JPH0330432B2 - - Google Patents

Info

Publication number
JPH0330432B2
JPH0330432B2 JP57142285A JP14228582A JPH0330432B2 JP H0330432 B2 JPH0330432 B2 JP H0330432B2 JP 57142285 A JP57142285 A JP 57142285A JP 14228582 A JP14228582 A JP 14228582A JP H0330432 B2 JPH0330432 B2 JP H0330432B2
Authority
JP
Japan
Prior art keywords
processing container
basket
cleaning
drying
draining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57142285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5932987A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14228582A priority Critical patent/JPS5932987A/ja
Publication of JPS5932987A publication Critical patent/JPS5932987A/ja
Publication of JPH0330432B2 publication Critical patent/JPH0330432B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP14228582A 1982-08-16 1982-08-16 洗浄乾燥装置 Granted JPS5932987A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14228582A JPS5932987A (ja) 1982-08-16 1982-08-16 洗浄乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14228582A JPS5932987A (ja) 1982-08-16 1982-08-16 洗浄乾燥装置

Publications (2)

Publication Number Publication Date
JPS5932987A JPS5932987A (ja) 1984-02-22
JPH0330432B2 true JPH0330432B2 (cs) 1991-04-30

Family

ID=15311810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14228582A Granted JPS5932987A (ja) 1982-08-16 1982-08-16 洗浄乾燥装置

Country Status (1)

Country Link
JP (1) JPS5932987A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691062B2 (ja) * 1985-04-24 1994-11-14 日本電気株式会社 半導体スライスの洗浄方法
KR101271677B1 (ko) * 2011-02-14 2013-06-04 주식회사 에이치엠알텍 티브이용 프레임베이스 세척기의 건조장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2182678A1 (cs) * 1972-04-27 1973-12-14 Amstutz Daniel
JPS5232624U (cs) * 1975-08-29 1977-03-08
JPS5399669A (en) * 1977-02-10 1978-08-31 Citizen Watch Co Ltd Washing apparatus

Also Published As

Publication number Publication date
JPS5932987A (ja) 1984-02-22

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