JPS63131122U - - Google Patents

Info

Publication number
JPS63131122U
JPS63131122U JP2191887U JP2191887U JPS63131122U JP S63131122 U JPS63131122 U JP S63131122U JP 2191887 U JP2191887 U JP 2191887U JP 2191887 U JP2191887 U JP 2191887U JP S63131122 U JPS63131122 U JP S63131122U
Authority
JP
Japan
Prior art keywords
pipe
introduction
high temperature
temperature reaction
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2191887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2191887U priority Critical patent/JPS63131122U/ja
Publication of JPS63131122U publication Critical patent/JPS63131122U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP2191887U 1987-02-17 1987-02-17 Pending JPS63131122U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2191887U JPS63131122U (enrdf_load_stackoverflow) 1987-02-17 1987-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2191887U JPS63131122U (enrdf_load_stackoverflow) 1987-02-17 1987-02-17

Publications (1)

Publication Number Publication Date
JPS63131122U true JPS63131122U (enrdf_load_stackoverflow) 1988-08-26

Family

ID=30818804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2191887U Pending JPS63131122U (enrdf_load_stackoverflow) 1987-02-17 1987-02-17

Country Status (1)

Country Link
JP (1) JPS63131122U (enrdf_load_stackoverflow)

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