JPH033717Y2 - - Google Patents
Info
- Publication number
- JPH033717Y2 JPH033717Y2 JP9784186U JP9784186U JPH033717Y2 JP H033717 Y2 JPH033717 Y2 JP H033717Y2 JP 9784186 U JP9784186 U JP 9784186U JP 9784186 U JP9784186 U JP 9784186U JP H033717 Y2 JPH033717 Y2 JP H033717Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- test chamber
- small
- chamber
- regulating valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 31
- 230000001105 regulatory effect Effects 0.000 claims description 19
- 230000007613 environmental effect Effects 0.000 claims description 11
- 238000009423 ventilation Methods 0.000 claims description 8
- 238000007796 conventional method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP9784186U JPH033717Y2 (cs) | 1986-06-25 | 1986-06-25 | 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP9784186U JPH033717Y2 (cs) | 1986-06-25 | 1986-06-25 | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS633761U JPS633761U (cs) | 1988-01-11 | 
| JPH033717Y2 true JPH033717Y2 (cs) | 1991-01-30 | 
Family
ID=30965212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP9784186U Expired JPH033717Y2 (cs) | 1986-06-25 | 1986-06-25 | 
Country Status (1)
| Country | Link | 
|---|---|
| JP (1) | JPH033717Y2 (cs) | 
- 
        1986
        - 1986-06-25 JP JP9784186U patent/JPH033717Y2/ja not_active Expired
 
Also Published As
| Publication number | Publication date | 
|---|---|
| JPS633761U (cs) | 1988-01-11 | 
Similar Documents
| Publication | Publication Date | Title | 
|---|---|---|
| CA2135740A1 (en) | Quick connect cartridge assembly with plug | |
| US5703281A (en) | Ultra high vacuum pumping system and high sensitivity helium leak detector | |
| CA2216920A1 (en) | Gas pressure regulator | |
| JPH033717Y2 (cs) | ||
| JP3149226B2 (ja) | 漏れ検出装置 | |
| GB1445933A (en) | Exhaust gas recirculation system | |
| JP3230783B2 (ja) | 室圧制御装置 | |
| JP3349919B2 (ja) | 半導体製造プロセス用空気浄化装置 | |
| KR102846636B1 (ko) | 방화문의 개폐 각도에 따른 제연설비의 성능 실험방법 | |
| JPS6311536Y2 (cs) | ||
| KR900016697A (ko) | 공기조화장치 | |
| JPH0720488Y2 (ja) | 空調装置 | |
| JPH0693776A (ja) | 区画の室出入口開閉装置 | |
| JPH0536399Y2 (cs) | ||
| JPH0468578B2 (cs) | ||
| JPH08247888A (ja) | 圧力洩れ測定方法 | |
| CN211551963U (zh) | 新风机 | |
| FR2341732A1 (fr) | Volet anti-souffle a fermeture et ouverture automatiques | |
| JPH11319126A (ja) | 附室を備えた建築物における防火方法およびその装置 | |
| JPS5927140A (ja) | 建屋内圧力制御システム | |
| JPS5819353Y2 (ja) | 容積形回転圧縮機の容量調整装置 | |
| JPH01239751A (ja) | 真空装置における排気系 | |
| KR20030049505A (ko) | 차량 환기장치의 배출챔버 | |
| JPH0343577B2 (cs) | ||
| SE9402404L (sv) | Ventilsystem för ett utrymme som står under vakuum |