JPH0337294Y2 - - Google Patents

Info

Publication number

JPH0337294Y2

JPH0337294Y2 JP1985086553U JP8655385U JPH0337294Y2 JP H0337294 Y2 JPH0337294 Y2 JP H0337294Y2 JP 1985086553 U JP1985086553 U JP 1985086553U JP 8655385 U JP8655385 U JP 8655385U JP H0337294 Y2 JPH0337294 Y2 JP H0337294Y2

Authority

JP

Japan

Prior art keywords

partition wall

ceiling frame

mounting structure

upper side

clean room

Prior art date

1985-06-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005192 partition Methods 0.000 claims description 19
• 229920003002 synthetic resin Polymers 0.000 claims description 3
• 239000000057 synthetic resin Substances 0.000 claims description 3
• 239000000463 material Substances 0.000 description 8
• 230000000644 propagated effect Effects 0.000 description 3
• 238000004140 cleaning Methods 0.000 description 2
• 229910000831 Steel Inorganic materials 0.000 description 1
• 238000010521 absorption reaction Methods 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 230000003749 cleanliness Effects 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000009434 installation Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 239000010959 steel Substances 0.000 description 1