JPH0338647Y2 - - Google Patents

Info

Publication number
JPH0338647Y2
JPH0338647Y2 JP1984139118U JP13911884U JPH0338647Y2 JP H0338647 Y2 JPH0338647 Y2 JP H0338647Y2 JP 1984139118 U JP1984139118 U JP 1984139118U JP 13911884 U JP13911884 U JP 13911884U JP H0338647 Y2 JPH0338647 Y2 JP H0338647Y2
Authority
JP
Japan
Prior art keywords
mirror
scanning
light
measurement data
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984139118U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154212U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984139118U priority Critical patent/JPH0338647Y2/ja
Publication of JPS6154212U publication Critical patent/JPS6154212U/ja
Application granted granted Critical
Publication of JPH0338647Y2 publication Critical patent/JPH0338647Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1984139118U 1984-09-13 1984-09-13 Expired JPH0338647Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984139118U JPH0338647Y2 (fr) 1984-09-13 1984-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984139118U JPH0338647Y2 (fr) 1984-09-13 1984-09-13

Publications (2)

Publication Number Publication Date
JPS6154212U JPS6154212U (fr) 1986-04-11
JPH0338647Y2 true JPH0338647Y2 (fr) 1991-08-15

Family

ID=30697498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984139118U Expired JPH0338647Y2 (fr) 1984-09-13 1984-09-13

Country Status (1)

Country Link
JP (1) JPH0338647Y2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238508A (ja) * 1987-03-27 1988-10-04 Toshiba Corp 位置測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669505A (en) * 1979-11-05 1981-06-10 Hitachi Ltd Laser position detecting device
JPS56125605A (en) * 1980-03-07 1981-10-02 Nippon Steel Corp Method and apparatus for detection of shape of striplike body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5669505A (en) * 1979-11-05 1981-06-10 Hitachi Ltd Laser position detecting device
JPS56125605A (en) * 1980-03-07 1981-10-02 Nippon Steel Corp Method and apparatus for detection of shape of striplike body

Also Published As

Publication number Publication date
JPS6154212U (fr) 1986-04-11

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