JPH03295031A - Method and apparatus for producing magnetic recording medium - Google Patents

Method and apparatus for producing magnetic recording medium

Info

Publication number
JPH03295031A
JPH03295031A JP9786890A JP9786890A JPH03295031A JP H03295031 A JPH03295031 A JP H03295031A JP 9786890 A JP9786890 A JP 9786890A JP 9786890 A JP9786890 A JP 9786890A JP H03295031 A JPH03295031 A JP H03295031A
Authority
JP
Japan
Prior art keywords
support
mask
web
magnetic recording
drum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9786890A
Other languages
Japanese (ja)
Inventor
Junji Nakada
純司 中田
Hideaki Takeuchi
英明 竹内
Tadashi Yasunaga
正 安永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP9786890A priority Critical patent/JPH03295031A/en
Publication of JPH03295031A publication Critical patent/JPH03295031A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the generation of winding wrinkles by setting the thickness of the vapor deposited film at the end edges in the transverse direction of a web-like base in such a manner that the thickness decreases gradually toward both side edges of the base. CONSTITUTION:The web-like base 4 is partially suspended on the peripheral surface of a main drum 2 acting as a cooling can and a mask 6 is provided apart a specified spacing d opposite to the part where the base is suspended. An evaporated magnetic material in a crucible 8 spreads laterally on the side end edges of the aperture 6a of the mask 6. Since the quantity of the spreading evaporated particles is smaller toward the lateral sides, the thickness of the vapor deposited film is smaller toward the ends. The generation of a step at the boundary between the vapor deposited part and non-vapor deposited part is obviated and, therefore, the generation of the winding wrinkles is obviated.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は磁気記録材料をウェブ状支持体に蒸着せしめる
方法及び装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method and apparatus for depositing magnetic recording material onto a web-like support.

(従来の技術) 磁気テープの製造において、金属の磁性材料をウェブ状
の高分子フィルムの支持体上に蒸着して薄膜の磁気記録
層を形成する方法か知られている。
(Prior Art) In the production of magnetic tapes, a method is known in which a metallic magnetic material is deposited on a web-shaped polymer film support to form a thin magnetic recording layer.

これは後でテープ状にスリットされる広幅のウェブ状支
持体を回転ドラム上に懸架して搬送しつつ、その上にル
ツボ中の溶融した金属からなる蒸@源から蒸発した材料
を真空中で蒸着せしめるものであるか、この際、ドラム
の表面近傍にマスクが配され、蒸着材料はこのマスクを
通して支持体上に蒸着される。
In this process, a wide web-like support, which is later slit into tape-like shapes, is suspended on a rotating drum and conveyed, while material evaporated from a vapor source consisting of molten metal in a crucible is placed on top of it in a vacuum. In this case, a mask is placed near the surface of the drum, and the deposition material is deposited onto the support through this mask.

これは、マスクかないと、支持体が懸架されていないド
ラムの端の部分に蒸着が行なわれてしまい、蒸着材料が
ドラム表面を傷めてしまうからである。
This is because, without a mask, vapor deposition would occur at the end of the drum where no support is suspended, and the vapor deposition material would damage the drum surface.

(発明が解決しようとする課題) マスクは、支持体の幅より小さい幅(ここで「幅」とは
、ドラムの軸と平行に測った長さを言う)を有し、マス
クを通して蒸着された支持体上の蒸着層は、支持体の幅
方向の端縁(側縁)がら数層乃至数10m離れた部分か
ら内側に形成される。
(Problem to be Solved by the Invention) The mask has a width (here, "width" refers to the length measured parallel to the axis of the drum) that is smaller than the width of the support, and the mask is The vapor deposition layer on the support is formed inward from a portion several layers to several tens of meters away from the edge (side edge) in the width direction of the support.

したがって、支持体は、略幅全体に一定の厚さの蒸着膜
からなる蒸着部を有するとともに、両側端縁には蒸着の
施されない未蒸着部を有することとなる。このため、蒸
着後に支持体がドラムから離れて次の出口ロールに達す
るところで、支持体の前記蒸着部と未蒸着部の境界付近
にシワが発生し、これは巻取りまでの搬送中消えないた
め巻きシワとなって製品不良の原因になる。
Therefore, the support has a vapor-deposited portion made of a vapor-deposited film of a constant thickness over substantially the entire width, and has undeposited portions on both side edges where no vapor deposition is performed. For this reason, when the support leaves the drum and reaches the next exit roll after vapor deposition, wrinkles occur near the boundary between the vapor-deposited part and the undeposited part of the support, and these wrinkles do not disappear during transportation until winding. This may cause wrinkles in the wrapping and cause product defects.

そこで、本発明はこの巻きシワを発生させない磁気記録
媒体の製造方法及び装置を提供することを目的とするも
のである。
Therefore, an object of the present invention is to provide a method and apparatus for manufacturing a magnetic recording medium that does not cause such winding wrinkles.

(課題を解決するための手段) 本発明は、上記蒸着時に、蒸着部と未蒸着部の境界に段
ができないように、蒸着部の厚さが蒸着部から端縁に向
かうにしたがって次第に小さくなるようにしたことを特
徴とするものである。
(Means for Solving the Problems) In the present invention, during the above-mentioned vapor deposition, the thickness of the vapor-deposited portion gradually decreases from the vapor-deposited portion toward the edge so that no step is formed at the boundary between the vapor-deposited portion and the undeposited portion. It is characterized by the following.

すなわち、本発明による磁気記録媒体の製造方法は、ド
ラム上を搬送されるウェブ状支持体に磁気記録材料を蒸
着することにより前記支持体上に蒸着膜を形成する磁気
記録媒体の製造方法において、前記ウェブ状支持体の幅
方向端縁部における蒸着膜の厚さを、該支持体の両側端
縁に向かうにしたがって次第に小さくするように前記蒸
着を行なうことを特徴とするものである。
That is, the method for manufacturing a magnetic recording medium according to the present invention includes depositing a magnetic recording material on a web-like support conveyed on a drum to form a deposited film on the support. The method is characterized in that the vapor deposition is performed so that the thickness of the vapor-deposited film at the edge in the width direction of the web-like support is gradually reduced toward both side edges of the support.

また、本発明による磁気記録媒体の製造装置は、ウェブ
状支持体を周面に懸架して搬送する回転ドラム、該回転
ドラムの周面から68以上の一定の間隔をおいて該周面
に沿って延びた、開口を有するマスク、および該マスク
を介して前記回転ドラムの周面上の前記ウェブ状支持体
に磁気記録材料を蒸着せしめる蒸着手段からなり、前記
ドラムの軸方向の軸方向の長さより前記支持体の幅の方
を小さく、該支持体の幅より前記マスクの幅の方を小さ
くしたことを特徴とするものである。
The apparatus for manufacturing a magnetic recording medium according to the present invention also includes a rotating drum that transports a web-like support suspended on the circumferential surface, and a web-shaped support that is conveyed along the circumferential surface at a constant interval of 68 or more from the circumferential surface of the rotating drum. and a vapor deposition means for vapor depositing a magnetic recording material onto the web-like support on the peripheral surface of the rotating drum through the mask, the mask having an axial length in the axial direction of the drum. Furthermore, the width of the support is smaller, and the width of the mask is smaller than the width of the support.

すなわち、前記マスクとドラムの間隔をある程度大きく
し、このマスクの両側端においては幅方向に長い蒸発源
からの蒸着材料が蒸発粒子のまわり込み作用によりウェ
ブの端縁に行くにしたがって少量ずつ蒸着するようにし
たことを特徴とするものである。
That is, the distance between the mask and the drum is increased to a certain extent, and at both ends of the mask, the evaporation material from the evaporation source that is long in the width direction is evaporated little by little toward the edge of the web due to the wrapping action of evaporated particles. It is characterized by the following.

(作用および効果) 本発明の磁気記録媒体の製造方法によれば、蒸着部と未
蒸着部の境界に段部ができないので、前述のような巻き
シワが発生するのを防止することができる。また、本発
明による装置によれば、上記のように冷却キャンとの間
に6M以上の間隔をおいてマスクを設けたので、そのマ
スクの開口の両側縁において蒸着粒子が側方へまわり込
み、ウェブの端縁において次第に厚さの減少する蒸着膜
で得ることができる。
(Operations and Effects) According to the method for manufacturing a magnetic recording medium of the present invention, no step portion is formed at the boundary between the deposited portion and the undeposited portion, so that the occurrence of the winding wrinkles as described above can be prevented. Further, according to the apparatus according to the present invention, since the mask is provided with a distance of 6M or more between the cooling can and the cooling can as described above, the vapor deposition particles wrap around to the sides at both sides of the opening of the mask. It can be obtained with a deposited film of decreasing thickness at the edges of the web.

なお、一定の厚さを有する蒸着部から次第に厚さを減少
する部分は好ましくはウェブの端まで延び、未蒸着部は
殆どなくするのが望ましい。
Note that it is preferable that a portion whose thickness gradually decreases from a deposited portion having a constant thickness extend to the end of the web, and that the undeposited portion be almost completely eliminated.

(実 施 例) 以下、図面により本発明の実施例を詳細に説明する。(Example) Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図および第2図は本発明による方法を実施する装置
の一例を示すものである。冷却キャンとして作用するメ
インドラム2には、この周面にウェブ状支持体4か部分
的に懸架され、その懸架される部分に対向して6mm以
上の一定間隔dをおいてマスク6か設けられる。このマ
スク6は矩形の開口右6aを有し、この間口6aの幅W
mはドラム2の幅Wdより小さくなっている。前記ウェ
ブ状支持体4の幅Wdは、前記ドラム2の幅Wmより大
きい。このマスク6の下方に磁気材料の蒸発源としての
ルツボ8か配置されている。このルツボ8はマスク6の
開口6aの幅を十分にカバーするだけの幅を有している
1 and 2 show an example of an apparatus for carrying out the method according to the invention. A web-like support 4 is partially suspended on the main drum 2 acting as a cooling can, and a mask 6 is provided at a constant interval d of 6 mm or more opposite the suspended part. . This mask 6 has a rectangular opening right 6a, and the width W of this opening 6a is
m is smaller than the width Wd of the drum 2. The width Wd of the web-like support 4 is larger than the width Wm of the drum 2. A crucible 8 is placed below this mask 6 as an evaporation source for the magnetic material. This crucible 8 has a width sufficient to cover the width of the opening 6a of the mask 6.

ルツボ8の中の磁気材料には、電子ビームが走査され、
これにより磁気材料を溶融し、かつ蒸発させる。蒸発し
た材料は第2図に2点鎖線で示すように、マスク6の開
口6aの側端縁において側方に回り込み、この回り込み
の蒸発粒子の量は側方へ行く程小さくなるので、第3図
に示すように、蒸着膜10の厚さは端へ行く程小さくな
る。すなわち、蒸着膜10は、支持体4の殆ど全体に亘
る一定の厚さの蒸着主部10aと、支持体4の側縁部の
、厚さが勾配を有する蒸着縁部10bとからなる。
The magnetic material in the crucible 8 is scanned with an electron beam,
This melts and vaporizes the magnetic material. The evaporated material wraps around to the side at the side edge of the opening 6a of the mask 6, as shown by the two-dot chain line in FIG. As shown in the figure, the thickness of the deposited film 10 decreases toward the ends. That is, the vapor deposited film 10 consists of a main vapor deposition part 10a having a constant thickness covering almost the entire support 4, and a vapor deposition edge part 10b having a gradient thickness at the side edge of the support 4.

前記マスク6とドラム2の周面との間隔dは、この種の
薄膜型磁気テープの場合、6m以上が必要で、これより
小さいと蒸着縁部10bの幅が小さくなりすぎ、蒸着部
と未蒸着部との間にできた段が前述の巻きシワを発生さ
せる原因となる。この間隔が6mm以上であればその問
題はないが、上限はマスク6とドラム2の位置関係によ
り自ずから決まる。すなわち、蒸発材料が支持体4の側
縁から外へ飛び出し、ドラムの周面に付着することがな
い程度には、マスク6はドラム2に近接していなければ
ならない。したがって、マスク6の開口の幅Wliと支
持体4の幅wbの差が大きいときは、マスク6をかなり
ドラム2の周面から離してもよいが、この差が小さいと
きはマスク6はドラム2の周面に近づけなければならな
い。
In the case of this type of thin film magnetic tape, the distance d between the mask 6 and the circumferential surface of the drum 2 must be at least 6 m. If it is smaller than this, the width of the evaporation edge 10b becomes too small, and the evaporation area and The steps formed between the film and the vapor deposition part cause the above-mentioned curling wrinkles. If this interval is 6 mm or more, there is no problem, but the upper limit is naturally determined by the positional relationship between the mask 6 and the drum 2. That is, the mask 6 must be close to the drum 2 to such an extent that the evaporated material does not fly out from the side edges of the support 4 and adhere to the circumferential surface of the drum. Therefore, when the difference between the width Wli of the opening of the mask 6 and the width wb of the support body 4 is large, the mask 6 may be separated from the circumferential surface of the drum 2 considerably, but when this difference is small, the mask 6 is must be close to the circumferential surface of the

なお、従来の装置では、この間隔dは約4mであった。Note that in the conventional device, this distance d was about 4 m.

具体的には、上記方法に基づき、次の条件により装置を
構成して、実施をした。
Specifically, based on the above method, an apparatus was constructed under the following conditions, and the experiment was carried out.

到達真空度       2.OX 10’ Torr
蒸着真空度       6.OXIO″’ Torr
搬送速度        100 TrL/sin支持
体幅(Wb )     5QQ H1マスク開口幅(
Wm )   480 mマスクとドラムの間隔  1
0m 電子銃の出力      70 Kν×2蒸着膜厚  
     2000人 蒸着材料        Co Ni O支持体厚  
      10μm このような諸元で実験したところ、支持体の側縁内側的
10mの部分より外方に向けて、厚みに勾配をもった蒸
着膜の側縁の蒸着縁部が良好に形成された。
Ultimate vacuum 2. OX 10' Torr
Evaporation vacuum degree 6. OXIO''' Torr
Conveyance speed 100 TrL/sin Support width (Wb) 5QQ H1 mask opening width (
Wm) 480 m Distance between mask and drum 1
0m Electron gun output 70 Kν×2 Deposited film thickness
2000 people evaporation material Co Ni O support thickness
10 μm When an experiment was conducted using these specifications, a vapor deposition edge on the side edge of the vapor deposited film having a thickness gradient outward from a 10 m inner side edge portion of the support was well formed.

なお、上記実施例ではマスク6は前記ドラム2に対して
固定された位置に配設されているが、このマスク6をド
ラム2の回転軸と平行な方向に細かく振動させることに
よって、蒸着膜の厚さを縁部において漸減させることも
可能である。これにより本発明の方法を実施することも
できる。すなわち、前記マスク6を正弦波あるいは3角
波を描くように軸方向に振動させれば、蒸着材料の蒸着
量は蒸着部の端縁においては外方へ向かって漸減し、本
発明の方法を実現することができる。
In the above embodiment, the mask 6 is arranged at a fixed position with respect to the drum 2, but by finely vibrating the mask 6 in a direction parallel to the rotation axis of the drum 2, the deposited film can be removed. It is also possible for the thickness to taper off at the edges. This also allows the method of the invention to be implemented. That is, if the mask 6 is vibrated in the axial direction so as to draw a sine wave or a triangular wave, the amount of the vapor deposition material gradually decreases outward at the edge of the vapor deposition part, and the method of the present invention can be carried out. It can be realized.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の磁気記録媒体の製造方法を実施する装
置の一例を示す斜視図、 第2図はその一部を拡大して示す一部断両立面図、 第3図はさらにその一部を拡大して示す断面図である。 2・・・回転ドラム(冷却キャン) 4・・・ウェブ状支持体   6・・・マスク6a・・
・マスクの開口    8・・・ルツボ10・・・蒸着
膜       10a・・・蒸着主部10b・・・蒸
着縁部 第1図
FIG. 1 is a perspective view showing an example of an apparatus for carrying out the method of manufacturing a magnetic recording medium of the present invention, FIG. FIG. 2... Rotating drum (cooling can) 4... Web-like support 6... Mask 6a...
・Mask opening 8... Crucible 10... Vapor deposited film 10a... Vapor deposition main part 10b... Vapor deposition edge FIG.

Claims (1)

【特許請求の範囲】 1)ドラム上を搬送されるウェブ状支持体に磁気記録材
料を蒸着することにより前記支持体上に蒸着膜を形成す
る磁気記録媒体の製造方法において、前記ウェブ状支持
体の幅方向端縁部における蒸着膜の厚さを、該支持体の
両側端縁に向かうにしたがって次第に小さくするように
前記蒸着を行なうことを特徴とする磁気記録媒体の製造
方法。 2)ウェブ状支持体を周面に懸架して搬送する回転ドラ
ム、該回転ドラムの周面から6mm以上の一定の間隔を
おいて該周面に沿って延びた、開口を有するマスク、お
よび該マスクを介して前記回転ドラムの周面上の前記ウ
ェブ状支持体に磁気記録材料を蒸着せしめる蒸着手段か
らなり、前記ドラムの軸方向の軸方向の長さより前記支
持体の幅の方が小さく、該支持体の幅より前記マスクの
幅の方が小さいことを特徴とする磁気記録媒体の製造装
置。
[Scope of Claims] 1) A method for producing a magnetic recording medium, comprising depositing a magnetic recording material on a web-like support conveyed on a drum to form a deposited film on the support, wherein the web-like support A method for producing a magnetic recording medium, characterized in that the vapor deposition is performed so that the thickness of the vapor-deposited film at the edge in the width direction of the support is gradually reduced toward both edges of the support. 2) A rotating drum that transports a web-like support suspended on its circumferential surface, a mask having openings extending along the circumferential surface at a constant interval of 6 mm or more from the circumferential surface of the rotating drum, and comprising a vapor deposition means for vapor depositing a magnetic recording material onto the web-like support on the peripheral surface of the rotating drum through a mask, the width of the support being smaller than the length in the axial direction of the drum; A manufacturing apparatus for a magnetic recording medium, wherein the width of the mask is smaller than the width of the support.
JP9786890A 1990-04-13 1990-04-13 Method and apparatus for producing magnetic recording medium Pending JPH03295031A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9786890A JPH03295031A (en) 1990-04-13 1990-04-13 Method and apparatus for producing magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9786890A JPH03295031A (en) 1990-04-13 1990-04-13 Method and apparatus for producing magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH03295031A true JPH03295031A (en) 1991-12-26

Family

ID=14203726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9786890A Pending JPH03295031A (en) 1990-04-13 1990-04-13 Method and apparatus for producing magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH03295031A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009209381A (en) * 2008-02-29 2009-09-17 Fujifilm Corp Film-forming apparatus, gas barrier film, and method for producing gas barrier film
WO2020137671A1 (en) * 2018-12-27 2020-07-02 三菱重工業株式会社 Composite material and method of forming composite material

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018530B2 (en) * 1977-02-28 1985-05-10 積水化学工業株式会社 Method and device for manufacturing thermoplastic resin blow molded products
JPS647325A (en) * 1987-02-16 1989-01-11 Matsushita Electric Ind Co Ltd Production of magnetic recording medium

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018530B2 (en) * 1977-02-28 1985-05-10 積水化学工業株式会社 Method and device for manufacturing thermoplastic resin blow molded products
JPS647325A (en) * 1987-02-16 1989-01-11 Matsushita Electric Ind Co Ltd Production of magnetic recording medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009209381A (en) * 2008-02-29 2009-09-17 Fujifilm Corp Film-forming apparatus, gas barrier film, and method for producing gas barrier film
WO2020137671A1 (en) * 2018-12-27 2020-07-02 三菱重工業株式会社 Composite material and method of forming composite material

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