JPH0329737Y2 - - Google Patents
Info
- Publication number
- JPH0329737Y2 JPH0329737Y2 JP12502384U JP12502384U JPH0329737Y2 JP H0329737 Y2 JPH0329737 Y2 JP H0329737Y2 JP 12502384 U JP12502384 U JP 12502384U JP 12502384 U JP12502384 U JP 12502384U JP H0329737 Y2 JPH0329737 Y2 JP H0329737Y2
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- light receiving
- probe
- light
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 32
- 230000003287 optical effect Effects 0.000 claims description 24
- 230000001678 irradiating effect Effects 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims description 10
- 230000000007 visual effect Effects 0.000 claims 1
- 230000007547 defect Effects 0.000 description 14
- 239000013307 optical fiber Substances 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 9
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12502384U JPS6140654U (ja) | 1984-08-18 | 1984-08-18 | 光学的検査用プロ−ブ |
| US06/765,670 US4718760A (en) | 1984-08-18 | 1985-08-14 | Apparatus for optically inspecting object having reflecting surface |
| US07/072,121 US4732474A (en) | 1984-08-18 | 1987-07-10 | Apparatus for optically inspecting object having reflecting surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12502384U JPS6140654U (ja) | 1984-08-18 | 1984-08-18 | 光学的検査用プロ−ブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6140654U JPS6140654U (ja) | 1986-03-14 |
| JPH0329737Y2 true JPH0329737Y2 (de) | 1991-06-25 |
Family
ID=30683713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12502384U Granted JPS6140654U (ja) | 1984-08-18 | 1984-08-18 | 光学的検査用プロ−ブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6140654U (de) |
-
1984
- 1984-08-18 JP JP12502384U patent/JPS6140654U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6140654U (ja) | 1986-03-14 |
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