JPH0338647Y2 - - Google Patents
Info
- Publication number
- JPH0338647Y2 JPH0338647Y2 JP1984139118U JP13911884U JPH0338647Y2 JP H0338647 Y2 JPH0338647 Y2 JP H0338647Y2 JP 1984139118 U JP1984139118 U JP 1984139118U JP 13911884 U JP13911884 U JP 13911884U JP H0338647 Y2 JPH0338647 Y2 JP H0338647Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- scanning
- light
- measurement data
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 37
- 238000001514 detection method Methods 0.000 claims description 11
- 230000007547 defect Effects 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 7
- 239000013256 coordination polymer Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984139118U JPH0338647Y2 (fr) | 1984-09-13 | 1984-09-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984139118U JPH0338647Y2 (fr) | 1984-09-13 | 1984-09-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6154212U JPS6154212U (fr) | 1986-04-11 |
JPH0338647Y2 true JPH0338647Y2 (fr) | 1991-08-15 |
Family
ID=30697498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984139118U Expired JPH0338647Y2 (fr) | 1984-09-13 | 1984-09-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0338647Y2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63238508A (ja) * | 1987-03-27 | 1988-10-04 | Toshiba Corp | 位置測定装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5669505A (en) * | 1979-11-05 | 1981-06-10 | Hitachi Ltd | Laser position detecting device |
JPS56125605A (en) * | 1980-03-07 | 1981-10-02 | Nippon Steel Corp | Method and apparatus for detection of shape of striplike body |
-
1984
- 1984-09-13 JP JP1984139118U patent/JPH0338647Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5669505A (en) * | 1979-11-05 | 1981-06-10 | Hitachi Ltd | Laser position detecting device |
JPS56125605A (en) * | 1980-03-07 | 1981-10-02 | Nippon Steel Corp | Method and apparatus for detection of shape of striplike body |
Also Published As
Publication number | Publication date |
---|---|
JPS6154212U (fr) | 1986-04-11 |
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