JPH0337334Y2 - - Google Patents
Info
- Publication number
- JPH0337334Y2 JPH0337334Y2 JP14469485U JP14469485U JPH0337334Y2 JP H0337334 Y2 JPH0337334 Y2 JP H0337334Y2 JP 14469485 U JP14469485 U JP 14469485U JP 14469485 U JP14469485 U JP 14469485U JP H0337334 Y2 JPH0337334 Y2 JP H0337334Y2
- Authority
- JP
- Japan
- Prior art keywords
- free access
- clean room
- access panel
- floor
- processing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000007788 liquid Substances 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Floor Finish (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14469485U JPH0337334Y2 (enrdf_load_stackoverflow) | 1985-09-21 | 1985-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14469485U JPH0337334Y2 (enrdf_load_stackoverflow) | 1985-09-21 | 1985-09-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6252633U JPS6252633U (enrdf_load_stackoverflow) | 1987-04-01 |
| JPH0337334Y2 true JPH0337334Y2 (enrdf_load_stackoverflow) | 1991-08-07 |
Family
ID=31055535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14469485U Expired JPH0337334Y2 (enrdf_load_stackoverflow) | 1985-09-21 | 1985-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337334Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-09-21 JP JP14469485U patent/JPH0337334Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6252633U (enrdf_load_stackoverflow) | 1987-04-01 |
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