JPH0333221B2 - - Google Patents

Info

Publication number
JPH0333221B2
JPH0333221B2 JP58084183A JP8418383A JPH0333221B2 JP H0333221 B2 JPH0333221 B2 JP H0333221B2 JP 58084183 A JP58084183 A JP 58084183A JP 8418383 A JP8418383 A JP 8418383A JP H0333221 B2 JPH0333221 B2 JP H0333221B2
Authority
JP
Japan
Prior art keywords
laser beam
measured
change
thermal conductivity
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58084183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59210352A (ja
Inventor
Susumu Fujimori
Hironori Yamazaki
Yoshihiro Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8418383A priority Critical patent/JPS59210352A/ja
Publication of JPS59210352A publication Critical patent/JPS59210352A/ja
Publication of JPH0333221B2 publication Critical patent/JPH0333221B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
JP8418383A 1983-05-16 1983-05-16 熱伝導率測定法 Granted JPS59210352A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8418383A JPS59210352A (ja) 1983-05-16 1983-05-16 熱伝導率測定法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8418383A JPS59210352A (ja) 1983-05-16 1983-05-16 熱伝導率測定法

Publications (2)

Publication Number Publication Date
JPS59210352A JPS59210352A (ja) 1984-11-29
JPH0333221B2 true JPH0333221B2 (enrdf_load_html_response) 1991-05-16

Family

ID=13823363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8418383A Granted JPS59210352A (ja) 1983-05-16 1983-05-16 熱伝導率測定法

Country Status (1)

Country Link
JP (1) JPS59210352A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250652A (ja) * 1985-08-30 1987-03-05 Res Dev Corp Of Japan 熱拡散率の測定方法およびその測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313420Y2 (enrdf_load_html_response) * 1973-11-26 1978-04-11
JPS6020691B2 (ja) * 1977-01-12 1985-05-23 日本電信電話株式会社 微小温度検出方法
JPS5772052A (en) * 1980-10-24 1982-05-06 Nippon Telegr & Teleph Corp <Ntt> Measuring method for heat transmission factor of thin film

Also Published As

Publication number Publication date
JPS59210352A (ja) 1984-11-29

Similar Documents

Publication Publication Date Title
US6211961B1 (en) Optical method for the characterization of the electrical properties of semiconductors and insulating films
US6563591B2 (en) Optical method for the determination of grain orientation in films
US5748317A (en) Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector
US6208418B1 (en) Apparatus and method for measurement of the mechanical properties and electromigration of thin films
US6175416B1 (en) Optical stress generator and detector
Taketoshi et al. Observation of heat diffusion across submicrometer metal thin films using a picosecond thermoreflectance technique
Thomsen et al. Picosecond acoustics as a non-destructive tool for the characterization of very thin films
Welsch et al. Investigation of the absorption induced damage in ultraviolet dielectric thin films
JP2009526983A (ja) 基板上に構成された薄層材料を、能動的高温測定を使用して特性化する方法および装置
JP2008191123A (ja) 薄膜半導体の結晶性測定装置及びその方法
JP3252155B2 (ja) サーモリフレクタンス法による熱拡散率測定方法
CN114813580A (zh) 一种材料相变检测装置及方法
US20070024871A1 (en) Method and apparatus for measuring thickness of thin films via transient thermoreflectance
CN106441124A (zh) 基于激光感生热电电压的时间响应测量薄膜厚度的新方法
JP2007333640A (ja) 半導体電気特性の測定装置と測定方法
US4755049A (en) Method and apparatus for measuring the ion implant dosage in a semiconductor crystal
US20050002436A1 (en) Method for measuring thermophysical property of thin film and apparatus therefor
Dreyfus et al. Energy deposition at insulator surfaces below the ultraviolet photoablation threshold
JPH0333221B2 (enrdf_load_html_response)
Diez et al. Time-Resolved Reflectivity and Temperature Measurements During Laser Irradiation of Crystalline Silicon.
WO1999013318A1 (en) Optical method for the characterization of the electrical properties of semiconductors and insulating films
JP2006524813A (ja) 薄膜の評価方法
Trappe et al. Recrystallization dynamics of phase change optical disks with a nitrogen interface layer
JP2007170960A (ja) 熱弾性特性測定装置、熱弾性特性測定方法
JPH1038856A (ja) 光吸収率測定装置及び測定方法