JPH0341236Y2 - - Google Patents
Info
- Publication number
- JPH0341236Y2 JPH0341236Y2 JP15726186U JP15726186U JPH0341236Y2 JP H0341236 Y2 JPH0341236 Y2 JP H0341236Y2 JP 15726186 U JP15726186 U JP 15726186U JP 15726186 U JP15726186 U JP 15726186U JP H0341236 Y2 JPH0341236 Y2 JP H0341236Y2
- Authority
- JP
- Japan
- Prior art keywords
- constant
- temperature
- constant temperature
- tube
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 17
- 238000001816 cooling Methods 0.000 description 14
- 238000004378 air conditioning Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15726186U JPH0341236Y2 (enrdf_load_html_response) | 1986-10-14 | 1986-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15726186U JPH0341236Y2 (enrdf_load_html_response) | 1986-10-14 | 1986-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6364030U JPS6364030U (enrdf_load_html_response) | 1988-04-27 |
| JPH0341236Y2 true JPH0341236Y2 (enrdf_load_html_response) | 1991-08-29 |
Family
ID=31079642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15726186U Expired JPH0341236Y2 (enrdf_load_html_response) | 1986-10-14 | 1986-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341236Y2 (enrdf_load_html_response) |
-
1986
- 1986-10-14 JP JP15726186U patent/JPH0341236Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6364030U (enrdf_load_html_response) | 1988-04-27 |
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