JPH0341962B2 - - Google Patents
Info
- Publication number
- JPH0341962B2 JPH0341962B2 JP6433682A JP6433682A JPH0341962B2 JP H0341962 B2 JPH0341962 B2 JP H0341962B2 JP 6433682 A JP6433682 A JP 6433682A JP 6433682 A JP6433682 A JP 6433682A JP H0341962 B2 JPH0341962 B2 JP H0341962B2
- Authority
- JP
- Japan
- Prior art keywords
- thermistor
- conductive
- thin film
- manufacturing
- conductive part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000007772 electrode material Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6433682A JPS58182202A (ja) | 1982-04-16 | 1982-04-16 | サ−ミスタの製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6433682A JPS58182202A (ja) | 1982-04-16 | 1982-04-16 | サ−ミスタの製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58182202A JPS58182202A (ja) | 1983-10-25 |
| JPH0341962B2 true JPH0341962B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-06-25 |
Family
ID=13255292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6433682A Granted JPS58182202A (ja) | 1982-04-16 | 1982-04-16 | サ−ミスタの製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58182202A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01171201A (ja) * | 1987-12-25 | 1989-07-06 | Okazaki Seisakusho:Kk | 薄膜抵抗測温体および測温体 |
-
1982
- 1982-04-16 JP JP6433682A patent/JPS58182202A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58182202A (ja) | 1983-10-25 |