JPH0334511A - Manufacture of film capacitor - Google Patents
Manufacture of film capacitorInfo
- Publication number
- JPH0334511A JPH0334511A JP1170183A JP17018389A JPH0334511A JP H0334511 A JPH0334511 A JP H0334511A JP 1170183 A JP1170183 A JP 1170183A JP 17018389 A JP17018389 A JP 17018389A JP H0334511 A JPH0334511 A JP H0334511A
- Authority
- JP
- Japan
- Prior art keywords
- face
- chemically
- dielectric
- film capacitor
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000011368 organic material Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000004804 winding Methods 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 34
- 239000011104 metalized film Substances 0.000 abstract description 20
- 239000002994 raw material Substances 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 238000000605 extraction Methods 0.000 abstract 2
- 208000027418 Wounds and injury Diseases 0.000 description 18
- 239000004744 fabric Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 2
- 150000002926 oxygen Chemical class 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 208000004221 Multiple Trauma Diseases 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、電子機器、電気機器に用いられるコンデンサ
、中でも金属化フィルムコンデンサの製造方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing capacitors used in electronic and electrical equipment, particularly metallized film capacitors.
従来の技術
近年、電子機器、電気機器の多機能化、小型化の取り組
みが盛んであり、これに用いられるフィルムコンデンサ
も益々小型化を要求されている。2. Description of the Related Art In recent years, efforts have been made to make electronic devices and electrical devices more multifunctional and smaller, and the film capacitors used in these devices are also required to be smaller.
以下、図面を参照しながら、従来のフィルムコンデンサ
の製造方法の一例について説明する。An example of a conventional film capacitor manufacturing method will be described below with reference to the drawings.
第6図は従来の巻回型フィルムコンデンサ素子の代表的
な形成方法を示す。FIG. 6 shows a typical method of forming a conventional wound film capacitor element.
図において、19と2Oは、いずれも片面金属化フィル
ムである。この19と2Oを同時に巻回することによっ
て(21)、巻回型フイルムコンデンサ素子22ができ
上がる。In the figure, 19 and 2O are both single-sided metallized films. By simultaneously winding 19 and 2O (21), a wound film capacitor element 22 is completed.
従来、巻回型フイルムコンデンサ素子22の端面には電
極金属を形成する為に、フィルム幅方向(現在最小で0
.2M程度)に交互にずらせた状態で巻き取り、端面電
極を形成すべき端面に間隔をもうけていた。また、交互
にずらせる為に、第6図に示すように、1個のフィルム
コンデンサ素子を形成するのに19.2Oのそれぞれ1
対の原反が必要であった。Conventionally, in order to form electrode metal on the end face of the wound film capacitor element 22, the width direction of the film (currently at least 0
.. The wires were wound with alternating shifts of about 2M), and a gap was provided on the end face where the end face electrode was to be formed. In addition, in order to alternately shift the film capacitor element, as shown in FIG.
A pair of original fabrics was required.
発明が解決しようとする課題
しかしながら、上述のような構成では、広幅の原反を、
19.2Oのようにコンデンサ素子1個分幅に精度よく
スリットする必要がある上、第6図のようにずらし巻き
が精度よく行わなければならない。Problems to be Solved by the Invention However, with the above-mentioned configuration, it is difficult to
It is necessary to accurately slit the width of one capacitor element as shown in 19.2O, and it is also necessary to perform staggered winding with accuracy as shown in FIG.
このような方法では、広幅の原反を細幅にスリットする
必要があること、装置コストが高いこと、巻取りに高い
精度が必要であること、ずらし巻きのためにフィルムコ
ンデンサの小型化が図りにくいことなどの問題があった
。With this method, it is necessary to slit a wide raw material into narrow widths, the equipment cost is high, high precision is required for winding, and the film capacitor is made smaller due to staggered winding. There were some problems, such as difficulty.
本発明は上記従来の方法にあった課題に鑑み、有機材料
からなる誘電体と電極とを多重に交互に重ね合わせた巻
回型、もしくは積層型のフィルムコンデンサを形成する
に際し、1枚の広幅の原反を巻取りながら、もしくは1
対の広幅の原反を巻き取りながら複数個のコンデンサ素
子を提供するものである。In view of the above-mentioned problems with the conventional methods, the present invention provides a method for forming a wound or laminated film capacitor in which dielectrics made of organic materials and electrodes are stacked alternately in multiple layers. While winding up the original fabric, or 1
A plurality of capacitor elements are provided by winding up pairs of wide original fabrics.
課題を解決するための手段
上記課題を解決するために、本発明は、1枚の広幅の金
属化有機材料を1枚、もしくは非金属化有機材料と重ね
合わせながら2枚同時に、あるいは2枚の金属化有機材
料を2枚重ね合わせ、幅方向の間隔が1個分のコンデン
サに相当する間隔でスリットしながら巻取り、複数の巻
回型もしくは積層型フィルムコンデンサを形成し各々の
電極端面を有機材料と反応性の高いガスを接触させ、各
々の端面側部分を化学的に選択的除去した後に端面電極
を形成するものである。Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a single wide sheet of metallized organic material, or two sheets of non-metallized organic material at the same time, or two sheets of wide metallized organic material. Two sheets of metallized organic material are stacked and rolled up while slitting them at widthwise intervals equivalent to one capacitor to form multiple wound or laminated film capacitors. The end electrodes are formed by bringing the material into contact with a highly reactive gas and chemically selectively removing the end surface side portions of each material.
作用
この製造方法により、広幅の原反から複数のフィルムコ
ンデンサを形成することができ、ずらし巻きを行う必要
もなく高い精度で巻取り、かつ、端面電極の十分名付着
強度を得る。Function: By this manufacturing method, it is possible to form a plurality of film capacitors from a wide raw material, and it is possible to wind with high accuracy without the need for staggered winding, and to obtain sufficient adhesion strength of the end electrodes.
実施例
以下、本発明のフィルムコンデンサとその製造方法につ
いて、実施例にもとづいて説明する。EXAMPLES Hereinafter, the film capacitor of the present invention and its manufacturing method will be explained based on examples.
実施例1
第1図fa)は本発明の第1の実施例である巻回型フィ
ルムコンデンサの製造工程の巻取り部を示す。Embodiment 1 FIG. 1 fa) shows the winding part of the manufacturing process of a wound film capacitor according to the first embodiment of the present invention.
図において、1は片面金属化フィルム、2はスリット刃
、3は巻回型の巻取り部、4は巻回型フイルムコンデン
サ素子である。In the figure, 1 is a metalized film on one side, 2 is a slitting blade, 3 is a winding section, and 4 is a winding film capacitor element.
本実施例において、広幅の片面金属化フィルム1はコン
デンサ素子1個分の間隔でマージン(非金属化部)が形
成されており、マージンの横をスリット刃2によってコ
ンデンサ素子41個分の間隔でスリットしながら巻取る
。In this embodiment, a wide single-sided metallized film 1 has margins (non-metalized parts) formed at intervals of one capacitor element, and the sides of the margins are cut by a slit blade 2 at intervals of 41 capacitor elements. Wind it up while slitting it.
また、第1図(blは、広幅の片面金属化フィルムlを
平板のボビン6に積層巻取りをおこなっているものを示
す。第1図tb+においても第1図fatと同様、広幅
の片面金属化フィルム1はコンデンサ素子71個分の間
隔でマージンが形成されており、マージンの横をスリッ
ト刃2によってコンデンサ素子71個分の間隔でスリッ
トしながら巻取る。In addition, Fig. 1 (bl shows a wide single-sided metallized film l laminated and wound around a flat bobbin 6. In Fig. 1 tb+, as in Fig. 1 The film 1 has margins formed at intervals of 71 capacitor elements, and is rolled up while slitting the margins by a slit blade 2 at intervals of 71 capacitor elements.
なおこのとき、第1図(a)及び(blのマージンは、
第3図(a)に示されるように1層毎に位置を切り替え
られ対向部(容量に寄与する部分)を形成する。At this time, the margins in Figure 1 (a) and (bl) are
As shown in FIG. 3(a), the positions are switched layer by layer to form opposing portions (portions contributing to capacitance).
第1図fat及び(blによって巻取られたコンデンサ
素子4.7は第2図に示されるように矢印の方向8.9
から電極引き出し端面側部分を化学的に選択的除去され
る。この選択的除去の様子を第3図に示す。The capacitor element 4.7 wound by fat and (bl in FIG. 1) is shown in the direction of the arrow 8.9 in FIG.
The end surface side portion of the electrode is selectively removed chemically. This selective removal is shown in FIG.
第3図(a)は前述した巻回、もしくは積層されたコン
デンサ素子4,7の層間断面を示す。ここで、10はフ
ィルム(有機材料)、11は蒸着アルミ(金属化部)、
12はマージン(非金属化部)を示す。、この第3図f
atに示される構造をもつコンデンサ素子は、第3図(
blに示されるようにフィルム(有機材料)のみを化学
的に選択的除去される。FIG. 3(a) shows an interlayer cross section of the above-mentioned wound or laminated capacitor elements 4 and 7. Here, 10 is a film (organic material), 11 is evaporated aluminum (metalized part),
12 indicates a margin (non-metalized part). , this Figure 3 f
A capacitor element having the structure shown at is shown in Fig. 3 (
As shown in bl, only the film (organic material) is selectively removed chemically.
ここで、13は化学的に選択的除去されたフィルム(有
機材料)であり、蒸着アルミ11(金属化部)は除去さ
れることなく露出した状態となる。Here, 13 is a film (organic material) that has been selectively removed chemically, and the vapor-deposited aluminum 11 (metalized portion) is not removed and is exposed.
この化学的に選択的除去された端面に端面電極を形成す
ると第3図(C1のようになる。14は溶射された黄銅
粒子であり、1個のコンデンサができ上がる。When an end face electrode is formed on the chemically selectively removed end face, it becomes as shown in FIG. 3 (C1). 14 is a sprayed brass particle, and one capacitor is completed.
なお、上記の有機材料の化学的選択的除去方法として、
酸素プラズマ処理装置が用いられる。この酸素プラズマ
処理装置によって、第3図(alの電極引き出しをすべ
き端面を酸素ガスプラズマに接触させ第3図(blに示
すように、電極引き出し端面側部分の有機材料のみを化
学的に選択的除去する。In addition, as a chemical selective removal method for the above organic materials,
An oxygen plasma treatment device is used. By using this oxygen plasma treatment device, the end face of the electrode (al) where the electrode is to be drawn out is brought into contact with oxygen gas plasma, and only the organic material on the side of the end face where the electrode is drawn out is chemically selected, as shown in figure 3 (bl). remove target.
この酸素プラズマ処理装置によるエツチング条件は、酸
素流量608CCM、圧力1 、 Q Torr、高周
波電力400Wとした。The etching conditions using this oxygen plasma processing apparatus were an oxygen flow rate of 608 CCM, a pressure of 1, Q Torr, and a high frequency power of 400 W.
酸素プラズマによる有機物フィルムの除去刃、有機物フ
ィルムのC−C,C−H,C−8などの結合を酸素プラ
ズマ中の酸素ラジカルが攻撃し、有機物がCO2,H2
OやSO2などのガスとなり、それが排出されることに
より行われる。The blade for removing organic film using oxygen plasma, the oxygen radicals in the oxygen plasma attack the bonds such as C-C, C-H, and C-8 in the organic film, and the organic matter becomes CO2, H2.
This is done by turning into gases such as O and SO2 and exhausting them.
また、金属化フィルムの巻回体もしくは積層体の端面電
極側部分のフィルムを上記方法により化学的に選択的除
去すると、巻回時もしくは積層時に微小な隙間があ−る
金属化フィルムの非金属化側の方が、それがない金属化
部側の部分よりも優先的に除去されるため、各フィルム
の端面がテーパー状に加工されることが予想される。In addition, if the film on the end face electrode side of the rolled or laminated body of metallized film is chemically removed by the above method, non-metallic parts of the metalized film that have minute gaps during winding or lamination can be removed. Since the metallized side is removed preferentially than the metallized side, it is expected that the end face of each film will be processed into a tapered shape.
実施例2 次に、本発明の第2の実施例について説明する。Example 2 Next, a second embodiment of the present invention will be described.
第4図は本発明の第2の実施例である巻回型フイルムコ
ンデンサの製造工程の巻取り部を示す。FIG. 4 shows a winding section in the manufacturing process of a wound type film capacitor according to a second embodiment of the present invention.
図において、15と16はいずれも片面金属化フィルム
か、もしくは両面金属化フィルムと非金属化フィルムの
組み合わせである。In the figure, both 15 and 16 are single-sided metalized films or a combination of double-sided metalized films and non-metalized films.
ここでは、15と16いずれも片面金属化フィルムであ
った場合について説明する。15と16いずれの片面金
属化フィルムもコンデンサ素子1個分の間隔でマージン
(非金属化部)が形成されており、マージン横をスリッ
ト刃2によってコンデンサ素子1個分の間隔でスリット
しながら2枚重ね合わせて巻取る。Here, the case where both 15 and 16 are metalized films on one side will be explained. Both single-sided metallized films 15 and 16 have margins (non-metalized parts) formed at intervals of one capacitor element, and while slitting the side of the margin at intervals of one capacitor element with a slit blade 2, Stack the sheets and roll them up.
第4図によって巻取られたコンデンサ素子17は実施例
1と同様に電極引き出し端面側部分を化学的に選択的除
去される。さらに、この選択的除去の様子も実施例1と
同様に第3図(al〜(C)に示されるとおりであり、
有機材料の化学的な選択的除去方法である酸素プラズマ
処理についても実施例1と同様である。The capacitor element 17 wound up as shown in FIG. 4 is chemically and selectively removed from the end surface side portion where the electrodes are drawn out, as in the first embodiment. Furthermore, the state of this selective removal is also as shown in FIGS.
The oxygen plasma treatment, which is a chemical selective removal method for organic materials, is also the same as in Example 1.
実施例1と同様、この方法によれば、広幅の原反から高
い精度で巻取られた複数のコンデンサ素子を得ることが
できる。Similar to Example 1, according to this method, it is possible to obtain a plurality of capacitor elements wound with high precision from a wide original fabric.
なお、上記のコンデンサの製造方法は第4図において1
5と16が、両面金属化フィルムと非金属化フィルムと
の組み合わせであっても同様である。The manufacturing method of the above capacitor is shown in 1 in Fig. 4.
The same applies even if 5 and 16 are a combination of a double-sided metallized film and a non-metalized film.
また、上記のコンデンサの製造方法は、第5図に示すよ
うな積層型のフィルムコンデンサの製造工程についても
同様である。Further, the above method for manufacturing a capacitor is also applicable to the manufacturing process for a laminated film capacitor as shown in FIG.
発明の効果
以上のように本発明はフィルムコンデンサ素子を広幅の
原反から、コンデンサ素子1個分の幅でスリットしなが
ら精度よく巻取りフィルムコンデンサ素子を形成した後
、この電極引き出し端面を有機材料と反応性のガスを少
なくとも含むガスに接触させ、誘電体の電極引き出し端
面側部分を化学的に選択的除去を施し、電極を前記端面
より露出させ、電極と端面電極との良好な電気的な接触
と、端面電極の十分な付着強度を得ることができ、特性
の勝れた巻回型あるいは積層型フィルムコンデンサを量
産性よく生産することができる。Effects of the Invention As described above, the present invention involves forming a film capacitor element by accurately winding a film capacitor element from a wide raw material while slitting it to the width of one capacitor element, and then coating the end face of the electrode with an organic material. The dielectric is brought into contact with a gas containing at least a reactive gas, and the portion of the dielectric on the side of the electrode lead-out end surface is chemically and selectively removed to expose the electrode from the end surface, thereby establishing good electrical connection between the electrode and the end surface electrode. It is possible to obtain sufficient contact and adhesion strength of the end electrodes, and to mass-produce wound-type or laminated-type film capacitors with excellent characteristics.
第1図(al、 (b)は本発明の第1の実施例におけ
る巻回型及び積層型フィルムコンデンサの製造方法の工
程の主要部分を示す図、第2図は第1図によって巻取ら
れたフィルムコンデンサ素子の有機材料の化学的な選択
的除去方向を示す図、第3図はコンデンサ素子の誘電体
の電極引き出し端面側部分を化学的に選択的除去する様
子を、コンデンサ素子の断面で示した図、第4図は2枚
の金属化フィルム、もしくは1枚の金属化フィルムと1
枚の非金属化フィルムをコンデンサ1個分の幅でスリッ
トしながら、重ね合わせながら巻取り、巻回型フィルム
コンデンサを製造する工程を示す図、第5図は第4図同
様、積層型フィルムコンデンサを製造する工程を示す図
、第6図は従来の巻回型フイルムコンデンサの代表的な
製造工程を示す図である。
1・・・・・・金属化フィルム、2・・・・・・スリッ
ト刃、3・・・・・・巻回型巻取部、4・・・・・・巻
回フィルムコンデンサ素子、5・・・・・・積層型巻取
部、6・・・・・・平板ボビン、7・・・・・・積層型
フィルムコンデンサ素子。FIGS. 1(al) and (b) are diagrams showing the main parts of the process for manufacturing a wound type and laminated film capacitor in the first embodiment of the present invention, and FIG. Figure 3 is a cross-sectional view of a capacitor element showing the selective chemical removal of the electrode lead-out end face side of the dielectric of a capacitor element. The diagram shown, Figure 4, shows two metallized films or one metallized film and one metallized film.
Figure 5 shows the process of manufacturing a wound film capacitor by slitting sheets of non-metalized film to the width of one capacitor and rolling them up while stacking them. FIG. 6 is a diagram showing a typical manufacturing process of a conventional wound film capacitor. DESCRIPTION OF SYMBOLS 1...Metalized film, 2...Slit blade, 3...Wound type winding part, 4...Wound film capacitor element, 5... . . . Laminated winding section, 6 . . . Flat bobbin, 7 . . . Laminated film capacitor element.
Claims (8)
金属化有機材料と重ね合わせながら2枚同時に幅方向の
間隔が1個分のコンデンサに相当する間隔でスリットし
ながら巻取り、複数の電極と、前記電極間に少なくとも
1層以上の誘電体とを形成する積層物あるいは巻回物を
形成する工程と、前記積層物あるいは巻回物の端面の揃
った電極引き出し端面を有機材料と反応性のガスを少な
くとも含むガスに接触させ、前記誘電体の前記電極引き
出し端面側部分を化学的に除去した後に、端面電極を形
成する工程とを具備することを特徴とするフィルムコン
デンサの製造方法。(1) One sheet of wide metallized organic material is rolled up, or two sheets are simultaneously slit while being overlapped with a non-metalized organic material at intervals corresponding to one capacitor in the width direction; A step of forming a laminate or a wound product comprising a plurality of electrodes and at least one layer of dielectric material between the electrodes, and forming an electrode lead-out end surface with aligned end surfaces of the laminate or the wound material using an organic material. manufacturing a film capacitor, comprising the step of contacting with a gas containing at least a reactive gas and chemically removing the electrode extension end face side portion of the dielectric, and then forming an end face electrode. Method.
の間隔が1個分のコンデンサに相当する間隔でスリット
しながら巻取り、複数の電極と、前記電極間に少なくと
も1層以上の誘電体とを形成する積層物あるいは巻回物
を形成する工程と、前記積層物あるいは巻回物の端面の
揃った電極引き出し端面を有機材料と反応性のガスを少
なくとも含むガスに接触させ、前記誘電体の前記電極引
き出し端面側部分を化学的に除去した後に、端面電極を
形成する工程とを具備することを特徴とするフィルムコ
ンデンサの製造方法。(2) Two sheets of wide metallized organic material are simultaneously rolled up while being slit at intervals corresponding to one capacitor in the width direction, and a plurality of electrodes are formed, and at least one layer is formed between the electrodes. a step of forming a laminate or a winding that forms a dielectric, and contacting an electrode lead-out end face of the laminate or winding, the end faces of which are aligned, with a gas containing at least a gas reactive with an organic material; A method for manufacturing a film capacitor, comprising the step of: forming an end electrode after chemically removing the electrode extension end surface side portion of the dielectric.
酸素を含むプラズマで化学的に選択的除去することを特
徴とする請求項1及び2記載のフィルムコンデンサの製
造方法。(3) The method for manufacturing a film capacitor according to Claims 1 and 2, characterized in that the portion on the side of the electrode extension end face of the dielectric is chemically and selectively removed using plasma containing at least oxygen.
ガスにCF_4、SF_6及びN_2Oのうち少なくと
も1種を添加したプラズマで化学的に選択的除去するこ
とを特徴とする請求項1及び2記載のフィルムコンデン
サの製造方法。(4) Claims 1 and 2 characterized in that the electrode extension end face side portion of the dielectric is chemically and selectively removed using plasma containing an oxygen-containing gas added with at least one of CF_4, SF_6, and N_2O. The method of manufacturing the film capacitor described.
酸素を含むプラズマから引き出した酸素ラジカルで化学
的に選択的除去することを特徴とする請求項1及び2記
載のフィルムコンデンサの製造方法。(5) The method for manufacturing a film capacitor according to Claims 1 and 2, characterized in that the portion on the side of the electrode extension end face of the dielectric is chemically and selectively removed using oxygen radicals extracted from plasma containing at least oxygen.
オゾンを含むガスで化学的に選択的除去することを特徴
とする請求項1及び2記載のフィルムコンデンサの製造
方法。(6) The method for manufacturing a film capacitor according to Claims 1 and 2, characterized in that the portion of the dielectric on the side of the electrode extension end surface is chemically and selectively removed using a gas containing at least ozone.
オゾンを含むガスにN_2Oを添加したガスで化学的に
選択的除去することを特徴とする請求項1及び2記載の
フィルムコンデンサの製造方法。(7) The method for manufacturing a film capacitor according to Claims 1 and 2, characterized in that the portion on the side of the electrode extension end face of the dielectric is chemically and selectively removed using a gas containing at least ozone with N_2O added thereto.
酸素もしくは水素を含むガスプラズマで化学的に選択的
除去することを特徴とする請求項1及び2記載のフィル
ムコンデンサの製造方法。(8) The method for manufacturing a film capacitor according to Claims 1 and 2, characterized in that the portion of the dielectric on the side of the electrode extension end surface is chemically and selectively removed using gas plasma containing at least oxygen or hydrogen.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1170183A JPH0334511A (en) | 1989-06-30 | 1989-06-30 | Manufacture of film capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1170183A JPH0334511A (en) | 1989-06-30 | 1989-06-30 | Manufacture of film capacitor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0334511A true JPH0334511A (en) | 1991-02-14 |
Family
ID=15900227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1170183A Pending JPH0334511A (en) | 1989-06-30 | 1989-06-30 | Manufacture of film capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0334511A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021062931A (en) * | 2019-10-10 | 2021-04-22 | 京セラ株式会社 | Device and method for producing laminate film |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59163826A (en) * | 1983-03-08 | 1984-09-14 | Toshiba Corp | Dry etching method |
JPS59165423A (en) * | 1983-03-11 | 1984-09-18 | Comput Basic Mach Technol Res Assoc | Tapered etching of organic resin film |
JPS6122612A (en) * | 1984-04-16 | 1986-01-31 | スペクトラム コントロール インコーポレーテツド | Method of treating edge of monolithic capacitor |
JPS62272539A (en) * | 1986-05-20 | 1987-11-26 | Fujitsu Ltd | Removing method for resist |
JPS6376311A (en) * | 1986-09-17 | 1988-04-06 | 松下電器産業株式会社 | Manufacture of metallized film capacitor |
JPS63262843A (en) * | 1987-04-20 | 1988-10-31 | Nec Corp | Gas plasma etching method |
-
1989
- 1989-06-30 JP JP1170183A patent/JPH0334511A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59163826A (en) * | 1983-03-08 | 1984-09-14 | Toshiba Corp | Dry etching method |
JPS59165423A (en) * | 1983-03-11 | 1984-09-18 | Comput Basic Mach Technol Res Assoc | Tapered etching of organic resin film |
JPS6122612A (en) * | 1984-04-16 | 1986-01-31 | スペクトラム コントロール インコーポレーテツド | Method of treating edge of monolithic capacitor |
JPS62272539A (en) * | 1986-05-20 | 1987-11-26 | Fujitsu Ltd | Removing method for resist |
JPS6376311A (en) * | 1986-09-17 | 1988-04-06 | 松下電器産業株式会社 | Manufacture of metallized film capacitor |
JPS63262843A (en) * | 1987-04-20 | 1988-10-31 | Nec Corp | Gas plasma etching method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021062931A (en) * | 2019-10-10 | 2021-04-22 | 京セラ株式会社 | Device and method for producing laminate film |
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