JPH0334827B2 - - Google Patents
Info
- Publication number
- JPH0334827B2 JPH0334827B2 JP59103030A JP10303084A JPH0334827B2 JP H0334827 B2 JPH0334827 B2 JP H0334827B2 JP 59103030 A JP59103030 A JP 59103030A JP 10303084 A JP10303084 A JP 10303084A JP H0334827 B2 JPH0334827 B2 JP H0334827B2
- Authority
- JP
- Japan
- Prior art keywords
- flow velocity
- semiconductor
- temperature
- fluid
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 28
- 239000012530 fluid Substances 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 238000009529 body temperature measurement Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 6
- 230000020169 heat generation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Fluid Mechanics (AREA)
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59103030A JPS60247171A (ja) | 1984-05-22 | 1984-05-22 | 半導体流速検出器 |
US06/733,796 US4637253A (en) | 1984-05-22 | 1985-05-14 | Semiconductor flow detector for detecting the flow rate and flowing direction of fluid |
DE19853518409 DE3518409A1 (de) | 1984-05-22 | 1985-05-22 | Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59103030A JPS60247171A (ja) | 1984-05-22 | 1984-05-22 | 半導体流速検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60247171A JPS60247171A (ja) | 1985-12-06 |
JPH0334827B2 true JPH0334827B2 (no) | 1991-05-24 |
Family
ID=14343250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59103030A Granted JPS60247171A (ja) | 1984-05-22 | 1984-05-22 | 半導体流速検出器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60247171A (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016011948A (ja) * | 2014-06-03 | 2016-01-21 | 株式会社デンソー | 風向計、風向風量計および移動方向測定計 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006319153A (ja) * | 2005-05-13 | 2006-11-24 | Sony Corp | 半導体集積回路及びその制御方法 |
RU178345U1 (ru) * | 2017-07-31 | 2018-03-30 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" | Устройство определения бокового потока и направления движения флюида в скважине |
RU177768U1 (ru) * | 2017-07-31 | 2018-03-12 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" | Датчик бокового потока и направления движения флюида в скважине |
JP2020016465A (ja) * | 2018-07-23 | 2020-01-30 | ミネベアミツミ株式会社 | 流体センサ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5343574A (en) * | 1976-10-01 | 1978-04-19 | Rion Co | Thermal flow meter |
JPS55103466A (en) * | 1979-02-01 | 1980-08-07 | Nippon Denso Co Ltd | Semiconductor device for flow speed electric conversion |
JPS56143915A (en) * | 1980-04-11 | 1981-11-10 | Nippon Soken Inc | Measuring device for gas flow rate |
-
1984
- 1984-05-22 JP JP59103030A patent/JPS60247171A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5343574A (en) * | 1976-10-01 | 1978-04-19 | Rion Co | Thermal flow meter |
JPS55103466A (en) * | 1979-02-01 | 1980-08-07 | Nippon Denso Co Ltd | Semiconductor device for flow speed electric conversion |
JPS56143915A (en) * | 1980-04-11 | 1981-11-10 | Nippon Soken Inc | Measuring device for gas flow rate |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016011948A (ja) * | 2014-06-03 | 2016-01-21 | 株式会社デンソー | 風向計、風向風量計および移動方向測定計 |
Also Published As
Publication number | Publication date |
---|---|
JPS60247171A (ja) | 1985-12-06 |
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