JPH0334653Y2 - - Google Patents
Info
- Publication number
- JPH0334653Y2 JPH0334653Y2 JP10734686U JP10734686U JPH0334653Y2 JP H0334653 Y2 JPH0334653 Y2 JP H0334653Y2 JP 10734686 U JP10734686 U JP 10734686U JP 10734686 U JP10734686 U JP 10734686U JP H0334653 Y2 JPH0334653 Y2 JP H0334653Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- measured
- fluid
- temperature sensor
- flow tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 210000005239 tubule Anatomy 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10734686U JPH0334653Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10734686U JPH0334653Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6314119U JPS6314119U (enrdf_load_stackoverflow) | 1988-01-29 |
| JPH0334653Y2 true JPH0334653Y2 (enrdf_load_stackoverflow) | 1991-07-23 |
Family
ID=30983545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10734686U Expired JPH0334653Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334653Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-07-11 JP JP10734686U patent/JPH0334653Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6314119U (enrdf_load_stackoverflow) | 1988-01-29 |
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