Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP1986144149UpriorityCriticalpatent/JPH0336520Y2/ja
Publication of JPS6350878UpublicationCriticalpatent/JPS6350878U/ja
Application grantedgrantedCritical
Publication of JPH0336520Y2publicationCriticalpatent/JPH0336520Y2/ja
Gas pressure and electron density at the level of the active zone of hollow cathode arc discharges(Hollow cathode arc discharge parameters at active zone level, examining gas pressure and electron density)