JPS6281005U - - Google Patents
Info
- Publication number
- JPS6281005U JPS6281005U JP17208885U JP17208885U JPS6281005U JP S6281005 U JPS6281005 U JP S6281005U JP 17208885 U JP17208885 U JP 17208885U JP 17208885 U JP17208885 U JP 17208885U JP S6281005 U JPS6281005 U JP S6281005U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- inclination
- moving table
- interferometer
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17208885U JPS6281005U (de) | 1985-11-08 | 1985-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17208885U JPS6281005U (de) | 1985-11-08 | 1985-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6281005U true JPS6281005U (de) | 1987-05-23 |
Family
ID=31108313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17208885U Pending JPS6281005U (de) | 1985-11-08 | 1985-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6281005U (de) |
-
1985
- 1985-11-08 JP JP17208885U patent/JPS6281005U/ja active Pending
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