JPH0330269U - - Google Patents
Info
- Publication number
- JPH0330269U JPH0330269U JP9138689U JP9138689U JPH0330269U JP H0330269 U JPH0330269 U JP H0330269U JP 9138689 U JP9138689 U JP 9138689U JP 9138689 U JP9138689 U JP 9138689U JP H0330269 U JPH0330269 U JP H0330269U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- chamber
- point
- flow channel
- wafer mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9138689U JPH0718765Y2 (ja) | 1989-08-01 | 1989-08-01 | 薄膜形成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9138689U JPH0718765Y2 (ja) | 1989-08-01 | 1989-08-01 | 薄膜形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0330269U true JPH0330269U (enrdf_load_stackoverflow) | 1991-03-25 |
JPH0718765Y2 JPH0718765Y2 (ja) | 1995-05-01 |
Family
ID=31640871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9138689U Expired - Fee Related JPH0718765Y2 (ja) | 1989-08-01 | 1989-08-01 | 薄膜形成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0718765Y2 (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000002780A1 (fr) * | 1998-07-08 | 2000-01-20 | Saitama Medicom Co., Ltd. | Systeme de confection d'emballages de medicaments |
JP2002282340A (ja) * | 2001-03-28 | 2002-10-02 | Higashi Nihon Medicom Kk | 薬剤の服用時点別包装システム |
US7276125B2 (en) | 2003-12-22 | 2007-10-02 | Toshiba Ceramics Co., Ltd. | Barrel type susceptor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5948789B2 (ja) | 2011-10-18 | 2016-07-06 | 大日本印刷株式会社 | 複写帳票 |
-
1989
- 1989-08-01 JP JP9138689U patent/JPH0718765Y2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000002780A1 (fr) * | 1998-07-08 | 2000-01-20 | Saitama Medicom Co., Ltd. | Systeme de confection d'emballages de medicaments |
JP2002282340A (ja) * | 2001-03-28 | 2002-10-02 | Higashi Nihon Medicom Kk | 薬剤の服用時点別包装システム |
US7276125B2 (en) | 2003-12-22 | 2007-10-02 | Toshiba Ceramics Co., Ltd. | Barrel type susceptor |
Also Published As
Publication number | Publication date |
---|---|
JPH0718765Y2 (ja) | 1995-05-01 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |