JPH0142739B2 - - Google Patents
Info
- Publication number
- JPH0142739B2 JPH0142739B2 JP10371284A JP10371284A JPH0142739B2 JP H0142739 B2 JPH0142739 B2 JP H0142739B2 JP 10371284 A JP10371284 A JP 10371284A JP 10371284 A JP10371284 A JP 10371284A JP H0142739 B2 JPH0142739 B2 JP H0142739B2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- condenser
- pipe
- mixed gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 120
- 239000002994 raw material Substances 0.000 claims description 95
- 239000007788 liquid Substances 0.000 claims description 75
- 238000004804 winding Methods 0.000 claims description 40
- 230000005587 bubbling Effects 0.000 claims description 34
- 239000012159 carrier gas Substances 0.000 claims description 31
- 229920006395 saturated elastomer Polymers 0.000 claims description 15
- 239000003990 capacitor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000005484 gravity Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/008—Feed or outlet control devices
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10371284A JPS60248228A (ja) | 1984-05-24 | 1984-05-24 | バブリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10371284A JPS60248228A (ja) | 1984-05-24 | 1984-05-24 | バブリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60248228A JPS60248228A (ja) | 1985-12-07 |
| JPH0142739B2 true JPH0142739B2 (enrdf_load_html_response) | 1989-09-14 |
Family
ID=14361329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10371284A Granted JPS60248228A (ja) | 1984-05-24 | 1984-05-24 | バブリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60248228A (enrdf_load_html_response) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61257232A (ja) * | 1985-05-08 | 1986-11-14 | Nippon Tairan Kk | 液体材料ガス発生方法 |
| JPH0621740U (ja) * | 1992-08-21 | 1994-03-22 | 徳山曹達株式会社 | 混合ガスモノマー供給装置 |
| JPH06196419A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 化学気相堆積装置及びそれによる半導体装置の製造方法 |
| JP2996101B2 (ja) | 1994-08-05 | 1999-12-27 | 信越半導体株式会社 | 液体原料ガスの供給方法および装置 |
| JP2969101B2 (ja) * | 1998-03-27 | 1999-11-02 | アプリオリ株式会社 | バブリング装置に用いるコンデンサ |
| KR100990792B1 (ko) * | 2003-05-02 | 2010-10-29 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 다공질 유리 모재 원료 가스의 공급 장치 |
-
1984
- 1984-05-24 JP JP10371284A patent/JPS60248228A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60248228A (ja) | 1985-12-07 |
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