JPH0336381U - - Google Patents

Info

Publication number
JPH0336381U
JPH0336381U JP1989096296U JP9629689U JPH0336381U JP H0336381 U JPH0336381 U JP H0336381U JP 1989096296 U JP1989096296 U JP 1989096296U JP 9629689 U JP9629689 U JP 9629689U JP H0336381 U JPH0336381 U JP H0336381U
Authority
JP
Japan
Prior art keywords
workpiece
light
irradiation light
irradiation
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989096296U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989096296U priority Critical patent/JPH0336381U/ja
Publication of JPH0336381U publication Critical patent/JPH0336381U/ja
Pending legal-status Critical Current

Links

JP1989096296U 1989-08-17 1989-08-17 Pending JPH0336381U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989096296U JPH0336381U (de) 1989-08-17 1989-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989096296U JPH0336381U (de) 1989-08-17 1989-08-17

Publications (1)

Publication Number Publication Date
JPH0336381U true JPH0336381U (de) 1991-04-09

Family

ID=31645508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989096296U Pending JPH0336381U (de) 1989-08-17 1989-08-17

Country Status (1)

Country Link
JP (1) JPH0336381U (de)

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