JPH0330428U - - Google Patents

Info

Publication number
JPH0330428U
JPH0330428U JP8995189U JP8995189U JPH0330428U JP H0330428 U JPH0330428 U JP H0330428U JP 8995189 U JP8995189 U JP 8995189U JP 8995189 U JP8995189 U JP 8995189U JP H0330428 U JPH0330428 U JP H0330428U
Authority
JP
Japan
Prior art keywords
gas
process tube
treatment apparatus
heat treatment
gas chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8995189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8995189U priority Critical patent/JPH0330428U/ja
Publication of JPH0330428U publication Critical patent/JPH0330428U/ja
Pending legal-status Critical Current

Links

JP8995189U 1989-07-31 1989-07-31 Pending JPH0330428U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8995189U JPH0330428U (cg-RX-API-DMAC7.html) 1989-07-31 1989-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8995189U JPH0330428U (cg-RX-API-DMAC7.html) 1989-07-31 1989-07-31

Publications (1)

Publication Number Publication Date
JPH0330428U true JPH0330428U (cg-RX-API-DMAC7.html) 1991-03-26

Family

ID=31639500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8995189U Pending JPH0330428U (cg-RX-API-DMAC7.html) 1989-07-31 1989-07-31

Country Status (1)

Country Link
JP (1) JPH0330428U (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274319A (ja) * 1985-05-29 1986-12-04 Oki Electric Ind Co Ltd 半導体物品の熱処理装置
JPS62154722A (ja) * 1985-12-27 1987-07-09 Hitachi Ltd 処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61274319A (ja) * 1985-05-29 1986-12-04 Oki Electric Ind Co Ltd 半導体物品の熱処理装置
JPS62154722A (ja) * 1985-12-27 1987-07-09 Hitachi Ltd 処理装置

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