JPH0331674B2 - - Google Patents

Info

Publication number
JPH0331674B2
JPH0331674B2 JP23279885A JP23279885A JPH0331674B2 JP H0331674 B2 JPH0331674 B2 JP H0331674B2 JP 23279885 A JP23279885 A JP 23279885A JP 23279885 A JP23279885 A JP 23279885A JP H0331674 B2 JPH0331674 B2 JP H0331674B2
Authority
JP
Japan
Prior art keywords
molten metal
crucible
seed
single crystal
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23279885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6296389A (ja
Inventor
Yasuyuki Kasanami
Jukichi Horioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP23279885A priority Critical patent/JPS6296389A/ja
Publication of JPS6296389A publication Critical patent/JPS6296389A/ja
Publication of JPH0331674B2 publication Critical patent/JPH0331674B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP23279885A 1985-10-18 1985-10-18 単結晶製造装置 Granted JPS6296389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23279885A JPS6296389A (ja) 1985-10-18 1985-10-18 単結晶製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23279885A JPS6296389A (ja) 1985-10-18 1985-10-18 単結晶製造装置

Publications (2)

Publication Number Publication Date
JPS6296389A JPS6296389A (ja) 1987-05-02
JPH0331674B2 true JPH0331674B2 (enrdf_load_stackoverflow) 1991-05-08

Family

ID=16944921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23279885A Granted JPS6296389A (ja) 1985-10-18 1985-10-18 単結晶製造装置

Country Status (1)

Country Link
JP (1) JPS6296389A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11162975B1 (en) 2020-05-27 2021-11-02 Shimadzu Corporation Surface analyzer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2533864Y2 (ja) * 1994-04-28 1997-04-23 三菱マテリアル株式会社 単結晶引上装置
CN109610000B (zh) * 2019-02-19 2020-12-15 博兴战新产业发展有限公司 一种热场供热稳定的单晶炉
CN113502533B (zh) * 2021-09-09 2021-11-12 江苏矽时代材料科技有限公司 一种具有可控冷却装置的单晶硅直拉炉

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11162975B1 (en) 2020-05-27 2021-11-02 Shimadzu Corporation Surface analyzer

Also Published As

Publication number Publication date
JPS6296389A (ja) 1987-05-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term