JPH0343768B2 - - Google Patents
Info
- Publication number
- JPH0343768B2 JPH0343768B2 JP9530284A JP9530284A JPH0343768B2 JP H0343768 B2 JPH0343768 B2 JP H0343768B2 JP 9530284 A JP9530284 A JP 9530284A JP 9530284 A JP9530284 A JP 9530284A JP H0343768 B2 JPH0343768 B2 JP H0343768B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- saturation
- flux density
- soft magnetic
- magnetic flux
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 81
- 239000010409 thin film Substances 0.000 claims description 37
- 239000000203 mixture Substances 0.000 claims description 23
- 230000004907 flux Effects 0.000 description 27
- 238000004544 sputter deposition Methods 0.000 description 12
- 239000000956 alloy Substances 0.000 description 8
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 8
- 229910052735 hafnium Inorganic materials 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052752 metalloid Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- -1 Co and Ni Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15316—Amorphous metallic alloys, e.g. glassy metals based on Co
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9530284A JPS60239007A (ja) | 1984-05-12 | 1984-05-12 | 非晶質軟磁性薄膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9530284A JPS60239007A (ja) | 1984-05-12 | 1984-05-12 | 非晶質軟磁性薄膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239007A JPS60239007A (ja) | 1985-11-27 |
| JPH0343768B2 true JPH0343768B2 (fr) | 1991-07-03 |
Family
ID=14133975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9530284A Granted JPS60239007A (ja) | 1984-05-12 | 1984-05-12 | 非晶質軟磁性薄膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239007A (fr) |
-
1984
- 1984-05-12 JP JP9530284A patent/JPS60239007A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60239007A (ja) | 1985-11-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |