17
- 238000007738 vacuum evaporation Methods 0.000 claims description 15
- 230000008020 evaporation Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- -1 ceramics or carbon Chemical compound 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20601783A JPS60100663A (ja) | 1983-11-04 | 1983-11-04 | 亜鉛の真空蒸着装置への亜鉛の供給方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20601783A JPS60100663A (ja) | 1983-11-04 | 1983-11-04 | 亜鉛の真空蒸着装置への亜鉛の供給方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60100663A JPS60100663A (ja) | 1985-06-04 |
| JPH0344144B2 true JPH0344144B2 (enrdf_load_stackoverflow) | 1991-07-05 |
Family
ID=16516523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20601783A Granted JPS60100663A (ja) | 1983-11-04 | 1983-11-04 | 亜鉛の真空蒸着装置への亜鉛の供給方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60100663A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1967604A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with directional evaporation |
-
1983
- 1983-11-04 JP JP20601783A patent/JPS60100663A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60100663A (ja) | 1985-06-04 |