JPH0334563B2 - - Google Patents

Info

Publication number
JPH0334563B2
JPH0334563B2 JP8854783A JP8854783A JPH0334563B2 JP H0334563 B2 JPH0334563 B2 JP H0334563B2 JP 8854783 A JP8854783 A JP 8854783A JP 8854783 A JP8854783 A JP 8854783A JP H0334563 B2 JPH0334563 B2 JP H0334563B2
Authority
JP
Japan
Prior art keywords
spot light
reflecting mirror
scanning
lens
spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8854783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59212703A (ja
Inventor
Seiichiro Tamai
Yoshikazu Yokose
Masao Murata
Keiichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8854783A priority Critical patent/JPS59212703A/ja
Publication of JPS59212703A publication Critical patent/JPS59212703A/ja
Publication of JPH0334563B2 publication Critical patent/JPH0334563B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP8854783A 1983-05-19 1983-05-19 スポツト光位置検出装置 Granted JPS59212703A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8854783A JPS59212703A (ja) 1983-05-19 1983-05-19 スポツト光位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8854783A JPS59212703A (ja) 1983-05-19 1983-05-19 スポツト光位置検出装置

Publications (2)

Publication Number Publication Date
JPS59212703A JPS59212703A (ja) 1984-12-01
JPH0334563B2 true JPH0334563B2 (US07118763-20061010-C00002.png) 1991-05-23

Family

ID=13945876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8854783A Granted JPS59212703A (ja) 1983-05-19 1983-05-19 スポツト光位置検出装置

Country Status (1)

Country Link
JP (1) JPS59212703A (US07118763-20061010-C00002.png)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4709156A (en) * 1985-11-27 1987-11-24 Ex-Cell-O Corporation Method and apparatus for inspecting a surface
JPH071165B2 (ja) * 1986-01-24 1995-01-11 エヌ・ティ・ティ・アドバンステクノロジ株式会社 光ビ−ムを用いた視覚センサ
JPS6474405A (en) * 1987-09-16 1989-03-20 Toyota Motor Corp Method for measuring work gap at the time of arc welding
DE69223544T2 (de) * 1991-04-26 1998-07-09 Nippon Telegraph & Telephone Verfahren und Vorrichtung zum Messen des Profils eines Objekts

Also Published As

Publication number Publication date
JPS59212703A (ja) 1984-12-01

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