JPH0329535B2 - - Google Patents

Info

Publication number
JPH0329535B2
JPH0329535B2 JP60265055A JP26505585A JPH0329535B2 JP H0329535 B2 JPH0329535 B2 JP H0329535B2 JP 60265055 A JP60265055 A JP 60265055A JP 26505585 A JP26505585 A JP 26505585A JP H0329535 B2 JPH0329535 B2 JP H0329535B2
Authority
JP
Japan
Prior art keywords
measurement
bed
workpiece
reference plane
inclination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60265055A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62124842A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP26505585A priority Critical patent/JPS62124842A/ja
Publication of JPS62124842A publication Critical patent/JPS62124842A/ja
Publication of JPH0329535B2 publication Critical patent/JPH0329535B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Machine Tool Units (AREA)
JP26505585A 1985-11-27 1985-11-27 テ−ブルの傾斜補正型工作機械 Granted JPS62124842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26505585A JPS62124842A (ja) 1985-11-27 1985-11-27 テ−ブルの傾斜補正型工作機械

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26505585A JPS62124842A (ja) 1985-11-27 1985-11-27 テ−ブルの傾斜補正型工作機械

Publications (2)

Publication Number Publication Date
JPS62124842A JPS62124842A (ja) 1987-06-06
JPH0329535B2 true JPH0329535B2 (enrdf_load_stackoverflow) 1991-04-24

Family

ID=17411951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26505585A Granted JPS62124842A (ja) 1985-11-27 1985-11-27 テ−ブルの傾斜補正型工作機械

Country Status (1)

Country Link
JP (1) JPS62124842A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4335980C2 (de) * 1993-10-21 1998-09-10 Wacker Siltronic Halbleitermat Verfahren zum Positionieren einer Werkstückhalterung
JP2000176761A (ja) * 1998-12-10 2000-06-27 Fanuc Ltd 垂直軸直動機構
JP2000288873A (ja) * 1999-04-07 2000-10-17 Fuji Seiki Kk ワーク姿勢調整装置及びワーク姿勢調整方法
JP4530479B2 (ja) * 2000-05-24 2010-08-25 弘 江田 精密加工装置
JP2002127003A (ja) * 2000-10-26 2002-05-08 Hiroshi Eda 姿勢制御装置付精密加工装置及び姿勢制御方法
JP4339732B2 (ja) * 2004-03-31 2009-10-07 株式会社タムラ製作所 精密研削装置および精密研削方法
JP5341165B2 (ja) * 2011-11-08 2013-11-13 住友重機械工業株式会社 ステージ装置及びガントリ型ステージ装置及びステージ装置の制御方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61158138A (ja) * 1984-12-28 1986-07-17 Nec Kansai Ltd ウエハ表面の突起物除去装置

Also Published As

Publication number Publication date
JPS62124842A (ja) 1987-06-06

Similar Documents

Publication Publication Date Title
US10209107B2 (en) Geometric error identification method of multi-axis machine tool and multi-axis machine tool
US8786243B2 (en) Method and device for preparing error map and numerically controlled machine tool having error map preparation function
US6230070B1 (en) Work position adjusting apparatus and adjusting method
EP0344304A1 (en) ASSEMBLY FOR SURFACE TRACKER PROBE.
US6677691B2 (en) Stage apparatus and method of using the same
CN109195742B (zh) 加工中心
JP6803043B2 (ja) 工作機械の幾何誤差測定方法
US8152422B2 (en) Control method for a machine tool with numerical control
US20040129055A1 (en) Measuring apparatus and accuracy analyzing apparatus having the same
JPH10138075A (ja) ワーク姿勢調整装置、調整具及び調整方法
JPH0329535B2 (enrdf_load_stackoverflow)
EP1128931B1 (en) New method of error compensation for angular errors in machining (droop compensation)
EP1008419B1 (en) Vertical axis translation mechanism
JP4626499B2 (ja) パラレルメカニズム及びそのキャリブレーション方法
JP2539097B2 (ja) 加工誤差補正方法及び工作機械
JPH0639042B2 (ja) テ−ブルの駆動装置
JPH0740163A (ja) テーブル移送装置及びその制御方法
JP3027165B2 (ja) 位置決め装置
JPH0811354B2 (ja) 送りユニットの真直度補正装置
JPH04361194A (ja) 撓みを考慮したｘ、ｙ、ｚ軸テーブルの位置修正方法
JPH09216137A (ja) 位置決め装置
JPH0386443A (ja) 超精密加工機の工具位置補正装置
JPH01240259A (ja) 数値制御加工機
JPH02128111A (ja) 精密移動装置
JP2003285244A (ja) Ｎｃ旋盤における熱変位量補正方法及びそれを用いたｎｃ旋盤

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees