JPH0333001Y2 - - Google Patents
Info
- Publication number
- JPH0333001Y2 JPH0333001Y2 JP7843684U JP7843684U JPH0333001Y2 JP H0333001 Y2 JPH0333001 Y2 JP H0333001Y2 JP 7843684 U JP7843684 U JP 7843684U JP 7843684 U JP7843684 U JP 7843684U JP H0333001 Y2 JPH0333001 Y2 JP H0333001Y2
- Authority
- JP
- Japan
- Prior art keywords
- data
- measurement data
- scanning point
- workpiece
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 54
- 230000007547 defect Effects 0.000 claims description 33
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 230000002950 deficient Effects 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7843684U JPS60189842U (ja) | 1984-05-28 | 1984-05-28 | 表面欠陥計測装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7843684U JPS60189842U (ja) | 1984-05-28 | 1984-05-28 | 表面欠陥計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60189842U JPS60189842U (ja) | 1985-12-16 |
| JPH0333001Y2 true JPH0333001Y2 (ru) | 1991-07-12 |
Family
ID=30622414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7843684U Granted JPS60189842U (ja) | 1984-05-28 | 1984-05-28 | 表面欠陥計測装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60189842U (ru) |
-
1984
- 1984-05-28 JP JP7843684U patent/JPS60189842U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60189842U (ja) | 1985-12-16 |
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