JPH0338340B2 - - Google Patents

Info

Publication number
JPH0338340B2
JPH0338340B2 JP61050167A JP5016786A JPH0338340B2 JP H0338340 B2 JPH0338340 B2 JP H0338340B2 JP 61050167 A JP61050167 A JP 61050167A JP 5016786 A JP5016786 A JP 5016786A JP H0338340 B2 JPH0338340 B2 JP H0338340B2
Authority
JP
Japan
Prior art keywords
electron beam
signal
deflection
deflector
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61050167A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62207860A (ja
Inventor
Kazuyuki Toki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP5016786A priority Critical patent/JPS62207860A/ja
Publication of JPS62207860A publication Critical patent/JPS62207860A/ja
Publication of JPH0338340B2 publication Critical patent/JPH0338340B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5016786A 1986-03-07 1986-03-07 真空蒸着装置 Granted JPS62207860A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5016786A JPS62207860A (ja) 1986-03-07 1986-03-07 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5016786A JPS62207860A (ja) 1986-03-07 1986-03-07 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS62207860A JPS62207860A (ja) 1987-09-12
JPH0338340B2 true JPH0338340B2 (fr) 1991-06-10

Family

ID=12851645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5016786A Granted JPS62207860A (ja) 1986-03-07 1986-03-07 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS62207860A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5268091B2 (ja) * 2008-05-13 2013-08-21 株式会社アルバック 金属酸化膜の蒸着方法及びプラズマディスプレイパネルの製造方法
JP5715096B2 (ja) * 2012-07-13 2015-05-07 株式会社アルバック 金属酸化膜の蒸着方法及びプラズマディスプレイパネルの製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443883A (en) * 1977-09-16 1979-04-06 Hitachi Ltd Metallizing apparatus using electron beam
US4230739A (en) * 1978-03-21 1980-10-28 Leybold-Heraeus Gmbh Method of evaporating melts of alloys of metals having different vapor pressures
DE3330092A1 (de) * 1983-08-20 1985-03-07 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen
JPS62149864A (ja) * 1985-12-24 1987-07-03 Ishikawajima Harima Heavy Ind Co Ltd 電子ビ−ムの照射方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443883A (en) * 1977-09-16 1979-04-06 Hitachi Ltd Metallizing apparatus using electron beam
US4230739A (en) * 1978-03-21 1980-10-28 Leybold-Heraeus Gmbh Method of evaporating melts of alloys of metals having different vapor pressures
DE3330092A1 (de) * 1983-08-20 1985-03-07 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen
JPS6059064A (ja) * 1983-08-20 1985-04-05 ライボルト・アクチエンゲゼルシャフト 基材上に真空蒸着法で薄層を製造する際に蒸発装置の局部的蒸発パワーを制御するための方法及び装置
JPS62149864A (ja) * 1985-12-24 1987-07-03 Ishikawajima Harima Heavy Ind Co Ltd 電子ビ−ムの照射方法

Also Published As

Publication number Publication date
JPS62207860A (ja) 1987-09-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term