JPH0331399Y2 - - Google Patents
Info
- Publication number
- JPH0331399Y2 JPH0331399Y2 JP9168786U JP9168786U JPH0331399Y2 JP H0331399 Y2 JPH0331399 Y2 JP H0331399Y2 JP 9168786 U JP9168786 U JP 9168786U JP 9168786 U JP9168786 U JP 9168786U JP H0331399 Y2 JPH0331399 Y2 JP H0331399Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- constant temperature
- clean
- cartridge filter
- plenum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007664 blowing Methods 0.000 claims description 13
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 239000003570 air Substances 0.000 description 46
- 238000004140 cleaning Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005057 refrigeration Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9168786U JPH0331399Y2 (enrdf_load_stackoverflow) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9168786U JPH0331399Y2 (enrdf_load_stackoverflow) | 1986-06-16 | 1986-06-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62202330U JPS62202330U (enrdf_load_stackoverflow) | 1987-12-23 |
| JPH0331399Y2 true JPH0331399Y2 (enrdf_load_stackoverflow) | 1991-07-03 |
Family
ID=30952700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9168786U Expired JPH0331399Y2 (enrdf_load_stackoverflow) | 1986-06-16 | 1986-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331399Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-06-16 JP JP9168786U patent/JPH0331399Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62202330U (enrdf_load_stackoverflow) | 1987-12-23 |
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