JPH0335376Y2 - - Google Patents
Info
- Publication number
- JPH0335376Y2 JPH0335376Y2 JP9942683U JP9942683U JPH0335376Y2 JP H0335376 Y2 JPH0335376 Y2 JP H0335376Y2 JP 9942683 U JP9942683 U JP 9942683U JP 9942683 U JP9942683 U JP 9942683U JP H0335376 Y2 JPH0335376 Y2 JP H0335376Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- vapor
- pipe
- carrier gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012159 carrier gas Substances 0.000 claims description 73
- 239000002994 raw material Substances 0.000 claims description 72
- 239000007789 gas Substances 0.000 claims description 70
- 239000007788 liquid Substances 0.000 claims description 68
- 238000010790 dilution Methods 0.000 claims description 16
- 239000012895 dilution Substances 0.000 claims description 16
- 238000000605 extraction Methods 0.000 claims description 6
- OTRPZROOJRIMKW-UHFFFAOYSA-N triethylindigane Chemical compound CC[In](CC)CC OTRPZROOJRIMKW-UHFFFAOYSA-N 0.000 description 21
- 239000003085 diluting agent Substances 0.000 description 10
- 229920006395 saturated elastomer Polymers 0.000 description 9
- 239000001257 hydrogen Substances 0.000 description 8
- 229910052739 hydrogen Inorganic materials 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 238000007664 blowing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9942683U JPS609536U (ja) | 1983-06-29 | 1983-06-29 | 原料ガス発生・供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9942683U JPS609536U (ja) | 1983-06-29 | 1983-06-29 | 原料ガス発生・供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS609536U JPS609536U (ja) | 1985-01-23 |
| JPH0335376Y2 true JPH0335376Y2 (enrdf_load_html_response) | 1991-07-26 |
Family
ID=30235627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9942683U Granted JPS609536U (ja) | 1983-06-29 | 1983-06-29 | 原料ガス発生・供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS609536U (enrdf_load_html_response) |
-
1983
- 1983-06-29 JP JP9942683U patent/JPS609536U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS609536U (ja) | 1985-01-23 |
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