JPH0336381U - - Google Patents
Info
- Publication number
- JPH0336381U JPH0336381U JP1989096296U JP9629689U JPH0336381U JP H0336381 U JPH0336381 U JP H0336381U JP 1989096296 U JP1989096296 U JP 1989096296U JP 9629689 U JP9629689 U JP 9629689U JP H0336381 U JPH0336381 U JP H0336381U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- light
- irradiation light
- irradiation
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000003550 marker Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す構成図、第２
図は本考案の一実施例によるワークの位置ずれ量
の測定方法を示す図、第３図は本考案の一実施例
を用いた近接センサ用トリミング装置を示す概念
図、第４図は本考案の一実施例を用いたレーザマ
ーカを示す概念図である。
主要部分の符号の説明、１……Ｈｅ−Ｎｅレー
ザ、２，６……キヤリア、３，７……ワーク、４
……受光部。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure shows a method for measuring the amount of positional deviation of a workpiece according to an embodiment of the present invention, FIG. 3 is a conceptual diagram showing a trimming device for a proximity sensor using an embodiment of the present invention, and FIG. 4 shows a method according to the present invention. FIG. 2 is a conceptual diagram showing a laser marker using one embodiment of the present invention. Explanation of symbols of main parts, 1...He-Ne laser, 2, 6...Carrier, 3, 7...Work, 4
……Light receiving section.
Claims (1)
加工位置に搬送された被加工物をレーザ光により
加工するレーザ加工装置であつて、前記加工位置
直前で前記被加工物に対して所定角度から照射光
を照射する照射手段と、前記被加工物から反射さ
れた前記照射光の光路上に設けられ、前記照射光
を受光する受光手段とを有し、前記受光手段にお
ける前記照射光の受光位置により予め設定された
基準位置に対する前記被加工物の位置ずれ量を算
出するようにしたことを特徴とするレーザ加工装
置。 A laser processing device that processes a workpiece placed on a stage and transported to a processing position by movement of the stage using a laser beam, wherein the workpiece is The irradiation light in the light reception means includes an irradiation means that irradiates the irradiation light from a predetermined angle, and a light reception means that is provided on the optical path of the irradiation light reflected from the workpiece and receives the irradiation light. A laser processing apparatus characterized in that a positional shift amount of the workpiece with respect to a preset reference position is calculated based on a light receiving position of the workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989096296U JPH0336381U (en) | 1989-08-17 | 1989-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989096296U JPH0336381U (en) | 1989-08-17 | 1989-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0336381U true JPH0336381U (en) | 1991-04-09 |
Family
ID=31645508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989096296U Pending JPH0336381U (en) | 1989-08-17 | 1989-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336381U (en) |
-
1989
- 1989-08-17 JP JP1989096296U patent/JPH0336381U/ja active Pending
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